ANT180L Single-Axis Direct-Drive Nanopositioning Stage

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Description

Design Features

Noncontact, non-cogging, frictionless direct-drive
Zero backlash or hysteresis
High resolution, repeatability and accuracy
Anti-creep crossed-roller bearings
Travel to 360 mm
Integral cable management for multi-axis systems

The ANT180L continues the expansion of Aerotech’s line of high precision crossed-roller-bearing stages. With its nanometer resolution, superior bi-directional repeatability and exceptional low-velocity performance, it is the ultimate solution for high-accuracy alignment, measurement, scanning and other demanding applications.

Noncontact Direct-Drive

The ANT180L is driven by a high-power linear motor with ironless forcer and U-channel magnet track. The direct-drive linear motor drives the stage to a peak unloaded acceleration of 2 g and maximum velocity of 500 mm/s. Because the forcer is ironless, it is a cog-free design that provides exceptional velocity control.

Outstanding Resolution

The direct-drive linear motor and high-accuracy linear encoder make possible outstanding step-to-step resolution when coupled with an Aerotech control system. This is critical in spectroscopy, optical delay line and other applications. Furthermore, the linear motor and high resolution linear encoder system also provide excellent in-position stability.

Superior Geometry for High Performance

Its large cross-section provides a robust and stable base axis for multi-axis systems. Aerotech’s ultra-stiff construction and compact two-piece design result in a stage with unparalleled geometric tolerances. As a result, the straightness and flatness typically are <±1 μm over the entire travel.

Designed for smooth, vibration-free motion, the ANT180L utilizes precision anti-cage-creep crossed-roller bearings for outstanding smoothness of motion. Since neither the bearing system nor the drive system utilize any recirculating elements, the ANT180L exhibits the outstanding ripple-free motion required for scanning and inspection applications.

Precision Alignment and Cable Management

ANT180L series stages are easily configured into XY and other multi-axis assemblies. Precision orthogonality alignment to 5 arc seconds and multi-axis cable management systems (CMS) are standard options. We include all customer-required cables, air hoses, etc. in our CMS bundle to facilitate incorporation into the final system. Both ends are fully connectorized for simple integration into the customer’s machine.

Specifications

Mechanical Specifications

Model			ANT180L-160	ANT180L-210	ANT180L-260	ANT180L-360
Travel			160 mm	210 mm	260 mm	360 mm
Accuracy⁽¹⁾	High-Accuracy Incremental Encoder (-E3)	PLUS	±150 nm	±150 nm	±200 nm	±200 nm
	High-Accuracy Incremental Encoder (-E3)	Base	±2.0 µm	±2.5 µm	±3.0 µm	±3.5 µm
	Incremental Encoder (-E1)	PLUS	±300 nm	±300 nm	±350 nm	±350 nm
	Incremental Encoder (-E1)	Base	±4.0 µm	±5.0 µm	±6.0 µm	±7.0 µm
Resolution (Minimum Incremental Motion)	High-Accuracy Incremental Encoder (-E3)		1 nm	1 nm	1 nm	1 nm
Resolution (Minimum Incremental Motion)	Incremental Encoder (-E1)		3 nm	3 nm	3 nm	3 nm
Repeatability (BiDirectional)⁽¹⁾	High-Accuracy Incremental Encoder (-E3)		±100 nm	±100 nm	±125 nm	±125 nm
Repeatability (BiDirectional)⁽¹⁾	Incremental Encoder (-E1)		±150 nm	±150 nm	±175 nm	±175 nm
Straightness⁽¹⁾			±1.0 µm	±1.25 µm	±1.5 µm	±1.75 µm
Flatness⁽¹⁾			±1.0 µm	±1.25 µm	±1.5 µm	±1.75 µm
Pitch			14 arc sec	14 arc sec	16 arc sec	16 arc sec
Roll			14 arc sec	14 arc sec	16 arc sec	16 arc sec
Yaw			10 arc sec	10 arc sec	12 arc sec	12 arc sec
Maximum Speed			500 mm/s	500 mm/s	500 mm/s	500 mm/s
Maximum Acceleration			2 g (No Load)	2 g (No Load)	2 g (No Load)	2 g (No Load)
Speed Stability			See graph for typical performance
Settling Time			See graph for typical performance
Maximum Force (Continuous)			110.5 N	110.5 N	110.5 N	110.5 N
Load Capacity⁽²⁾	Horizontal		30 kg	30 kg	30 kg	30 kg
Load Capacity⁽²⁾	Side		20 kg	20 kg	20 kg	20 kg
Moving Mass			6.6 kg	7.8 kg	9.2 kg	11.7 kg
Stage Mass			12.8 kg	14.9 kg	17.6 kg	22.4 kg
Material			Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure)			30,000 Hours

Certified with each stage.
Axis orientation for on-axis loading is listed.
Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
-PLUS requires the use of an Aerotech controller.
Specifications are -E1 and -E3 only. Consult factory for other options.

Electrical Specifications

Drive System	Brushless Linear Servomotor
Feedback	Noncontact Linear Encoder (see signal period options on Order Information page)
Maximum Bus Voltage	160 VDC
Limit Switches	5 V, Normally Open
Home Switch	Near Center

Recommended Controller

Multi-Axis	A3200	Npaq MXR Npaq MR-MXH Ndrive ML-MXH
Multi-Axis	Ensemble	Epaq MXH Epaq MR-MXH Ensemble ML-MXH
Single Axis	Soloist	Soloist ML-MXH

Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.

ANT180L

Dimensions

ANT180L
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Ordering Information