ANT95-R Series Single-Axis Rotary Direct-Drive Nanopositioning Stages

Description

Design Features

  • 0.01 arc sec resolution
  • 0.005 arc sec in-position stability
  • Outstanding error motion specifications
  • Multi-axis configurations
  • High dynamic performance
  • Both limited and unlimited rotation

The ANT95-R and ANT95-R-PLUS direct-drive rotary stages are designed as part of Aerotech’s nano Motion Technology product family. Our rotary stages offer unprecedented in-position stability (0.005 arc sec) and sub 0.01 arc-sec incremental motion performance, and are offered in two grades of accuracy.

Multi-Axis Capabilities

The ANT95-R series is designed for compatibility and easy integration with Aerotech's ANT linear stage product offerings. Together these stages provide accuracy, stability and small size performance capability for almost any nanomanufacturing or inspection application.

Dynamic Performance

In addition to the high precision levels, these systems offer high dynamic performance and throughput ideal for disk drive manufacture and test.

Durability

The ANT95-R stage series was designed to operate in a 24/7 manufacturing environment. Unlike other rotary devices, the ANT95-R requires no periodic maintenance, assuring years of trouble-free operation.

Specifications

ANT95-R Series Specifications

ModelANT95-
20-R
ANT95-
20-R-PLUS
ANT95-
180-R
ANT95-
180-R-PLUS
ANT95-
360-R
ANT95-
360-R-PLUS
Rotation Angle 20° 20° 180° 180° ±360° Continuous ±360° Continuous
Accuracy(1) 10 arc sec 3 arc sec 10 arc sec 3 arc sec 10 arc sec 3 arc sec
Resolution 0.01 arc sec 0.01 arc sec 0.01 arc sec 0.01 arc sec 0.01 arc sec 0.01 arc sec
Bidirectional Repeatability(1) 1.5 arc sec 1.5 arc sec 1.5 arc sec 1.5 arc sec 1.5 arc sec 1.5 arc sec
Unidirectional Repeatability 0.5 arc sec 0.5 arc sec 0.5 arc sec 0.5 arc sec 0.5 arc sec 0.5 arc sec
Tilt Error Motion Synchronous N/A N/A N/A N/A 10 arc sec 10 arc sec
Asynchronous N/A N/A N/A N/A 3 arc sec 3 arc sec
Axial Error Motion(1) Synchronous N/A N/A N/A N/A 2 µm 2 µm
Asynchronous N/A N/A N/A N/A 0.5 µm 0.5 µm
Radial Error Motion(1) Synchronous N/A N/A N/A N/A 3 µm 3 µm
Asynchronous N/A N/A N/A N/A 1 µm 1 µm
Maximum Speed 20 rpm 20 rpm 20 rpm 20 rpm 200 rpm 200 rpm
Maximum Acceleration 400 rad/s2 400 rad/s2 400 rad/s2 400 rad/s2 400 rad/s2 400 rad/s2
In-Position Stability(2) 0.005 arc sec 0.005 arc sec 0.005 arc sec 0.005 arc sec 0.005 arc sec 0.005 arc sec
Aperture 11 mm 11 mm 11 mm 11 mm 11 mm 11 mm
Maximum Torque (Continuous) 0.2 N-m 0.2 N-m 0.2 N-m 0.2 N-m 0.2 N-m 0.2 N-m
Load Capacity(3) Axial 2.0 kg 2.0 kg 2.0 kg 2.0 kg 2.0 kg 2.0 kg
Radial 1.5 kg 1.5 kg 1.5 kg 1.5 kg 1.5 kg 1.5 kg
Moment 2 N-m 2 N-m 2 N-m 2 N-m 2 N-m 2 N-m
Rotor Inertia (Unloaded) 0.00065 kg-m2 0.00065 kg-m2 0.00066 kg-m2 0.00066 kg-m2 0.00069 kg-m2 0.00069 kg-m2
Stage Mass 1.2 kg 1.2 kg 1.2 kg 1.2 kg 1.2 kg 1.2 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage. Requires the use of an Aerotech controller.
  2. In-Position Jitter listing is 3 sigma value.
  3. Axis orientation for on-axis loading is listed.
  • Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
  • All error motion specifications are measured at 60 rpm.
  • For high-speed operation customer payload must be balanced to G1.0 per ISO 1940.

Electrical Specifications

Drive System Slotless, Brushless, Direct-Drive Rotary Motor
Feedback Noncontact Rotary Encoder
Maximum Bus Voltage ±40 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH
Ensemble Epaq MXR
Epaq MR-MXH
Ensemble ML-MXH
Single Axis Soloist Soloist ML-MXH
  1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25ºC/24 hours. If this is not possible alternate products are available. Please consult Aerotech for more information.

  • ANT95-R Step Plot
  • ANT95-R Specifications Images

Dimensions

  • ANT95-R/ANT95-R-PLUS

Ordering Information

ANT95-R Series Rotary Stage

OptionDescription
ANT95-R Aerotech direct-drive rotary positioner

Rotary Stage Travel

OptionDescription
ANT95-20-R 20° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops
ANT95-20-R-PLUS 20° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops (high accuracy version)
ANT95-180-R 180° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops
ANT95-180-R-PLUS 180° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops (high accuracy version)
ANT95-360-R 360° continuous rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder and optical limits
ANT95-360-R-PLUS 360° continuous rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder and optical limits (high accuracy version)

Options

OptionDescription
-MP Breadboard mounting plate