Aerotech has a long history of engineering and manufacturing motion systems and components for high precision wafer processing, scanning electron microscopy (SEM), wafer bumping, 450 mm wafer manufacturing, lithography equipment and advanced laser micromachining. We also specialize in systems and components for vacuum applications, such as EUV lithography. So whether you need off-the-shelf wafer bumping components or a custom-engineered SEM system manufactured and tested to exacting specifications, Aerotech can provide the optimal solution for your application.
Aerotech's MaskAlign is a high-performance photomask-aligning system designed to meet the exacting requirements of advanced semiconductor and flat panel writing systems. More >
To simplify system development and reduce costs, Aerotech manufactures and integrates high precision, custom engineered chucks. Custom designs include those for 200, 300, and 450 mm wafers, as well… More >
The SMP is a complete multi-axis motion system that is specifically designed to provide an ideal motion platform for surface measurement applications. The SMP is optimized to provide more flexibility… More >