- Low-loss brushless servomotor
- Instrument-grade precision
- Noncontact air-bearing
- Balanced to ISO 1940 G 0.4
- Sub-arc second resolution at high speed
- Custom configurations available
- Ideally suited for data storage, wafer processing, diamond turning, and imaging
Superior Mechanical Design
The ABS2000 utilizes a precision ground air-bearing to provide exceptional rotational accuracy with an extremely high stiffness. This design allows for a large load capacity and superior performance over a wide range of operation speeds. The ABS2000 is balanced to ISO 1940 G 0.4 tolerances.
Low Loss, Non-Influencing Direct-Drive Motor
Aerotech’s custom designed, low-loss motor produces >0.25 N-m (38 oz-in) of continuous torque with negligible motor losses, eliminating the need for cooling fins and/or external cooling. The non-influencing motor design minimizes parasitic forces in the motor, providing the exceptionally high level of error motion performance. These motors have all the advantages of a brushless direct drive motor — no brushes to wear, and high acceleration and high speeds.
With a velocity ripple of <0.1%, an asynchronous error motion =20 nm, and total error motion <100 nm, the Aerotech spindle offers superior performance for high accuracy applications. The high performance motor and rotary encoder are directly coupled to a common shaft. When used with the AerotechA3200 controllerandNpaq®drive rackthe spindle resolution can be as high as 0.05 arc sec with no speed trade-offs. This makes the spindle ideal for applications requiring both spindle operation and stage operation.
A variety of encoder resolutions, as well as an optional rotary union for a vacuum supply, are available. Other options include mechanical or vacuum chuck configurations, grounding ball, and optics mounting. Alternative higher torque motors are available. Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated motion package.
|Continuous Current, Stall||Apk||2.25 A|
|Feedback||Directly-Coupled Rotary Encoder|
|Resolution||256-2048 lines/rev; other line counts available|
|Rated Speed(1)||6000 rpm|
|Maximum Load||Radial||66 N|
|Inertia (Unloaded)||0.0015 kg·m2|
|Synchronous Error Motion(2)||Radial||‹100 nm|
|Asynchronous Error Motion(2)||Radial||20 nm|
|Velocity Ripple||<0.1% at 6000 rpm|
|Balance Grade(3)||ISO 1940 G 0.4|
|Bearing Rigidity||Radial||50 N/µm|
|Operating Pressure(4)||120 psi|
|Air Consumption(5)||<2 SCFM|
|Housing||Aluminum (Steel Available)|
|Finish||Electroless Nickel Plating or Black Hardcoat Available|
- Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
- Consult Aerotech regarding error motions for the ABS2000 with rotary union option.
- Per ISO 1940, "Mechanical vibration - balancing quality requirements of rigid rotors".
- An in-line pressure switch tied to the motion controller is recommended to protect the air bearing against under-pressure.
- Air supply must be clean, dry to 0°F dew point, and filtered to 0.25 µm or better. Recommend nitrogen at 99.9% purity.
ABS2000 High-Speed Air-Bearing Spindle Options
Position Transducer Options
|-E1||256 lines/rev directly-coupled rotary encoder|
|-E2||512 lines/rev directly-coupled rotary encoder|
|-E3||1000 lines/rev directly-coupled rotary encoder|
|-E4||1024 lines/rev directly-coupled rotary encoder|
|-E5||2000 lines/rev directly-coupled rotary encoder|
|-E6||2048 lines/rev directly-coupled rotary encoder|
|-RU1||Single port rotary union|
Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
|-TAS||Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
|-TAC||Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.