ANT130L Series Single-Axis Linear Direct-Drive Nanopositioning Stages

Description

Design Features

  • Nanometer-level performance in a large travel format
  • High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm)
  • In-position stability of <1 nm
  • Anti-creep crossed-roller bearings
  • High dynamic performance
  • Large selection - 8 models in travel and accuracy

The ANT130L series stages offer nanometer-level performance in travels up to 160 mm. With its low profile and outstanding performance characteristics, the ANT130L is the ultimate solution for high-accuracy alignment, inspection, positioning, and measurement stations.

Noncontact Direct-Drive

The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ANT130L to a peak unloaded acceleration of 1 g and a maximum velocity of 350 mm/s. The result is a high-accuracy device with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven or other stages in its class.

Outstanding Resolution

For alignment applications, outstanding step-to-step resolution is critical. The ANT130L meets this demand with an incremental step size of 1 nm when coupled with Aerotech drives and controls. The direct-drive linear motor allows the ANT130L to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical.

Designed for Long Life

Like all stages in the Aerotech product family, the ANT130L was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices, which means they not only exhibit long-life but are totally maintenance free.

Precision Alignment

ANT130L series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds and vertical axis solutions.

Specifications

Mechanical Specifications

ModelANT130L-035ANT130L-060
Travel 35 mm 60 mm
Accuracy(1) Basic ±2 µm ±2 µm
PLUS ±250 nm ±250 nm
Resolution (Minimum Incremental Motion) 1 nm 1 nm
Repeatability (Bidirectional)(1) Basic ±100 nm ±100 nm
PLUS ±75 nm ±75 nm
Repeatability (Unidirectional) ±25 nm ±25 nm
Straightness(1) ±1.0 µm ±1.0 µm
Flatness(1) ±1.0 µm ±1.0 µm
Pitch 10 arc sec 10 arc sec
Roll 10 arc sec 10 arc sec
Yaw 5 arc sec 5 arc sec
Maximum Speed 350 mm/s 350 mm/s
Maximum Acceleration 1 g (No Load) 1 g (No Load)
Speed Stability See graph for typical performance
Settling Time See graph for typical performance
In-Position Stability(2) <1 nm <1 nm
Maximum Force (Continuous) 23 N 23 N
Load Capacity(3) Horizontal 12.0 kg 12.0 kg
Side 10 kg 10 kg
Moving Mass 1.2 kg 1.4 kg
Stage Mass 2.1 kg 2.5 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage.
  2. In-Position Jitter listing is 3 sigma value.
  3. Axis orientation for on-axis loading is listed.
  • Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  • -PLUS requires the use of an Aerotech controller.
ModelANT130L-110ANT130L-160
Travel 110 mm 160 mm
Accuracy(1) Basic ±3 µm ±4 µm
PLUS ±300 nm ±300 nm
Resolution (Minimum Incremental Motion) 1 nm 1 nm
Repeatability (Bidirectional)(1) Basic ±100 nm ±100 nm
PLUS ±75 nm ±75 nm
Repeatability (Unidirectional) ±25 nm ±25 nm
Straightness(1) ±1.0 µm ±1.5 µm
Flatness(1) ±1.0 µm ±1.5 µm
Pitch 10 arc sec 10 arc sec
Roll 10 arc sec 10 arc sec
Yaw 5 arc sec 5 arc sec
Maximum Speed 350 mm/s 350 mm/s
Maximum Acceleration 1 g (No Load) 1 g (No Load)
Speed Stability See graph for typical performance
Settling Time See graph for typical performance
In-Position Stability(2) <1 nm <1 nm
Maximum Force (Continuous) 23 N 23 N
Load Capacity(3) Horizontal 12.0 kg 12.0 kg
Side 10 kg 10 kg
Moving Mass 1.9 kg 2.3 kg
Stage Mass 3.3 kg 3.9 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage.
  2. In-Position Jitter listing is 3 sigma value.
  3. Axis orientation for on-axis loading is listed.
  • Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  • -PLUS requires the use of an Aerotech controller.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder
Maximum Bus Voltage 320 VDC (-4DU-25DU), 80 VDC (-25DU)
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH
Ensemble Epaq MXH
Epaq MR-MXH
Ensemble ML-MXH
Single Axis Soloist Soloist ML-MXH
  1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.

  • ANT130L Step Plot
  • ANT130L Performance Graphs

Dimensions

  • ANT130L
  • Mounting Plate: ANT130L

Ordering Information

ANT130L Single-Axis Direct-Drive Nanopositioning Stage

Travel (Required)

OptionDescription
-035 35 mm travel
-060 60 mm travel
-110 110 mm travel
-160 160 mm travel

Connectors (Required)

OptionDescription
-CN1 Single 25-pin D connector, 25DU
-CN2 Two connectors, 4-pin HPD and 25-pin D, 4DU-25DU
    Note: CN1 option not valid for systems using bus voltages greater than 80 V

Mounting Plate (Optional)

OptionDescription
-MP Mounting plate

Performance Grade (Required)

OptionDescription
-PL1 Base Performance
-PL2 High-Accuracy Performance, PLUSn)

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

OptionDescription
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.