PRO165LM Mechanical Bearing, Direct-Drive Linear Stage

Description

Design Features

• Superior payload capacity in a compact form-factor provides maximum utility
• Ironless, cogless linear motor delivers smooth, ultra-precise motion
• Excellent positioning & dynamic capabilities in a cost-effective package
• Best-in-class geometric performance ensures superior workpoint accuracy
• Rugged, reliable construction is ideal for versatile industrial use
• Hardcover & side seals offer protection against contamination & particulates
• ThermoComp® option automatically compensates for thermal disturbances
• Vacuum- & cleanroom-compatible versions available

Key Applications

PRO165LM mechanical bearing, direct-drive linear stages are extremely versatile, trusted and proven in medium- and high-performance applications, such as:

• Laser material processing
• Precision metrology, inspection & microscopy
• Electronics & circuit board manufacturing & inspection
• Display processing
• Synchrotron & light source experiments
• Medical device manufacturing
• Semiconductor fabrication
• Fiber optics & silicon photonics processing
• Additive manufacturing & precision assembly

Rugged & Reliable Mechanical Construction

A long-life recirculating linear guide bearing system, non-cogging linear motor and low-friction sealing solution make the PRO165LM an attractive choice for industrial applications such as laser machining, precision metrology, and electronics manufacturing and inspection. The PRO165LM’s durable construction provides protection from debris while the side seals prevent particulates from entering the stage. The curved hardcover design provides a natural shape that prevents excessive contamination from collecting on the stage. Capable of accommodating an ample payload range, PRO165LM stages are easy and intuitive to integrate, set up and operate. They also deliver an extraordinarily long lifetime of consistent positioning performance.

Direct-Drive Linear Motor

PRO165LM is powered by a high-performance linear motor. The ironless design outputs exceptional levels of force with absolutely zero cogging or torque ripple, resulting in extremely smooth position and velocity control. Completely free from backlash and mechanical wind-up, PRO165LM is highly capable of achieving excellent dynamic responsiveness and is ideal for applications requiring aggressive contouring accuracy and smooth velocity profiles.

High-Precision Motion Performance

PRO165LM linear stages are engineered with high-resolution linear encoders that provide minimum incremental motion down to 5 nm and even smaller in-position stability. With precision-ground bearings and an ultra-smooth, cog-free linear motor, plus the superior craftsmanship for which Aerotech products are known, PRO165LM direct-drive linear stages readily achieve sub-micrometer positioning repeatability and industry-leading accuracy—guaranteed.

Mitigate Thermal Effects with ThermoComp® 

Temperature changes and thermal effects are among the largest and most challenging sources of error in precision machines. Our ThermoComp® feature minimizes thermally-induced positioning errors, so you can focus entirely on your mission. This embedded temperature compensation unit helps to protect your process from temperature swings and heating effects, even in the most extreme industrial environments.

Design & Integration Flexibility

The PRO165LM’s many standard features and options make it incredibly flexible, so you can easily tailor it to your application. The base mounting holes are accessible from the outside of the stage, allowing for easy mounting to both metric and English optical tables and other interfaces. The stage tabletop comes standard with a metric mounting pattern to accommodate your payload, process equipment or even another axis of motion.  Multi-axis assemblies are now easier than ever to build and integrate, thanks to a variety of configurable cable management options. Plus, PRO165LM stages can be prepared for use in special environments by request. Contact us to learn more about compatibility in vacuum chambers, cleanrooms and more.

Automate with Professional-Grade Motion

Our PRO-series stages are available in many sizes and configurations to accommodate an equally diverse range of user needs and application requirements. In addition to the PRO-LM series of direct-drive linear stages, our PRO-SL screw-driven linear stages feature precision-ground ball screws for robust performance in any orientation. PRO stages are offered in six widths ranging from 115 mm to 560 mm (depending on your application’s space constraints and payload requirements) plus travel lengths ranging from 50 mm to 1000 mm or longer. Also available in a vertical elevator-stage variant, our PRO-SV long-travel lift stages offer heavy-duty lifting capacity and can be easily mounted to PRO-LM and PRO-SL linear stages.  

Aerotech PRO-series stages make it easier to build and integrate multi-axis assemblies and motion systems—whether you prefer to do it yourself or leave it to our motion and automation professionals.