- 2 µm calibrated accuracy with linear encoder
- 0.1 µm min incremental motion with linear encoder
- ±40 µm uncalibrated accuracy with rotary encoder
- 4 mm ball screw
- Vacuum compatible
- 135 kg horizontal load capacity
- Gearbox option shown
|Accuracy||LT Standard||±40.0 µm|
|Pitch||±170 µrad (±35 arc sec)|
|Roll||±170 µrad (±35 arc sec)|
|Yaw||±170 µrad (±35 arc sec)|
|Dynamic||Maximum Speed(2)||200 mm/s|
|Load Capacity(3)||Horizontal||135 kg|
|Material||Aluminum body/stage; hardcoated table
- Available with Aerotech controllers.
- Speed and acceleration dependent on load.
- Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and work-point dependent. Consult factory for multi-axis or non-standard applications.