ANT130LZ Single-Axis Z Nanopositioning Stages
Our second-generation ANT130LZ stages are specifically engineered to provide nanometer-level motion and positioning performance in the vertical orientation. With a user-adjustable, ultra low-friction pneumatic counterbalance, they are best-in-class in combining accuracy, repeatability, speed and reliability. Their impressive dynamic capabilities and ample load-carrying capacity make ANT130LZ stages an excellent choice when your process demands superior vertical motion.
Description
Specifications
Dimensions
Ordering Info
Downloads
Description
Description
Specifications
Dimensions
Ordering Info
Downloads
Description
Design Features
- Enhanced second-generation design
- Achieves minimum incremental motion to 1 nm - NEW
- Delivers nanometer-level positioning performance over travel lengths up to 60 mm
- Offsets payloads up to 10 kg for precise performance in the vertical direction with user-adjustable, ultra low-friction counterbalance
- Features high-precision crossed-roller bearings for excellent dynamic performance & ample load capacity
- Optimizes process throughput & maximizes reliability with ironless direct-drive linear motor
- Available with high-resolution incremental or absolute encoders - NEW
Key Applications
ANT130LZ stages are ideal for high-precision and high-dynamic vertical positioning applications, including:
- Photonics assembly & inspection
- Fiber alignment & optimization
- Optics manufacturing, testing & inspection
- Sensor testing & qualification
- Semiconductor processing & inspection
- Research & laboratory applications
Industry-Leading Motion Performance
Outstanding accuracy, position repeatability and in-position stability require extremely fine system resolution. Now available with an improved high-performance encoder option, ANT130LZ can easily achieve minimum incremental steps of 1 nm. Our direct-drive technology exhibits no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion. Plus, the minimally-influencing counterbalance design opposes the gravitational forces induced by your payload, resulting in industry-leading performance and optimum thermal stability.
Noncontact Direct-Drive
Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT130LZ stages use our advanced direct-drive technology to achieve the highest level of positioning performance. Coupled with anti-creep, crossed-roller bearings, ANT130LZ delivers ultra-smooth, consistent motion with outstanding dynamic characteristics to enhance your process capability. The optimized drive and bearing combination, packaged in a compact form factor, offers distinct performance advantages in many applications such as high-precision positioning, fiber alignment, optics manufacturing and inspection, sensor testing and scanning processes that demand smooth and precise motion.
Flexible System Design
The ANT130LZ family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be easily combined for flexible system designs and multi-axis configurations. Also available in a low-profile variant, ANT130LZ stages are easily combined with other products -- including ANT130L, ANT130XY, ANT130R, ANT130V, ANT20G and more -- to provide complex, multiple degree-of-freedom motion and positioning solutions.
Dimensions
ANT130LZ
Ordering Information
ANT130LZ Single-Axis Z Nanopositioning Stage
Travel (Required)
| Option | Description |
| -035 | 35 mm travel |
| -060 | 60 mm travel |
Feedback (Required)
| Option | Description |
| -E1 | Incremental linear encoder, 1 Vpp amplified sine output |
| -E2 | Incremental linear encoder, digital RS422 output, 5 nm electrical resolution |
| -E3 | Absolute + Incremental 1 Vpp linear dual-track encoder |
| -E4 | Incremental linear encoder, 1 Vpp amplified sine output, high-performance |
Connectors (Required)
| Option | Description |
| -CN1 | Single 25-pin D connector, 25DU |
| -CN2 | Two-connectors, 4-pin HPD and 25-pin D, 4DU-25DU |
- The -CN1 option is limited to a maximum bus voltage of 80 V. The -CN2 option is required for higher bus voltages.
Performance Grade (Required)
| Option | Description |
| -PL1 | Base performance |
| -PL2 | High-accuracy performance, PLUS |
Integration (Required)
Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
| Option | Description |
| -TAS | Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. |
| -TAC | Integration - Test as components Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system |