- Noncontact, non-cogging, frictionless direct-drive
- Zero backlash or hysteresis
- High resolution, repeatability and accuracy
- Anti-creep crossed-roller bearings
- Travel to 360 mm
- Integral cable management for multi-axis systems
The ANT180L continues the expansion of Aerotech’s line of high precision crossed-roller-bearing stages. With its nanometer resolution, superior bi-directional repeatability and exceptional low-velocity performance, it is the ultimate solution for high-accuracy alignment, measurement, scanning and other demanding applications.
The ANT180L is driven by a high-power linear motor with ironless forcer and U-channel magnet track. The direct-drive linear motor drives the stage to a peak unloaded acceleration of 2 g and maximum velocity of 500 mm/s. Because the forcer is ironless, it is a cog-free design that provides exceptional velocity control.
The direct-drive linear motor and high-accuracy linear encoder make possible outstanding step-to-step resolution when coupled with an Aerotech control system. This is critical in spectroscopy, optical delay line and other applications. Furthermore, the linear motor and high resolution linear encoder system also provide excellent in-position stability.
Superior Geometry for High Performance
Its large cross-section provides a robust and stable base axis for multi-axis systems. Aerotech’s ultra-stiff construction and compact two-piece design result in a stage with unparalleled geometric tolerances. As a result, the straightness and flatness typically are <±1 μm over the entire travel.
Designed for smooth, vibration-free motion, the ANT180L utilizes precision anti-cage-creep crossed-roller bearings for outstanding smoothness of motion. Since neither the bearing system nor the drive system utilize any recirculating elements, the ANT180L exhibits the outstanding ripple-free motion required for scanning and inspection applications.
Precision Alignment and Cable Management
ANT180L series stages are easily configured into XY and other multi-axis assemblies. Precision orthogonality alignment to 5 arc seconds and multi-axis cable management systems (CMS) are standard options. We include all customer-required cables, air hoses, etc. in our CMS bundle to facilitate incorporation into the final system. Both ends are fully connectorized for simple integration into the customer’s machine.
|Travel||160 mm||210 mm||260 mm||360 mm|
|Accuracy(1)||High-Accuracy Incremental Encoder (-E3)||PLUS||±150 nm||±150 nm||±200 nm||±200 nm|
|Base||±2.0 µm||±2.5 µm||±3.0 µm||±3.5 µm|
|Incremental Encoder (-E1)||PLUS||±300 nm||±300 nm||±350 nm||±350 nm|
|Base||±4.0 µm||±5.0 µm||±6.0 µm||±7.0 µm|
|Resolution (Minimum Incremental Motion)||
High-Accuracy Incremental Encoder
|1 nm||1 nm||1 nm||1 nm|
|Incremental Encoder (-E1)||3 nm||3 nm||3 nm||3 nm|
|High-Accuracy Incremental Encoder
|±100 nm||±100 nm||±125 nm||±125 nm|
|Incremental Encoder (-E1)||±150 nm||±150 nm||±175 nm||±175 nm|
|Straightness(1)||±1.0 µm||±1.25 µm||±1.5 µm||±1.75 µm|
|Flatness(1)||±1.0 µm||±1.25 µm||±1.5 µm||±1.75 µm|
|Pitch||14 arc sec||14 arc sec||16 arc sec||16 arc sec|
|Roll||14 arc sec||14 arc sec||16 arc sec||16 arc sec|
|Yaw||10 arc sec||10 arc sec||12 arc sec||12 arc sec|
|Maximum Speed||500 mm/s||500 mm/s||500 mm/s||500 mm/s|
|Maximum Acceleration||2 g (No Load)||2 g (No Load)||2 g (No Load)||2 g (No Load)|
|Speed Stability||See graph for typical performance|
|Settling Time||See graph for typical performance|
|Maximum Force (Continuous)||110.5 N||110.5 N||110.5 N||110.5 N|
|Load Capacity(2)||Horizontal||30 kg||30 kg||30 kg||30 kg|
|Side||20 kg||20 kg||20 kg||20 kg|
|Moving Mass||6.6 kg||7.8 kg||9.2 kg||11.7 kg|
|Stage Mass||12.8 kg||14.9 kg||17.6 kg||22.4 kg|
|Material||Aluminum Body/Black Hardcoat Finish|
|MTBF (Mean Time Between Failure)||30,000 Hours|
- Certified with each stage.
- Axis orientation for on-axis loading is listed.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
- -PLUS requires the use of an Aerotech controller.
- Specifications are -E1 and -E3 only. Consult factory for other options.
|Drive System||Brushless Linear Servomotor|
|Feedback||Noncontact Linear Encoder (see signal period options on Order Information page)|
|Maximum Bus Voltage||±80 VDC|
|Limit Switches||5 V, Normally Open|
|Home Switch||Near Center|
|Single Axis||Soloist||Soloist ML-MXH|
- Linear amplifiers are required to achieve the listed specifications. Other options are available.
Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.
ANT180L Single-Axis Direct-Drive Nanopositioning Stage
|-160||160 mm travel stage|
|-210||210 mm travel stage|
|-260||260 mm travel stage|
|-360||360 mm travel stage|
|-E1||Incremental encoder, 1 Vpp|
|-E2||Incremental encoder, 0.1 µm TTL output|
|-E3||High-accuracy incremental encoder, 1 Vpp|
Cable Management (Optional)
|-CMS1||Cable management system for XY assembly - order with lower-axis only|
|-CMS2||Cable management system for XY assembly w/6 mm air line - order with lower-axis only|
|-CMS3||Cable management system for XYZ assembly - order with lower-axis only|
|-CMS4||Cable management system for XYZ assembly w/6 mm air line - order with lower-axis only|
|-CMS5||Cable management system for XY assembly - order with upper-axis only|
|-CMS6||Cable management system for XY assembly w/6 mm air line - order with upper-axis only|
|-CMS7||Cable management system for XYZ assembly - order with upper-axis only|
|-CMS8||Cable management system for XYZ assembly w/6 mm air line - order with upper-axis only|
|-PL2||High-accuracy performance, PLUS|
|Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.|
|-TAS||Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
|-TAC||Integration - Test as components
Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system
Accessories (to be ordered as separate line item)
|ALIGN-PA10||XY assembly; 10 arc sec orthogonality|
|ALIGN-PA5||XY assembly; 5 arc sec orthogonality|