SMP Surface Measurement Motion Platform

Description

The SMP is a complete multi-axis motion system that is specifically designed to provide an ideal motion platform for surface measurement applications. The SMP is optimized to provide more flexibility in 2D and 3D contouring, higher precision with nanometer resolution, significantly reduced processing time, and minimal footprint. View the complete product sheet for more information.

SMP Benefits


More Flexibility

  • 2D and 3D contouring
  • Measurement of spherical, aspheric, and cylindrical shapes (Application example: precision optical component measurement)
  • Scanning or point-to-point motion profiles
  • Available in multiple configurations
  • Generic high-speed electrical interface between the motion and sensor controller
  • Open architecture software to integrate a large variety of sensors such as white light or multi-wavelength interferometers, camera systems, or capacitive probes
  • Easy-to-use, advanced motion algorithms ease motion profile generation

Higher Precision

  • Axis repeatability in the low nanometer range
  • Nanometer-level minimum incremental motion (resolution)
  • Ultra-smooth motion even at very low velocities
  • Reduced processing time
  • Save up to 40% of measurement time compared with conventional Cartesian systems
  • Real-time communication between motion and sensor controller provides synchronization of measurement and position data
  • Fast data access during the measurement and intelligent data management

Minimal Footprint

  • 60% footprint savings compared to Cartesian systems

Common Surface Measurement Applications



SMP-Common-Surface-Measurem


smp-320-420

Specifications

SMP-220 Individual Axis Specifications

Axis C RR Z (Optional) TT (Optional)
Resolution 0.08 arc sec 1 nm 2 nm 0.01 arc sec
Accuracy ±2 arc sec ±0.3 µm ±0.5 µm 3 arc sec
Repeatability <1 arc sec ±75 nm ±100 nm 1.5 arc sec
Straightness -------------- ±1.0 µm ±1 µm --------------
Flatness -------------- ±1.0 µm ±1 µm --------------
Axial Error <100 nm -------------- -------------- --------------
Radial Error <250 nm -------------- -------------- --------------
Tilt Error <0.7 arc sec -------------- -------------- --------------
Travel 360° Continuous 110 mm 50 mm 180°
Maximum Speed 1800°/s 350 mm/s 200 mm/s 120°/s

Maximum part size/mass 220 mm diameter; 12 kg
Maximum sensor mass 1.5 kg
Sensor motion axes (RR, Z, TT) All sensor axes are direct drive, brushless-motor-driven servo axes
Part motion axis (C axis) 360° continuous rotation, high-precision Aerotech rotary air-bearing

SMP-320 Individual Axis Specifications

Axis C RR Z (Optional) TT (Optional)
Resolution 0.01 arc sec 1 nm 2 nm 0.01 arc sec
Accuracy ±2 arc sec ±0.5 µm ±0.5 µm 3 arc sec
Repeatability <1 arc sec ±100 nm ±100 nm 1.5 arc sec
Straightness -------------- ±0.5 µm ±1 µm --------------
Flatness -------------- ±0.5 µm ±1 µm --------------
Axial Error <100 nm -------------- -------------- --------------
Radial Error <250 nm -------------- -------------- --------------
Tilt Error <0.5 arc sec -------------- -------------- --------------
Travel 360° Continuous 150 mm 50 mm 180°
Maximum Speed 3000°/s 300 mm/s 200 mm/s 120°/s

Maximum part size/mass 320 mm diameter; 12 kg
Maximum sensor mass 1.5 kg
Sensor motion axes (RR, Z, TT) All sensor axes are direct drive, brushless-motor-driven servo axes
Part motion axis (C axis) 360° continuous rotation, high-precision Aerotech rotary air-bearing

SMP-420 Individual Axis Specifications

Axis C RR Z (Optional) TT (Optional)
Resolution 0.005 arc sec 1 nm 1 nm 0.01 arc sec
Accuracy ±2 arc sec ±200 nm ±0.5 µm 3 arc sec
Repeatability <1 arc sec ±125 nm ±100 nm 1.5 arc sec
Straightness -------------- ±1.5 µm ±2.5 µm --------------
Flatness -------------- ±1.5 µm ±2.5 µm --------------
Axial Error <100 nm -------------- -------------- --------------
Radial Error <250 nm -------------- -------------- --------------
Tilt Error <0.5 arc sec -------------- -------------- --------------
Travel 360° Continuous 260 mm 100 mm 180°
Maximum Speed 3000°/s 500 mm/s 200 mm/s 120°/s

Maximum part size/mass 420 mm diameter; 97 kg
Maximum sensor mass 1.5 kg
Sensor motion axes (RR, Z, TT) All sensor axes are direct drive, brushless-motor-driven servo axes
Part motion axis (C axis) 360° continuous rotation, high-precision Aerotech rotary air-bearing

Axis Terminology Example

  • SMP with Axes

Dimensions

  • SMP-220
  • SMP-320
  • SMP-420

Ordering Information

Please contact an Aerotech Application Engineer for ordering information on the SMP.