FiberGlide 3D Fiberoptics Positioner

Description

Design Features

  • Designed for high-performance photonics alignment and assembly
  • Linear encoder feedback provides up to 2 nm resolution
  • 62 picometer resolution available with the Automation 3200
  • Fully-preloaded air bearing
  • Complete noncontact design
  • Ultra-smooth velocity control

The FiberGlide 3D series represents the highest performance miniature three axis air-bearing stages available. Aerotech has combined over 30 years of precision motion control and positioning system experience with the latest technologies to produce a truly outstanding miniature, linear air-bearing stage.

Linear Stage

The linear positioner is a fully preloaded, noncontact design. Inherently frictionless, air bearings have proven to be the standard in precision applications, and Aerotech has now produced a miniature version that is well-suited for the photonics industry. Driven by a noncontact linear brushless servomotor, this stage proves the ultimate solution whether the application requires small, accurate steps or constant smooth velocity. Years of research have resulted in a robust and perturbation-free cable management system.

Feedback and Control System

Directly coupled, noncontact linear encoder position feedback is available with different options. A wide selection of state-of-the-art controllers is available, featuring the Automation 3200 software controller with digital drives.

Options

Convenient rack or panel-mount amplifiers are included with all systems. Aerotech’s expert technical staff is experienced in custom system designs and will work with you to generate a system to meet the unique needs of your application.

Clean Room Compatibility

The air-bearing design is inherently clean room compatible. A high quality cable management system, together with low particulate generation materials, provides compliance to Class 1 with proper integration.

Specifications

FiberGlide 3D Specifications

ModelFiberGlide 3D
Total Travel 25 mm 50 mm 100 mm 150 mm
Drive System Linear Brushless Servomotor
Bus Voltage up to 160 VDC
Continuous Current Apk up to 2.9 A
Arms up to 2.1 A
BEMF, line-line, max. V/m/sec 3.77952
V/in/sec 0.096
Force Constant,
Sinusoidal Drive
N/A (lb/A), pk 3.29 (0.739)
N/A (lb/A), rms 4.65 (1.04)
Resistance, 25°C,
Line-Line
Ohms 5.2
Resistance, 125°C,
Line-Line
Ohms 7.28
Inductance,
Line-Line
mH 0.7
Magnetic Pole Pitch mm (inch) 16 (0.63)
Feedback Noncontact Linear Encoder
Resolution LN 1 nm
LT 5 nm
Maximum Travel Speed(1) 300 mm/s
Maximum Linear Acceleration 1 g -10 m/s2 (No Load)
Maximum Load 5.0 kg
Accuracy LN ±0.2 µm(2)
±1 µm
±0.2 µm(2)
±1 µm
±0.2 µm(2)
±2 µm
±0.5 µm(2)
±5 µm
LT ±0.3 µm(2)
±2 µm
±0.3 µm(2)
±2 µm
±0.3 µm(2)
±5 µm
±0.5 µm(2)
±5 µm
Repeatability LN(2) ±50 nm
LT ±50 nm(2); ±100 nm
Straightness and Flatness(3) ±0.25 µm ±0.25 µm ±0.4 µm ±0.4 µm
Pitch and Yaw ±0.25 arc
sec/25 mm
±0.25 arc
sec/25 mm
±0.25 arc
sec/25 mm
±1.5 arc
sec/25 mm
Nominal Stage Weight 4.5 kg 5.5 kg 6.4 kg 12.7 kg
Moving Mass 1.9 kg 4.8 kg
Operating Pressure(4) 80 psi ±5 psi
Air Consumption(5)(6) 53.1 SLPM @ 80 psi
Construction Aluminum Body/Hardcoat
  1. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
  2. Values with Aerotech controls and HAL option.
  3. Dependent on flatness of stage mounting surface.
  4. To protect air bearing against under-pressure, an in-line pressure switch is required and tied to the contoller E-stop input.
  5. Air supply must be clean, dry to 0° F dew point, and filtered to 0.25 µm or better; recommend nitrogen at 99.99% purity.
  6. Maximum expected air consumption for a three-axis system.

Dimensions

  • FiberGlide 3D

Ordering Information

Ordering Example

FG1000-3D -100 -LT

Ordering Options

SeriesTravel (mm)Feedback
FA130US -25
-50
-100
-150
-LT
-LN
-LT/lower
-LN/lower
-LT/upper
-LN/upper
-LT/vertical
-LN/vertical

FiberGlide 1000 Series Photonics Alignment and Assembly System

OptionDescription
FG1000-3D Linear air bearing positioner

Linear Stage Travel (Z, X, Y)

OptionDescription
-25* 25 mm (1 in) travel stage with linear motor
-50 50 mm (2 in) travel stage with linear motor
-100 100 mm (4 in) travel stage with linear motor
-150** 150 mm (6 in) travel stage with linear motor
*-25 can only be used in an XY configuration with the -150 as the lower axis
**-150 can only be used as the upper XY axis with a -150 lower axis
***Z axis can only be -25

Feedback

OptionDescription
-LT Linear encoder feedback (10 nm resolution), amplified sine output
-LN High-accuracy linear encoder feedback (2 nm resolution), amplified sine output
-LT/lower LT option with lower axis cable management
-LN/lower LN option with lower axis cable management
-LT/upper LT option with upper axis cable management
-LN/upper LN option with upper axis cable management
-LT/vertical LT option with vertical axis cable management
-LN/vertical LN option with vertical axis cable management