ANT95LZ Single-Axis Z Nanopositioning Stages
ANT95LZ stages are specifically engineered to provide nanometer-level motion and positioning performance in the vertical orientation. With a user-adjustable, ultra low-friction pneumatic counterbalance, they are best-in-class in combining resolution, accuracy, repeatability, size and reliability. Their impressive dynamic capabilities and enhanced load-carrying capacity make ANT95LZ stages an excellent choice when you need superior vertical motion.
- Description
- Specifications
- Dimensions
- Ordering Info
- Downloads
Design Features
- Enhanced second-generation design
- Achieves minimum incremental motion to 1 nm – NEW
- Delivers nanometer-level positioning performance over travel lengths up to 50 mm
- Offsets payloads up to 5 kg for precise performance in the vertical direction with user-adjustable, ultra low-friction counterbalance
- Features high-precision crossed-roller bearings for excellent dynamic performance & generous load capacity
- Maximizes process throughput & reliability with ironless direct-drive linear motor
- Available with high-resolution incremental or absolute encoders – NEW
Key Applications
ANT95LZ is ideal for multi-axis applications that require high precision and dynamic positioning performance, including:
- Photonics assembly & inspection
- Fiber alignment & optimization
- Optics manufacturing, testing & inspection
- Sensor testing & qualification
- Semiconductor processing & inspection
- Research & laboratory applications
Industry-Leading Motion Performance
Outstanding accuracy, position repeatability and in-position stability require extremely fine system resolution. Now available with an improved high-performance encoder option, ANT95LZ can easily achieve minimum incremental steps of 1 nm. Our direct-drive technology exhibits no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion. Plus, the minimally-influencing counterbalance design opposes the gravitational forces induced by your payload, resulting in industry-leading performance and optimum thermal stability.
Noncontact Direct-Drive
Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95LZ stages use our advanced direct-drive technology to achieve the highest level of positioning performance. This direct-drive technology delivers ultra-smooth, consistent motion with outstanding dynamic characteristics to optimize your process throughput. The unique drive and bearing combination, packaged in an extremely compact form factor, offers tangible advantages in many applications such as high-precision positioning, fiber alignment, optics manufacturing and inspection, sensor testing and scanning processes that demand smooth and precise motion.
Flexible System Design
The ANT95LZ family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be easily combined for flexible system designs and multi-axis configurations. Also available as an even lower-profile dual-counterbalance variant, ANT95LZ stages are easily combined with other products — including ANT95L, ANT95XY, ANT95R, ANT95V, ANT20G and more — to achieve complex, multiple degree-of-freedom motion and positioning solutions.
ANT95LZ Specifications
| ANT95LZ-025 | ANT95LZ-050 | |
|---|---|---|
| Travel | 25 mm | 50 mm |
| Accuracy-Base Performance (-PL1)(1) | ±4.0 µm | |
| Accuracy-Plus Performance (-PL2)(1) | ±300 nm (-E1, -E2, -E3) ±200 nm (-E4) | |
| Repeatability (Bidirectional)(1) | ±75 nm | |
| Resolution (Minimum Incremental Motion) | 2 nm (-E1) 6 nm (-E3) 1 nm (-E4) | |
| Straightness(1) | ±2.25 µm | ±3.0 µm |
| Flatness(1) | ±3.5 µm | ±4.0 µm |
| Pitch | 10 arc sec | |
| Roll | 10 arc sec | |
| Yaw | 5 arc sec | |
| Maximum Speed | 200 mm/s (-E1, -E3, -E4) 145 mm/s (-E2) | |
| Maximum Acceleration (No Load) | 1 g | |
| In-Position Stability(2) | <2 nm (-E1) <6 nm (-E3) <1 nm (-E4) | |
| Load Capacity-Vertical(3) | 5 kg | |
| Moving Mass | 0.51 kg | 0.69 kg |
| Stage Mass | 2.11 kg | 2.71 kg |
| Material | Anodized Aluminum | |
| MTBF (Mean Time Between Failure) | 30,000 Hours | |
- Certified with each stage.
- In-position stability is reported as 3-sigma value. Requires a 1 Vpp encoder.
- Payload specifications assume payload is centered on-axis.
- Specifications are reported for a single axis measured 25 mm above the tabletop. Performance of multi-axis systems depends on the payload and workpoint. Consult factory for multi-axis or non-standard applications.
- PLUS performance requires the use of an Aerotech controller.
- To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C per 24 hours. Consult factory for more information.
- Air supply for pneumatic counterbalance must be clean, dry to 0°F dewpoint, and filtered to 0.25 µm or better. Aerotech recommends using nitrogen at 99.9% purity. Supply pressure is determined by the amount of payload carried by the stage.
ANT95LZ Electrical Specifications
| ANT95LZ-025 | ANT95LZ-050 | |
|---|---|---|
| Drive System | Brushless Linear Servomotor | |
| Feedback | Noncontact Linear Encoder 1 Vpp with 20 µm signal period (-E1) Digital RS422 with 5 nm electrical resolution (-E2) BiSS-C absolute + incremental 1 Vpp linear dual-track encoder (-E3) 1 Vpp with 4 µm signal period (-E4) | |
| Maximum Bus Voltage | ±40 VDC | |
| Limit Switches | 5 V, Normally Closed | |
| Home Switch | Near Center | |
Travel (Required)
| Option | Description |
|---|---|
| -025 | 25 mm travel |
| -050 | 50 mm travel |
Feedback (Required)
| Option | Description |
|---|---|
| -E1 | Incremental linear encoder, 1 Vpp amplified sine output |
| -E2 | Incremental linear encoder, digital RS422 output, 5 nm electrical resolution |
| -E3 | Absolute + Incremental 1 Vpp linear dual-track encoder |
| -E4 | Incremental linear encoder, 1 Vpp amplified sine output, high-performance |
Cable Orientation (Required)
| Option | Description |
|---|---|
| -CBL1 | Right-hand cable exit |
| -CBL2 | Left-hand cable exit |
Performance Grade (Required)
| Option | Description |
|---|---|
| -PL1 | Base Performance |
| -PL2 | High-accuracy performance, PLUS |
Integration (Required)
| Option | Description |
|---|---|
| -TAS | Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. |
| -TAC | Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. |
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