MPS75SL Miniature Mechanical-Bearing Screw-Driven Linear Stage


Design Features

  • Compact 75 mm width with travel to 100 mm
  • Precision ground ball-screw drive
  • DC servo or stepper motor
  • Anti-creep crossed-roller bearings
  • High resolution (0.1 µm), repeatability (±0.75 µm) and accuracy (±1.0 µm)
  • High-vacuum compatible
  • Optional bellows waycovers
  • Compact multi-axis configurations

The MPS75SL is a compact, high-performance linear positioning stage that is perfect for the confines of the laboratory while providing the high reliability required in a production environment. It is the ideal choice for measurement, testing, accurate alignment and component assembly.

High Accuracy

The precision ground ball-screw provides exceptional accuracy, repeatability and ultra-fine positioning resolution capability to 0.1 micron. The DC servomotor is equipped with a rotary encoder. The anti-creep crossed-roller linear bearings provide smooth travel and excellent payload characteristics.

Optional Vacuum Preparation

The MPS75SL is available with optional vacuum preparation to 10-6 Torr. It is the perfect compact stage choice for today's demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication and military/aerospace.

Highly Configurable

An optional breadboard mounting plate provides direct mounting to both English and metric breadboards. Bellows waycovers are available for use in dusty environments. Any of the models can be mounted in an XY configuration and, with the right-angle L-bracket, in XYZ configurations. It can also be mounted with the smaller MPS50SL stage.

The MPS75SL is a member of the MPS (Miniature Positioning Stage) family of linear, rotary, goniometer and vertical lift and Z stages. Two or more stages can easily be mounted together in numerous combinations using standardized mounting patterns and adapter plates.


Mechanical Specifications

Travel 25 mm 50 mm 75 mm 100 mm
Accuracy Uncalibrated ±2.5 µm ±3.0 µm ±3.5 µm ±4.0 µm
Uncalibrated with Bellows ±3.5 µm ±4.0 µm ±4.5 µm ±5.0 µm
Calibrated(1) ±1.0 µm ±1.0 µm ±1.5 µm ±1.5 µm
Resolution (Minimum Incremental Motion) 0.1 µm
Repeatability (Bidirectional)(1) ±0.75 µm (Standard); ±1.2 µm (with Bellows)
Straightness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Flatness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Maximum Speed 1.0 mm/rev
Ball Screw
DC Motor (-M1) 50 mm/s 50 mm/s 50 mm/s 35 mm/s
Stepper Motor (-M2) 30 mm/s 30 mm/s 30 mm/s 30 mm/s
Load Capacity(2) Horizontal 15 kg
Side 15 kg
Vertical 4 kg
Stage Mass 1.7 kg 1.8 kg 1.9 kg 2.0 kg
Material Anodized Aluminum Body
  1. With Aerotech controllers.
  2. Payload specifications are single-axis system.
  3. Excessive duty cycle may impact stage accuracy.
  4. Specifications are for single-axis systems measured 25 mm above the tabletop.
  5. Contact factory for specifications of stages with bellows option.

Electrical Specifications

ModelDC Motor (-M1)
(Standard and VAC)
Stepper Motor (-M2)
(Standard and VAC)
Drive System DC Brush Servomotor 24 VDC Bipolar Stepper Motor
Feedback 10,000 lines/rev Rotary Encoder N/A
Electronic Resolution 0.025 µm 0.025 µm @ 40,000 steps/rev Motor Resolution
Maximum Bus Voltage 48 VDC 48 VDC*
Limit Switches 5V, Normally Closed
    *With Aerotech control system.

Recommended Controller

Multi-Axis A3200 Npaq/Npaq MR/Ndrive MP
Ensemble Ensemble LAB/Epaq/Epaq MR/Ensemble MP
Single Axis Soloist Soloist MP
  • MPS75SL Load Curves


Ordering Information

MPS75SL Miniature Mechanical-Bearing Screw-Driven Linear Stage

Travel (Required)

-025 25 mm travel stage
-050 50 mm travel stage
-075 75 mm travel stage
-100 100 mm travel stage

Vacuum Preparation (Optional)

-HV High vacuum preparation to 10-6 Torr

Motor (Required)

-M1 DC servomotor
-M2 Stepper motor

Bellows (Optional)

-BL Bellows waycover
      Note: Bellows waycover not available with -HV vacuum preparation.

Mounting Plate (Optional)

-MP Optical table mounting plate

Metrology (Required)

-PL0 No metrology performance plots
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Accessories (to be ordered as separate line item)

HDZ-MPS75SL Right angle bracket, MPS75SL
HDZ-MPS75SL-HV Right angle bracket, MPS75SL, high vacuum preparation to 10-6 Torr