FiberAlign FA95e and FA130e Series Direct-Drive, Multi-Axis Photonics Alignment System

Description

Design Features

  • 3- to 6-axis photonics alignment
  • High resolution (2 nm), repeatability (100 nm), and accuracy (300 nm)
  • Anti-creep crossed-roller bearings
  • Noncontact direct-drive linear motors
  • Direct-drive rotary and goniometer options
  • Raster, spiral, or power peaking algorithms
  • Interface to industry-standard power meters

Introduction

Aerotech’s enhanced FiberAlign® FAe series is the latest high-performance photonics aligning system incorporating best-in-class drive and state-of-the-art axis control technology. It builds on the success of the original FiberAlign systems while improving accuracies and shrinking step sizes. The modular design permits the selection of the number of axes, travel distance, and load capacity to exactly fit the application, all while maintaining high-speed, resolution, and accuracy.

Automated Production

As alignment accuracies, the quest for higher yields, and device volumes increase, the need for a precise, reliable, and repeatable motion system becomes increasingly important. Due to the rapidly changing nature of components and manufacturing processes, flexibility in system configuration becomes a must. Aerotech’s FAe series responds to and satisfies all of these requirements. With the selection of robust system components and decades of precision motion experience, high-volume production in a 24/7 manufacturing environment has become a reality.

Advanced Drive Technology

Only noncontact direct-drive technology offers the robust, accurate, high-speed, and high-resolution positioning necessary for mass production of precision devices. Aerotech's state-of-the-art drive technology offers industry-leading resolution combined with travels up to 160 mm and positioning speeds up to 200 mm/s. Utilizing ultra-quiet linear drives and advanced control technology, Aerotech’s FAe series offers the best position repeatability, accuracy, and in-position stability to meet the motion system requirement of higher yields.

Fast Vision Alignment and Power Scanning Algorithms

A comprehensive software toolkit provides easy access to commonly used functions. Alignment functions such as hill climbing from a power meter input, and raster, square, or circular spiral scans are easily implemented via standard functions. In addition to the automated tools, both joystick and on-screen jog control are available for manual operations.

FA95e or FA130e - Which is Right for You?

To satisfy the ongoing positioning and processing needs of the photonics manufacturing industry, Aerotech offers both the FA95e and FA130e. Both basic three-axis models can be extended with additional axes to satisfy the requirement to control motion in six axes: X, Y, Z, T (yaw), P (pitch), R (roll).

FA95e represents the more compact version (one-third of the volume of FA130e) and is ideal where space is limited. Additional axes can be attached to provide high-resolution, high-accuracy rotary motion.

Yaw rotary motion is provided by Aerotech’s ANT95-R direct-drive, high-resolution rotary actuators, while pitch and roll motion are provided by Aerotech’s advanced ANT-20G series direct-drive, high-resolution goniometers. The rotary devices offer a 20 degree angular range with industry-leading step resolution of 0.01 arc-seconds.

The FA130e is similar in construction to the FA95e but offers a larger travel and larger load carrying capability in a slightly larger envelope. Travel for the X and Y axes are selectable up to 160 millimeters.

The FA130e also accepts the ANT95-R rotary actuator and the ANT-20G goniometers, providing up to six axes of motion control.

Specifications

FA95e Series Specifications

Mechanical SpecificationsFA95e-25XY-25ZFA95e-25XY-50ZFA95e-50XY-25ZFA95e-50XY-50Z
Number of Axes 25 x 25 x 25 mm 25 x 25 x 50 mm 50 x 50 x 25 mm 50 x 50 x 50 mm
Accuracy(1) XY Std ±2.5 µm
Plus ±250 nm
Z Std ±4 µm
Plus ±300 nm
Resolution
(Minimum Incremental Motion)(1)
2 nm
Repeatability
(Bidirectional)(1)
±100 nm
Orthogonality XY Std 10 arc-sec
Plus 3 arc-sec
Z to XY Std 10 arc-sec
Plus 10 arc-sec
Maximum Speed(2) 200 mm/s
In-Position Stability(3) <2 nm
Maximum Force (Continous) XY 7.75 N 7.75 N 9.5 N 9.5 N
Z 7.75 N 9.5 N 7.75 N 9.5 N
Load Capacity 3.0 kg 3.0 kg 5.0 kg 5.0 kg
Moving Mass XY (Lower) 3.0 kg 3.7 kg 4.0 kg 4.6 kg
XY (Upper) 2.4 kg 3.0 kg 2.7 kg 3.3 kg
Z 0.46 kg 0.46 kg 0.52 kg 0.52 kg
Stage Mass 3.7 kg 4.3 kg 5.1 kg 5.7 kg
Material Aluminumm body, Black Hardcoat Finish
MTBF (Mean Time
Between Failure)
20,000 hrs
  1. Values listed are per axis.
  2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
  3. In-position stability listing is 3 sigma value.
  4. Z-axis counterbalance air supply must be clean, dry, and filtered to 0.25 µm or better. Nitrogen at 99.9% purity is recommended. Supply pressure is determined by the amount of payload to the stage.
  5. -PLUS requires the use of an Aerotech controller.

