ANT130XY Series Two-Axis XY Direct-Drive Nanopositioning Stages

Description

Design Features

  • Integrated low-profile XY linear motor stage
  • Nanometer-level performance in a large travel format
  • High resolution (1 nm), repeatability (75 nm), and accuracy (250 nm)
  • In-position stability of <1 nm
  • Anti-creep crossed-roller bearings
  • High dynamic performance with direct-drive technology
  • ULTRA performance grade option

Introduction

The ANT130XY series stages offer nanometer-level performance in XY travels up to 160 mm. The integrated, sleek design provides an extremely low profile of only 85 mm. The stage comes with proprietary direct-drive motor technology, noncontact linear encoders, limits, integrated cable management system, and three performance grades.

Ultra-Precise Stage Design

The ANT130XY design allows critical elements such as orthogonality, straightness, and flatness to be optimized, resulting in a stage with exceptional geometric tolerances. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. All travel options (60 mm x 60 mm, 110 mm x 110 mm, 160 mm x 160 mm) come with the 85 mm profile height. The integrated cable management system is designed for long life and to minimize drag forces.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate, and high-speed positioning necessary for mass production of precision devices. ANT130XY stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high speed, high resolution, and high accuracy. This unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing, and scanning processes that demand smooth and precise motion.

Multi-Axis Configurations

The ANT130XY can be combined with other Aerotech ANT series products (vertical lift stages, direct-drive rotaries, and goniometers) to create unique, high performance, multi-axis systems.

ULTRA Performance Grade Option

In order to achieve the highest possible system accuracy from our multi-axis nanopositioning systems, Aerotech has developed an advanced, dynamic trajectory calibration system. To take advantage of this sophisticated calibration system, the mechanical system has to be completely assembled, functionally tested, and calibrated in our best-in-class metrology labs. Nanometer-level system accuracy can only be achieved under stringent environmental conditions, calibrating with the best test equipment, using the highest-precision mechanical elements, and utilizing the ULTRA software capabilities of Aerotech’s industry-leading controls. By implementing ULTRA dynamic trajectory calibration with the ANT130XY, we are able to produce guaranteed two-dimensional accuracies of ±250 nm or better.

The plots provided in the specifications illustrate performance differences between a standard ANT130XY and the ULTRA version. Straightness errors, orthogonality errors, and accuracy errors caused by stage yawing are virtually eliminated.

Specifications

Mechanical Specifications

  ANT130XY-060
Base PLUS(1,2) ULTRA(1,2)
Travel 60 mm
Accuracy(2,3) ±2.5 µm ±250 nm ±250 nm
Resolution (Minimum Incremental Motion) 1 nm
Repeatability (Bidirectional)(3) ±100 nm ±75 nm ±75 nm
Repeatability (Unidirectional) ±25 nm ±25 nm ±25 nm
Straightness(3) ±1.5 µm ±1.5 µm ±250 nm
Flatness(3) ±1.5 µm ±1.5 µm ±1.0 µm
Pitch 49 µrad (10 arc sec) 49 µrad(10 arc sec) 49 µrad (10 arc sec)
Roll 49 µrad (10 arc sec) 49 µrad (10 arc sec) 49 µrad (10 arc sec)
Yaw 24 µrad (5 arc sec) 24 µrad (5 arc sec) 24 µrad (5 arc sec)
Orthogonality 49 µrad (10 arc sec) 15 µrad (3 arc sec) 4.8 µrad (1 arc sec)
Maximum Speed(4) 350 mm/s (Upper Axis)
Maximum Acceleration(4) 1 g - 10 m/s2 (No Load) (Upper Axis)
Speed Stability See graph for typical performance
Settling Time See graph for typical performance
In-Position Stability(5) <1 nm
Maximum Force (Continuous) 23 N
Load Capacity(6) Horizontal 12.0 kg
Moving Mass Upper 1.5 kg
Lower 4.2 kg
Stage Mass 5.5 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours
  1. -PLUS and-ULTRA require the use of an Aerotech controller.
  2. Specifications for -BASE and -PLUS options are per axis measured 25 mm above the tabletop. Specifications for -ULTRA are XY measured 25 mm above the tabletop.
  3. Certified with each stage.
  4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
  5. In-position jitter listing is 3 sigma value
  6. Axis orientation for on-axis loading is listed.

 

