ABRT400 Air-Bearing Direct-Drive Rotary Stage
The ABRT400 — the heart of our µARC Angle and Rotary Device Calibration System — is a large rotary air-bearing axis with nanometer-level error motion performance. This high-accuracy air-bearing master axis is constructed of steel to closely match the CTE of the µARC’s surrounding granite structure. The air bearing is equipped with a non-influencing rotary union and slip ring to pass vacuum or air and electrical service to the device under test.
Description
Specifications
Description
Description
Specifications
Description
Design Features
- Accuracy: <0.6 microradian (<0.12 arc-second)
- Minimum incremental step: 0.035 microradian (0.007 arc-second)
- Repeatability: <0.4 microradian (<0.08 arc-second)
- Axial Error Motion: <50 nm synchronous; <10 nm asynchronous
- Radial Error Motion: <75 nm synchronous; <10 nm asynchronous
Air-Bearing Rotary Master Axis
The ABRT400 is the heart of Aerotech's µARC Angle and Rotary Device Calibration System. The ABRT400 is a large rotary air-bearing axis with nanometer-level error motion performance. This high-accuracy air-bearing master axis is constructed of steel to closely match the CTE of the µARC's surrounding granite structure. The air bearing is equipped with a non-influencing rotary union and slip ring to pass vacuum or air and electrical service to the device under test.
The ABRT400 can be used as the angular standard in high-accuracy measuring machines, x-ray diffraction, protein crystallography or high-precision machining applications.