ANT130LZ Single-Axis Z Nanopositioning Stages
Our second-generation ANT130LZ stages are specifically engineered to provide nanometer-level motion and positioning performance in the vertical orientation. With a user-adjustable, ultra low-friction pneumatic counterbalance, they are best-in-class in combining accuracy, repeatability, speed and reliability. Their impressive dynamic capabilities and ample load-carrying capacity make ANT130LZ stages an excellent choice when your process demands superior vertical motion.
- Description
- Specifications
- Dimensions
- Ordering Info
- Downloads
Design Features
- Enhanced second-generation design
- Achieves minimum incremental motion to 1 nm – NEW
- Delivers nanometer-level positioning performance over travel lengths up to 60 mm
- Offsets payloads up to 10 kg for precise performance in the vertical direction with user-adjustable, ultra low-friction counterbalance
- Features high-precision crossed-roller bearings for excellent dynamic performance & ample load capacity
- Optimizes process throughput & maximizes reliability with ironless direct-drive linear motor
- Available with high-resolution incremental or absolute encoders – NEW
Key Applications
ANT130LZ stages are ideal for high-precision and high-dynamic vertical positioning applications, including:
- Photonics assembly & inspection
- Fiber alignment & optimization
- Optics manufacturing, testing & inspection
- Sensor testing & qualification
- Semiconductor processing & inspection
- Research & laboratory applications
Industry-Leading Motion Performance
Outstanding accuracy, position repeatability and in-position stability require extremely fine system resolution. Now available with an improved high-performance encoder option, ANT130LZ can easily achieve minimum incremental steps of 1 nm. Our direct-drive technology exhibits no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion. Plus, the minimally-influencing counterbalance design opposes the gravitational forces induced by your payload, resulting in industry-leading performance and optimum thermal stability.
Noncontact Direct-Drive
Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT130LZ stages use our advanced direct-drive technology to achieve the highest level of positioning performance. Coupled with anti-creep, crossed-roller bearings, ANT130LZ delivers ultra-smooth, consistent motion with outstanding dynamic characteristics to enhance your process capability. The optimized drive and bearing combination, packaged in a compact form factor, offers distinct performance advantages in many applications such as high-precision positioning, fiber alignment, optics manufacturing and inspection, sensor testing and scanning processes that demand smooth and precise motion.
Flexible System Design
The ANT130LZ family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be easily combined for flexible system designs and multi-axis configurations. Also available in a low-profile variant, ANT130LZ stages are easily combined with other products — including ANT130L, ANT130XY, ANT130R, ANT130V, ANT20G and more — to provide complex, multiple degree-of-freedom motion and positioning solutions.
ANT130LZ Specifications
| ANT130LZ-035 | ANT130LZ-060 | |
|---|---|---|
| Travel | 35 mm | 60 mm |
| Accuracy - Base Performance (-PL1)(1) | ±3.0 µm | |
| Accuracy - Plus Performance (-PL2)(1) | ±300 nm (-E1, -E2, -E3) ±200 nm (-E4) | |
| Repeatability (Bidirectional)(1) | ±75 nm | |
| Resolution (Minimum Incremental Motion) | 2 nm (-E1) 6 nm (-E3) 1 nm (-E4) | |
| Straightness(1) | ±2.0 µm | |
| Flatness(1) | ±2.0 µm | |
| Pitch | 10 arc sec | |
| Roll | 10 arc sec | |
| Yaw | 5 arc sec | |
| Maximum Speed(2) | 200 mm/s (-E1, -E3, -E4) 145 mm/s (-E2) | |
| Maximum Acceleration (No Load) | 1 g | |
| In-Position Stability(3) | <2 nm (-E1) <6 nm (-E3) <1 nm (-E4) | |
| Load Capacity - Vertical(4) | 10 kg | |
| Moving Mass | 1.3 kg | 1.5 kg |
| Stage Mass | 5.0 kg | 5.7 kg |
| Material | Anodized Aluminum | |
| MTBF (Mean Time Between Failure) | 30,000 Hours | |
- Certified with each stage.
- Requires the selection of an appropriate amplifier with sufficient voltage and current.
- In-position stability is reported as 3-sigma value. Requires a 1 Vpp encoder.
- Payload specifications assume payload is centered on-axis.
- Specifications are reported for a single axis measured 25 mm above the tabletop. Performance of multi-axis systems depends on the payload and workpoint. Consult factory for multi-axis or non-standard applications.
- PLUS performance requires the use of an Aerotech controller.
- To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C per 24 hours. Consult factory for more information.
- Air supply for pneumatic counterbalance must be clean, dry to 0°F dewpoint, and filtered to 0.25 µm or better. Aerotech recommends using nitrogen at 99.9% purity. Supply pressure is determined by the amount of payload carried by the stage.
ANT130LZ Electrical Specifications
| ANT130LZ-035 | ANT130LZ-060 | |
|---|---|---|
| Drive System | Brushless Linear Servomotor | |
| Feedback | Noncontact Linear Encoder 1 Vpp with 20 µm signal period (-E1) Digital RS422 (-E2) BiSS-C absolute + incremental 1 Vpp linear dual-track encoder (-E3) 1 Vpp with 4 µm signal period (-E4) | |
| Maximum Bus Voltage | -CN1: 80 VDC -CN2: 160 VDC | |
| Limit Switches | 5 V, Normally Closed | |
| Home Switch | Near Center | |
Travel (required)
| Option | Description |
|---|---|
| -035 | 35 mm travel |
| -060 | 60 mm travel |
Feedback (Required)
| Option | Description |
|---|---|
| -E1 | Incremental linear encoder, 1 Vpp amplified sine output |
| -E2 | Incremental linear encoder, digital RS422 output, 5 nm electrical resolution |
| -E3 | Absolute + Incremental 1 Vpp linear dual-track encoder |
| -E4 | Incremental linear encoder, 1 Vpp amplified sine output, high-performance |
Connectors (Required)
| Option | Description |
|---|---|
| -CN1 | Single 25-pin D connector, 25DU |
| -CN2 | Two-connectors, 4-pin HPD and 25-pin D, 4DU-25DU |
- The -CN1 option is limited to a maximum bus voltage of 80 V. The -CN2 option is required for higher bus voltages.
Performance Grade (Required)
| Option | Description |
|---|---|
| -PL1 | Base performance |
| -PL2 | High-accuracy performance, PLUS |
Integration (Required)
| Option | Description |
|---|---|
| -TAS | Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. |
| -TAC | Integration - Test as components Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system |
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