      ANT130XY-110
    Base PLUS(1,2) ULTRA(1,2)
    Travel 110 mm
    Accuracy(2,3) ±4.0 µm ±300 nm ±300 nm
    Resolution (Minimum Incremental Motion) 1 nm
    Repeatability (Bidirectional)(3) ±100 nm ±75 nm ±75 nm
    Repeatability (Unidirectional) ±25 nm ±25 nm ±25 nm
    Straightness(3) ±1.5 µm ±1.5 µm ±300 nm
    Flatness(3) ±1.5 µm ±1.5 µm ±1.0 µm
    Pitch 58 µrad (12 arc sec) 58 µrad (12 arc sec) 58 µrad (12 arc sec)
    Roll 58 µrad (12 arc sec) 58 µrad (12 arc sec) 58 µrad (12 arc sec)
    Yaw 29 µrad (6 arc sec) 29 µrad (6 arc sec) 29 µrad (6 arc sec)
    Orthogonality 49 µrad (10 arc sec) 15 µrad (3 arc sec) 2.4 µrad (0.5 arc sec)
    Maximum Speed(4) 350 mm/s (Upper Axis)
    Maximum Acceleration(4) 1 g - 10 m/s2 (No Load) (Upper Axis)
    Speed Stability See graph for typical performance
    Settling Time See graph for typical performance
    In-Position Stability(5) <1 nm
    Maximum Force (Continuous) 23 N
    Load Capacity(6) Horizontal 12.0 kg
    Moving Mass Upper 2.1 kg
    Lower 5.7 kg
    Stage Mass 7.4 kg
    Material Aluminum Body/Black Hardcoat Finish
    MTBF (Mean Time Between Failure) 30,000 Hours
    1. -PLUS and -ULTRA require the use of an Aerotech controller.
    2. Specifications for -BASE and -PLUS options are per axis measured 25 mm above the tabletop. Specifications for -ULTRA are XY measured 25 mm above the tabletop.
    3. Certified with each stage.
    4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
    5. In-position jitter listing is 3 sigma value.
    6. Axis orientation for on-axis loading is listed.

     

      ANT130XY-160
      Base PLUS(1,2) ULTRA(1,2)
      Travel 160 mm
      Accuracy(2,3) ±5.0 µm ±300 nm ±300 nm
      Resolution (Minimum Incremental Motion) 1 nm
      Repeatability (Bidirectional)(3) ±100 nm ±75 nm ±75 nm
      Repeatability (Unidirectional) ±25 nm ±25 nm ±25 nm
      Straightness(3) ±2.0 µm ±2.0 µm ±300 nm
      Flatness(3) ±2.0 µm ±2.0 µm ±1.0 µm
      Pitch 73 µrad (15 arc sec) 73 µrad (15 arc sec) 58 µrad (12 arc sec)
      Roll 73 µrad (15 arc sec) 73 µrad (15 arc sec) 58 µrad (12 arc sec)
      Yaw 39 µrad (8 arc sec) 39 µrad (8 arc sec) 29 µrad (6 arc sec)
      Orthogonality 49 µrad(10 arc sec) 15 µrad (3 arc sec) 2.4 µrad (0.5 arc sec)
      Maximum Speed(4) 350 mm/s (Upper Axis)
      Maximum Acceleration(4) 1 g - 10 m/s2 (No Load)(Upper Axis)
      Speed Stability See graph for typical performance
      Settling Time See graph for typical performance
      In-Position Stability(5) <1 nm
      Maximum Force (Continuous) 23 N
      Load Capacity(6) Horizontal 12.0 kg
      Moving Mass Upper 2.4 kg
      Lower 6.9 kg
      Stage Mass 8.9 kg
      Material Aluminum Body/Black Hardcoat Finish
      MTBF (Mean Time Between Failure) 30,000 Hours
      1. -PLUS and -ULTRA require the use of an Aerotech controller.
      2. Specifications for -BASE and -PLUS options are per axis measured 25 mm above the tabletop. Specifications for -ULTRA are XY measured 25 mm above the tabletop.
      3. Certified with each stage.
      4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
      5. In-position jitter listing is 3 sigma value.
      6. Axis orientation for on-axis loading is listed.

      Electrical Specifications

      Drive System Brushless Linear Servomotor
      Feedback Noncontact Linear Encoder
      Maximum Bus Voltage 320 VDC (-4DU-25DU), 80 VDC (-25DU)
      Limit Switches 5 V, Normally Closed
      Home Switch Near Center

      Recommended Controller

      Multi-Axis A3200 Npaq MXR
      Npaq MR-MXH
      Ndrive ML-MXH
      Ensemble Epaq MXH
      Epaq MR-MXH
      Ensemble ML-MXH
      Ensemble LAB
      Single Axis Soloist Soloist ML-MXH

      Note: Linear amplifiers are required to achieve the listed specifications. Other options are available.

      Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

      • ANT130XY Plots 1
      • ANT130XY Plots 2

      Dimensions

      Ordering Information

      ANT130XY Two-Axis XY Direct-Drive Nanopositioning Stage

      Travel (Required)

      OptionDescription
      -060 60 mm travel
      -110 110 mm travel
      -160 160 mm travel

      Connectors (Required)

      OptionDescription
      -CN1 Single 25-pin D connector, 25DU
      -CN2 Two connectors, 4-pin HPD and 25-pin D, 4DU-25DU
        Note: -CN1 option not valid for systems using bus voltages greater than 80 V

      Cable Managment (Required)

      OptionDescription
      -CMS2 Post for two-axis cable support
      -CMS3 Post for three-axis cable support

      Mounting Plate (Optional)

      OptionDescription
      -MP Mounting plate

      Performance Grade (Required)

      OptionDescription
      -PL1 Base performance
      -PL3 High-accuracy performance, PLUS
      -PL4 Ultra high-accuracy performance, ULTRA

      Integration (Required)

      Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
      -TAS Integration - Test as system
      Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
      -TAC Integration - Test as components
      Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.