ASR2000 Direct-Drive Spindle

Description

Design Features

  • High-speed brushless servomotor
  • Instrument-grade precision
  • ABEC-7 angular contact bearings
  • Balanced to ISO 1940 G 1.0
  • High acceleration capability (6000 rpm in < 1 second)
  • Custom configurations available
Aerotech's ASR series direct-drive spindles were designed to provide superior angular positioning and velocity control for applications including disk drive testing, imaging applications, and precision wafer inspection.

Superior Mechanical Design
Matched angular contact bearing sets minimize spindle error motions. In addition, the ASR2000 is balanced to ISO 1940 G 1.0 tolerances. This unique design includes externally accessible balancing screws that can be adjusted with final payload in place. The design also uses labyrinthtype sealing to minimize particle migration from the spindle, resulting in certification for Class 1 clean-room operation. An integral rotary union is provided for a vacuum supply.

Brushless Direct Drive
To maximize positioning performance, the ASR series utilizes Aerotech's brushless motor technology. These motors have all the advantages of a brushless direct-drive motor — no brushes to wear, and high acceleration and high speeds. With its low inherent inertia and high torque output, the ASR is capable of extremely high speeds and accelerations. In addition, the efficient electromagnetic design provides high performance with lower operating temperatures than comparable products.

Accurate Positioning
With a velocity ripple of <0.1%, a total radial error motion =5 µm, and total axial error motion <2 µm, the Aerotech spindle offers superior performance for high accuracy applications. The high performance motor and rotary encoder are directly coupled to a common shaft. The absence of gear trains and mechanical couplings means no position errors caused by hysteresis, windup, or backlash.

Flexible Configurations
Options include mechanical or vacuum chuck configurations. Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.

Specifications

ASR2000 Specifications

Basic Model-60-100-130
Motor S-50-52-B S-50-86-A BM130
Continuous Current, Stall Apk 4.6A 2.1A 7.5A
Arms 3.3A 1.5A 5.3A
Feedback Directly-Coupled Rotary Encoder
Resolution 256-2048 lines/rev - other line counts available
Rated Speed(1) 6000 rpm in < 1 second
Maximum Load Radial 89 N
Axial 89 N
Inertia (Unloaded) 0.0002 kg-m2
Total Error Motion Radial 5 µm
Axial 2 µm
Asynchronous Error Motion Radial 3.5 µm
Axial 1.5 µm
Velocity Ripple <0.1% at 6000 rpm
Balance Grade(2) ISO 1940 G 1.0
Bearing Rigidity Radial 20 N/µm
Axial 20 N/µm
Spindle Weight 33 N
Material Shaft Steel
Housing Aluminum (Steel Available)
Finish Electroless Nickel Plating or Black Hardcoat Available
  1. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
  2. Per ISO 1940, "Mechanical vibration - balancing quality requirements of rigid rotors".
  • ASR2000 Error Motion Trace

Dimensions

  • ASR2000

Ordering Information

Ordering Example

ASR2000 -60 -M -2048H

ASR2000 High-Speed Spindle

OptionDescription
ASR2000-60 63 mm (2.48 in) diameter rotary spindle 0.42 Nm (59 oz-in) motor
ASR2000-100 63 mm (2.48 in) diameter rotary spindle 0.69 Nm (98 oz-in) motor
ASR2000-130 63 mm (2.48 in) diameter rotary spindle 1.0 Nm (140 oz-in) motor

Mounting and Grid Pattern

OptionDescription
-M Metric-dimension mounting pattern and holes

Position Transducer

OptionDescription
-2048H 2048 lines/rev directly-coupled rotary encoder