Electrical SpecificationsFA95e-XY-Z
Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder
Maximum Bus Voltage ±40 VDC
Limit Switches 5 V, Normally-closed
Home Switch Near center of travel

Recommended ControllerFA95e-XY-Z
Multi-Axis A3200 Npaq-MXR
Npaq MR-MXR
Ndrive ML-MXH
Ensemble Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH
Single Axis Soloist Soloist ML-MXH
  1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

FA130e Series Specifications

    Mechanical SpecificationsFA130e-60XY-35ZFA130e-60XY-60ZFA130e-110XY-35ZFA130e-110XY-60Z
    Number of Axes 60 x 60 x 35 mm 60 x 60 x 60 mm 110x 110 x 35 mm 110 x 110 x 60 mm
    Accuracy(1) XY Std ±2.5 µm ±2.5 µm ±4.0 µm ±4.0 µm
    Plus ±250 nm ±250 nm ±300 nm ±300 nm
    Z Std ±3 µm
    Plus ±300 nm
    Resolution
    (Minimum Incremental Motion)(1)
    2 nm
    Repeatability
    (Bidirectional)(1)
    ±100 nm
    Orthogonality XY Std 10 arc-sec
    Plus 3 arc-sec
    Z to XY Std 10 arc-sec
    Plus 10 arc-sec
    Maximum Speed(2) 200 mm/s
    In-Position Stability(3) <2 nm
    Maximum Force (Continous) XY 23 N
    Z 23 N
    Load Capacity 8.0 kg
    Moving Mass XY (Lower) 8.5 kg 9.4 kg 10.0 kg 10.9 kg
    XY (Upper) 5.8 kg 6.7 kg 6.4 kg 7.3 kg
    Z 1.2 kg 1.4 kg 1.2 kg 1.4 kg
    Stage Mass 9.8 kg 10.7 kg 11.7 kg 12.6 kg
    Material Aluminumm body, Black Hardcoat Finish
    MTBF (Mean Time
    Between Failure)
    20,000 hrs
    1. Values listed are per axis.
    2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
    3. In-position stability listing is 3 sigma value.
    4. Z-axis counterbalance air supply must be clean, dry, and filtered to 0.25 µm or better. Nitrogen at 99.9% purity is recommended. Supply pressure is determined by the amount of payload to the stage.
    5. -PLUS requires the use of an Aerotech controller.

    Mechanical SpecificationsFA130e-160XY-35ZFA130e-160XY-60Z
    Number of Axes 160 x 160 x 35 mm 160 x 160 x 60 mm
    Accuracy(1) XY Std ±5.0 µm ±5.0 µm
    Plus ±300 nm
    Z Std ±3 µm
    Plus ±300 nm
    Resolution
    (Minimum Incremental Motion)(1)
    2 nm
    Repeatability
    (Bidirectional)(1)
    ±100 nm
    Orthogonality XY Std 10 arc-sec
    Plus 3 arc-sec
    Z to XY Std 10 arc-sec
    Plus 10 arc-sec
    Maximum Speed(2) 200 mm/s
    In-Position Stability(3) <2 nm
    Maximum Force (Continous) XY 23 N
    Z 23 N
    Load Capacity 8.0 kg
    Moving Mass XY (Lower) 11.2 kg 12.1 kg
    XY (Upper) 6.7 kg 7.6 kg
    Z 1.2 kg 1.4 kg
    Stage Mass 13.2 kg 14.1 kg
    Material Aluminumm body, Black Hardcoat Finish
    MTBF (Mean Time
    Between Failure)
    20,000 hrs
    1. Values listed are per axis.
    2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
    3. In-position stability listing is 3 sigma value.
    4. Z-axis counterbalance air supply must be clean, dry, and filtered to 0.25 µm or better. Nitrogen at 99.9% purity is recommended. Supply pressure is determined by the amount of payload to the stage.
    5. -PLUS requires the use of an Aerotech controller.

    Electrical SpecificationsFA130e-XY-Z
    Drive System Brushless Linear Servomotor
    Feedback Noncontact Linear Encoder
    Maximum Bus Voltage ±40 VDC
    Limit Switches 5 V, Normally-closed
    Home Switch Near center of travel

    Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech.


