ATS5000-1500mm Custom Linear Positioner


Design Features

  • 2 µm calibrated accuracy with linear encoder
  • 0.1 µm min incremental motion with linear encoder
  • ±40 µm uncalibrated accuracy with rotary encoder
  • 4 mm ball screw
  • Vacuum compatible
  • 135 kg horizontal load capacity
  • Gearbox option shown
The ATS5000 high-accuracy, 1.5 meter travel ball-screw stage can be used in horizontal or vertical applications for research, aerospace testing, light source/beamline applications, and in any manufacturing requiring a high load with very precise motion performance.


Mechanical Specifications

Positioning Travel 1500 mm
Accuracy LT Standard ±40.0 µm
HALAR(1) ±2 µm
Repeatability ±0.5 µm
Straightness ±13.0 µm
Flatness ±13.0 µm
Pitch ±170 µrad (±35 arc sec)
Roll ±170 µrad (±35 arc sec)
Yaw ±170 µrad (±35 arc sec)
Dynamic Maximum Speed(2) 200 mm/s
Maximum Acceleration(2) 3g
Load Capacity(3) Horizontal 135 kg
Side 45 kg
Stage Mass
125 kg
Material Aluminum body/stage; hardcoated table
  1. Available with Aerotech controllers.
  2. Speed and acceleration dependent on load.
  3. Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.
  4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and work-point dependent. Consult factory for multi-axis or non-standard applications.


Ordering Information

Please CONTACT an Aerotech Application Engineer to discuss your requirements.