MPS75SLE Miniature Mechanical-Bearing Screw-Driven Linear Stage with Linear Feedback


Design Features

  • Compact stage with travels to 100 mm
  • Low-thermal expansion glass-scale linear encoder
  • Precision-ground ball-screw drive
  • DC servo or stepper motor
  • Anti-creep crossed-roller bearings
  • High resolution (0.025 µm), repeatability (±0.1 µm) and accuracy (±0.75 µm)
  • Optional bellows waycovers
  • Compact multi-axis configurations

Aerotech’s MPS75SLE is a compact, high-performance linear positioning stage offering the benefits of direct measurement feedback via a linear encoder. The MPS75SLE is the ideal high-accuracy stage for applications in optics positioning, z-axis positioning of sensors in surface metrology, or high-precision alignment. Multi-axis stage configurations can easily be assembled with other MPS linear and rotary stages using the multitude of adapter brackets and mounting compatibility inherent in the entire MPS stage family.

Ultra-Precise Design

The precision ground, preloaded ball-screw coupled with the linear encoder provide outstanding accuracy, repeatability and a positioning resolution capability to 25 nm. The anti-creep crossed-roller bearings provide exceptionally smooth travel and high-load capacity in a compact package.

Unlike competitive designs using steel (13 ppm/˚C) or glass scales with 8 ppm/˚C thermal expansion coefficients, the MPS75SLE is available with a low thermal expansion (3.3 ppm/˚C) precision glass scale allowing for high-accuracy and repeatable positioning over long periods of time. The linear encoder is available with amplified sine (1 Vpp) or 50 nm TTL digital outputs allowing for easy integration with all standard controllers.

Highly Configurable

The MPS75SLE motor options include a DC servomotor with a high-resolution rotary encoder or a stepper motor. Just like the MPS75SL, the SLE is available with and without optional bellows waycovers.

An optional mounting plate provides direct mounting to both English and metric optical breadboards. The inherent mounting compatibility of all MPS stages allows for simple mounting in multi-axis arrangements.


Mechanical Specifications

Travel 25 mm 50 mm 75 mm 100 mm
Accuracy Uncalibrated ±1.75 µm ±2.25 µm ±2.75 µm ±3.25 µm
Uncalibrated with Bellows ±2.75 µm ±3.25 µm ±3.75 µm ±4.25 µm
Calibrated(1) ±0.75 µm ±0.75 µm ±1.0 µm ±1.0 µm
Resolution (Minimum Incremental Motion)(2) 0.025 µm
Repeatability (Bidirectional)(2) ±0.1 µm (Standard); ±0.2 µm (with Bellows)
Straightness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Flatness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Maximum Speed 1.0 mm/rev
Ball Screw
DC Motor (-M1) 50 mm/s 50 mm/s 50 mm/s 35 mm/s
Stepper Motor (-M2) 30 mm/s 30 mm/s 30 mm/s 30 mm/s
Load Capacity(3) Horizontal 15 kg
Side 15 kg
Vertical 4 kg
Stage Mass 2.3 kg 2.4 kg 2.5 kg 2.6 kg
Material Anodized Aluminum Body
  1. Available with Aerotech controllers.
  2. Resolution and repeatability specifications are for systems running in dual-loop mode with feedback resolutions of 25 nm on both the rotary and linear encoders.
  3. Payload specifications are single-axis.
  4. Specifications are for single-axis systems measured 25 mm above the tabletop.
  5. Contact factory for specifications of stages with bellows option.

Electrical Specifications

ModelDC MotorStepper Motor
Drive System DC Brush Servomotor 24 VDC Bipolar Stepper Motor
Feedback (Linear Encoder) Noncontact Linear Encoder;
Amplified sine and TTL versions available
Feedback (Rotary Motor Encoder) 10,000 lines/rev Rotary Encoder N/A
Maximum Bus Voltage 48 VDC(1)
Rotary Encoder Electronic Resolution 0.025 µm 0.025 µm @ 40,000 steps/rev Motor Resolution
Linear Encoder Electronic Resolution 20 µm fundamental, 0.05 µm with LTX100 option;
Amplified Sine (-AS) option allows for electronic resolutions below 1 nm(2)
Limit Switches 5V, Normally Closed
  1. With Aerotech control system.
  2. For optimum performance, Aerotech recommends using 0.025 µm as the highest-resolution when using the linear encoder as part of the servo feedback loop (e.g., dual-loop).

Recommended Controller

Multi-Axis A3200 Npaq/Npaq MR/Ndrive MP
Ensemble Ensemble LAB/Epaq/Epaq MR/Ensemble MP
Single Axis Soloist Soloist MP
  • MPS75SLE Step Plot
  • MPS75SL Load Curves


Ordering Information

MPS75SLE Miniature Mechanical-Bearing Screw-Driven Linear Stage with Linear Feedback

Direct Linear Feedback (Required)

-E1 Incremental linear encoder; 1 Vpp
-E2 Incremental linear encoder; 0.05 µm digital TTL output

Travel (Required)

-025 25 mm travel stage
-050 50 mm travel stage
-075 75 mm travel stage
-100 100 mm travel stage

Motor (Required)

-M1 DC servomotor
-M2 Stepper motor

Bellows (Optional)

-BL Bellows waycover

Mounting Plate (Optional)

-MP Optical table mounting plate

Metrology (Required)

-PL0 No metrology performance plots
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Accessories (to be ordered as separate line item)

HDZ-MPS75SL Right angle bracket, MPS75SL