    Recommended Controller FA130e-XY-Z
    Multi-Axis A3200 Npaq-MXR
    Npaq MR-MXR
    Ndrive ML-MXH
    Ensemble Epaq-MXH
    Epaq MR-MXH
    Ensemble ML-MXH
    Single Axis Soloist Soloist ML-MXH

    Dimensions

    • FA95e
    • FA130e

    Ordering Information

    FA95e Series Ordering Example

    FA95e -25XY -25Z -RH -T -A -PLUS

    Ordering Options

    SeriesXY AxisZ AxisZ-Axis Cable ExitOptional Rotary AxesAxis OrientationAccuracy Grade
    FA95e -25XY
    -50XY
    -25Z -RH
    -LH
    -T
    -P
    -R
    -A
    -B
    -C
    -PLUS

    FA95e Direct-Drive, Multi-Axis Photonics Alignment System

    OptionDescription
    FA95e Proprietary direct-drive motor technology, linear-encoder-based fiber translator; XYZ axes aligned to 10 arc-sec orthogonal

    XY Axis

    OptionDescription
    -25XY 25 mm x 25 mm XY travel
    -50XY 50 mm x 50 mm XY travel

    Z Axis

    OptionDescription
    -25Z 25 mm Z travel

     

    Z-Axis Cable Exit

    OptionDescription
    -RH Z-axis right-hand cable exit
    -LH Z-axis left-hand cable exit

    Optional Rotary Axes

    OptionDescription
    The axis orientation is X,Y,Z working from the bottom to the top axis. X is bottom axis, Y is middle axis, and Z is the top (vertical) axis.
    -T Single rotary-axis oriented as yaw; rotation about Y-axis (ANT95-20-R)
    -P Single goniometer rotary-axis oriented as pitch; rotation about Y-axis (ANT-20G)
    -R Single goniometer rotary-axis oriented as roll; rotation about X-axis (ANT-20G)

    Note: Other axis combinations available upon request.

    Axis Orientation

    The letters in the axis orientation correspond to the standard XYZ configurations detailed in Aerotech's multi-axis assembly specification. The letter indicates the orientation of the vertical axis (Z) relative to the bottom axis (X).
    -A XY cable exits in the rear; vertical axis tabletop parallel to middle-axis (Y) facing to the front
    -B XY cable exits in the rear; vertical axis tabletop parallel to bottom-axis (X) facing to the left
    -C XY cable exits in the rear; vertical axis tabletop parallel to bottom-axis (X) facing to the right

    Optional Accuracy Grade

    -PLUS High-accuracy version

    FA130e Ordering Example

    FA130e -60XY -35Z -T -A -PLUS

    Ordering Options

    SeriesXY AxisZ AxisOptional Rotary AxisAxis OrientationAccuracy Grade
    FA130e -60XY
    -110XY
    -160XY
    -35Z
    -60z
    -T
    -P
    -R
    -A
    -B
    -C
    -PLUS

    FA130e Direct-Drive, Multi-Axis Photonics Alignment System

    OptionDescription
    FA130e Proprietary direct-drive motor technology, linear-encoder-based fiber translator; XYZ axes aligned to 10 arc-sec orthogonal

    XY Axis

    OptionDescription
    -60XY 60 mm x 60 mm XY travel
    -110XY 110 mm x 100 mm XY travel
    -160XY 160 mm x 160 mm XY travel

    Z Axis

    OptionDescription
    -35Z 35 mm Z travel
    -60Z 60 mm Z travel

    Optional Rotary Axes

    OptionDescription
    The axis orientation is X,Y,Z working from the bottom to the top axis. X is bottom axis, Y is middle axis, and Z is the top (vertical) axis
    -T Single rotary-axis oriented as yaw; rotation about Y-axis (ANT95-20-R)
    -P Single goniometer rotary-axis oriented as pitch; rotation about Y-axis (ANT-20G)
    -R Single goniometer rotary-axis oriented as roll; rotation about X-axis (ANT-20G)

    Note: Other axis combinations available upon request.

    Axis Orientation

    OptionDescription
    The letters in the axis orientation correspond to the standard XYZ configurations detailed in Aerotech's multi-axis assembly specification. The letter indicates the orientation of the vertical axis (Z) relative to the bottom axis (X).
    -A XY cable exits in the rear; vertical axis tabletop parallel to middle-axis (Y) facing to the front
    -B XY cable exits in the rear; vertical axis tabletop parallel to bottom-axis (X) facing to the left
    -C XY cable exits in the rear; vertical axis tabletop parallel to bottom-axis (X) facing to the right

    Optional Accuracy Grade

    -PLUS High-accuracy version