ANT180L Single-Axis Direct-Drive Nanopositioning Stage

Description

Design Features

  • Noncontact, non-cogging, frictionless direct-drive
  • Zero backlash or hysteresis
  • High resolution, repeatability and accuracy
  • Anti-creep crossed-roller bearings
  • Travel to 360 mm
  • Integral cable management for multi-axis systems

The ANT180L continues the expansion of Aerotech’s line of high precision crossed-roller-bearing stages. With its nanometer resolution, superior bi-directional repeatability and exceptional low-velocity performance, it is the ultimate solution for high-accuracy alignment, measurement, scanning and other demanding applications.

Noncontact Direct-Drive

The ANT180L is driven by a high-power linear motor with ironless forcer and U-channel magnet track. The direct-drive linear motor drives the stage to a peak unloaded acceleration of 2 g and maximum velocity of 500 mm/s. Because the forcer is ironless, it is a cog-free design that provides exceptional velocity control.

Outstanding Resolution

The direct-drive linear motor and high-accuracy linear encoder make possible outstanding step-to-step resolution when coupled with an Aerotech control system. This is critical in spectroscopy, optical delay line and other applications. Furthermore, the linear motor and high resolution linear encoder system also provide excellent in-position stability.

Superior Geometry for High Performance

Its large cross-section provides a robust and stable base axis for multi-axis systems. Aerotech’s ultra-stiff construction and compact two-piece design result in a stage with unparalleled geometric tolerances. As a result, the straightness and flatness typically are <±1 μm over the entire travel.

Designed for smooth, vibration-free motion, the ANT180L utilizes precision anti-cage-creep crossed-roller bearings for outstanding smoothness of motion. Since neither the bearing system nor the drive system utilize any recirculating elements, the ANT180L exhibits the outstanding ripple-free motion required for scanning and inspection applications.

Precision Alignment and Cable Management

ANT180L series stages are easily configured into XY and other multi-axis assemblies. Precision orthogonality alignment to 5 arc seconds and multi-axis cable management systems (CMS) are standard options. We include all customer-required cables, air hoses, etc. in our CMS bundle to facilitate incorporation into the final system. Both ends are fully connectorized for simple integration into the customer’s machine.

Specifications

Mechanical Specifications

ModelANT180L-160ANT180L-210ANT180L-260ANT180L-360
Travel 160 mm 210 mm 260 mm 360 mm
Accuracy(1) High-Accuracy Incremental Encoder (-E3) PLUS ±150 nm ±150 nm ±200 nm ±200 nm
Base ±2.0 µm ±2.5 µm ±3.0 µm ±3.5 µm
Incremental Encoder (-E1) PLUS ±300 nm ±300 nm ±350 nm ±350 nm
Base ±4.0 µm ±5.0 µm ±6.0 µm ±7.0 µm
Resolution (Minimum Incremental Motion)

High-Accuracy Incremental Encoder
(-E3)

1 nm 1 nm 1 nm 1 nm
Incremental Encoder (-E1) 3 nm 3 nm 3 nm 3 nm
Repeatability
(BiDirectional) (1)
High-Accuracy Incremental Encoder
(-E3)
±100 nm ±100 nm ±125 nm ±125 nm
Incremental Encoder (-E1) ±150 nm ±150 nm ±175 nm ±175 nm
Straightness(1) ±1.0 µm ±1.25 µm ±1.5 µm ±1.75 µm
Flatness(1) ±1.0 µm ±1.25 µm ±1.5 µm ±1.75 µm
Pitch 14 arc sec 14 arc sec 16 arc sec 16 arc sec
Roll 14 arc sec 14 arc sec 16 arc sec 16 arc sec
Yaw 10 arc sec 10 arc sec 12 arc sec 12 arc sec
Maximum Speed 500 mm/s 500 mm/s 500 mm/s 500 mm/s
Maximum Acceleration 2 g (No Load) 2 g (No Load) 2 g (No Load) 2 g (No Load)
Speed Stability See graph for typical performance
Settling Time See graph for typical performance
Maximum Force (Continuous) 110.5 N 110.5 N 110.5 N 110.5 N
Load Capacity(2) Horizontal 30 kg 30 kg 30 kg 30 kg
Side 20 kg 20 kg 20 kg 20 kg
Moving Mass 6.6 kg 7.8 kg 9.2 kg 11.7 kg
Stage Mass 12.8 kg 14.9 kg 17.6 kg 22.4 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage.
  2. Axis orientation for on-axis loading is listed.
  3. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  4. -PLUS requires the use of an Aerotech controller.
  5. Specifications are -E1 and -E3 only. Consult factory for other options.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder (see signal period options on Order Information page)
Maximum Bus Voltage ±80 VDC
Limit Switches 5 V, Normally Open
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH
Ensemble Epaq MXH
Epaq MR-MXH
Ensemble ML-MXH
Single Axis Soloist Soloist ML-MXH
  1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.

  • ANT180L

Dimensions

Ordering Information

ANT180L Single-Axis Direct-Drive Nanopositioning Stage

Travel (Required)

OptionDescription
-160 160 mm travel stage
-210 210 mm travel stage
-260 260 mm travel stage
-360 360 mm travel stage

Feedback (Required)

OptionDescription
-E1 Incremental encoder, 1 Vpp
-E2 Incremental encoder,  0.1 µm TTL output
-E3 High-accuracy incremental encoder, 1 Vpp

Cable Management (Optional)

OptionDescription
-CMS1 Cable management system for XY assembly - order with lower-axis only
-CMS2 Cable management system for XY assembly w/6 mm air line - order with lower-axis only
-CMS3 Cable management system for XYZ assembly - order with lower-axis only
-CMS4 Cable management system for XYZ assembly w/6 mm air line - order with lower-axis only
-CMS5 Cable management system for XY assembly - order with upper-axis only
-CMS6 Cable management system for XY assembly w/6 mm air line - order with upper-axis only
-CMS7 Cable management system for XYZ assembly - order with upper-axis only
-CMS8 Cable management system for XYZ assembly w/6 mm air line - order with upper-axis only

Metrology (Required)

OptionDescription
-PL1 Base performance
-PL2 High-accuracy performance, PLUS

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

OptionDescription
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Accessories (to be ordered as separate line item)

OptionDescription
ALIGN-PA10 XY assembly; 10 arc sec orthogonality
ALIGN-PA5 XY assembly; 5 arc sec orthogonality