ANT95R Series Single-Axis Rotary Direct-Drive Nanopositioning Stages

Description

Design Features

  • 0.01 arc sec resolution
  • 0.005 arc sec in-position stability
  • Outstanding error motion specifications
  • Multi-axis configurations
  • High dynamic performance
  • Both limited and unlimited rotation

The ANT95R direct-drive rotary stages are designed as part of Aerotech�s nano Motion Technology product family. Our rotary stages offer unprecedented in-position stability (0.005 arc sec) and sub 0.01 arc-sec incremental motion performance, and are offered in two grades of accuracy.

Multi-Axis Capabilities

The ANT95R series is designed for compatibility and easy integration with Aerotech's ANT linear stage product offerings. Together these stages provide accuracy, stability and small size performance capability for almost any nanomanufacturing or inspection application.

Dynamic Performance

In addition to the high precision levels, these systems offer high dynamic performance and throughput ideal for processes that require speed and precision.

Durability

The ANT95R stage series was designed to operate in a 24/7 manufacturing environment. Unlike other rotary devices, the ANT95-R requires no periodic maintenance, assuring years of trouble-free operation.

Specifications

ANT95-R Series Specifications

ModelANT95R-
020
ANT95R-
180
ANT95R-
360
Rotation Angle 20° 180° ±360° Continuous
Accuracy(1) BASE 10 arc sec 10 arc sec 10 arc sec
PLUS 3 arc sec 3 arc sec 3 arc sec
Resolution (Minimum Incremental Motion) 0.01 arc sec 0.01 arc sec 0.01 arc sec
Bidirectional Repeatability(1) 1.5 arc sec 1.5 arc sec 1.5 arc sec
Unidirectional Repeatability 0.5 arc sec 0.5 arc sec 0.5 arc sec
Tilt Error Motion Synchronous N/A N/A 10 arc sec
Asynchronous N/A N/A 3 arc sec
Axial Error Motion(1) Synchronous N/A N/A 2 µm
Asynchronous N/A N/A 0.5 µm
Radial Error Motion(1) Synchronous N/A N/A 3 µm
Asynchronous N/A N/A 1 µm
Maximum Speed 20 rpm 20 rpm 200 rpm
Maximum Acceleration 400 rad/s2 400 rad/s2 400 rad/s2
In-Position Stability(2) 0.005 arc sec 0.005 arc sec 0.005 arc sec
Aperture 11 mm 11 mm 11 mm
Maximum Torque (Continuous) 0.2 N-m 0.2 N-m 0.2 N-m
Load Capacity(3) Axial 2.0 kg 2.0 kg 2.0 kg
Radial 1.5 kg 1.5 kg 1.5 kg
Moment 2 N-m 2 N-m 2 N-m
Rotor Inertia (Unloaded) 0.00065 kg-m2 0.00066 kg-m2 0.00069 kg-m2
Stage Mass 1.2 kg 1.2 kg 1.2 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage. Requires the use of an Aerotech controller.
  2. In-Position Jitter listing is 3 sigma value.
  3. Axis orientation for on-axis loading is listed.
  • Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
  • All error motion specifications are measured at 60 rpm.
  • For high-speed operation customer payload must be balanced to G1.0 per ISO 1940.

Electrical Specifications

Drive System Slotless, Brushless, Direct-Drive Rotary Motor
Feedback Noncontact Rotary Encoder
Maximum Bus Voltage ±40 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH
Ensemble Epaq MXR
Epaq MR-MXH
Ensemble ML-MXH
Single Axis Soloist Soloist ML-MXH
  1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25ºC/24 hours. If this is not possible alternate products are available. Please consult Aerotech for more information.

  • ANT95R Step Plot
  • ANT95R Specifications Images

Dimensions

Ordering Information

ANT95R Single-Axis Rotary Direct-Drive Nanopositioning Stage

Travel (Required)

OptionDescription
-360 Continuous travel
-20 Limited travel, ±10 degrees
-180 Limited travel, ±90 degrees

Mounting Plate (Optional)

OptionDescription
-MP Mounting plate

Performance Grade (Required)

OptionDescription
-PL1 Base performance
-PL2 High-accuracy performance, PLUS

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

OptionDescription
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.