ANT95XY Two-Axis XY Nanopositioning Stages
The ANT95-XY crossed-roller-bearing, linear motor, dual-axis stage provides an extremely low profile of only 60 mm. The stage comes with proprietary direct-drive motor technology, noncontact linear encoders, limits, integrated cable management system and three performance grades.
- Description
- Specifications
- Dimensions
- Ordering Info
- Downloads
Design Features
- Enhanced second-generation design
- Achieves minimum incremental motion to 0.5 nm – NEW
- Optimizes orthogonality, straightness & flatness with integrated XY design
- Guarantees two-dimensional accuracy of ±250 nm or better with ULTRA calibration option
- Features high-precision crossed-roller bearings for excellent dynamic performance & generous load capacity
- Maximizes process throughput & reliability with ironless direct-drive linear motor
- Available with high-resolution incremental or absolute encoders – NEW
Key Applications
ANT95XY is ideal for multi-axis applications that require high-precision and dynamic positioning performance, including:
- Photonics assembly & inspection
- Fiber alignment & optimization
- Optics manufacturing, testing & inspection
- Sensor testing & qualification
- Semiconductor processing & inspection
- Research & laboratory applications
Ultra-Precise Stage Design
ANT95XY’s integrated two-axis design allows you to optimize critical geometric elements such as orthogonality, straightness and flatness, resulting in a stage with exceptional motion characteristics. Our direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. Both travel options (25 mm x 25 mm and 50 mm x 50 mm) come with the 60 mm profile height. The integrated cable management system is designed for long life and minimal drag forces.
Noncontact Direct-Drive
Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95XY stages utilize our advanced direct-drive technology to achieve the highest level of positioning performance. This direct-drive technology delivers ultra-smooth, consistent motion with outstanding dynamic characteristics to optimize your process throughput. The unique drive and bearing combination, packaged in an extremely compact form factor, offers tangible advantages in many applications such as high-precision positioning, fiber alignment, optics manufacturing and inspection, sensor testing and scanning processes that demand smooth and precise motion.
Flexible System Design
The ANT95XY family has universal mounting and tabletop patterns that allow for easy system integration. ANT95XY stages are easily combined with other products — including ANT95LZ, ANT95LZS, ANT95R, ANT95V, ANT20G and more — to achieve complex, multiple degree-of-freedom motion and positioning solutions.
ULTRA Performance Grade Option
In order to achieve the highest possible system accuracy from our multi-axis nanopositioning systems, we’ve developed an advanced, dynamic trajectory calibration system. To take advantage of this sophisticated calibration system, the mechanical system is completely assembled, functionally tested and calibrated in our best-in-class metrology labs. Nanometer-level system accuracy can only be achieved under stringent environmental conditions that ensure calibration with the best test equipment, using the highest-precision mechanical elements and ULTRA software capabilities of our industry-leading controls. By implementing ULTRA dynamic trajectory calibration with the ANT95XY, we are able to produce guaranteed two-dimensional accuracies of ±250 nm or better.
The plots provided in the specifications illustrate performance differences between a standard ANT95XY and the ULTRA version. ULTRA calibration virtually eliminates straightness, orthogonality and accuracy errors resulting from yaw.
ANT95XY Specifications
| Travel | 25 mm x 25 mm | 50 mm x 50 mm |
|---|---|---|
| Accuracy-BASE(1) | ±2.5 µm | |
| Accuracy-PLUS(1)(2) | ± 250 nm (-E1, -E2, -E3) ± 200 nm (-E4) | |
| Accuracy-ULTRA(1)(2) | ± 250 nm (-E1, -E2, -E3) ± 200 nm (-E4) | |
| Repeatability (Bidirectional)(1) | ±75 nm | |
| Resolution (Minimum Incremental Motion) | 1 nm (-E1) 5 nm (-E3) 0.5 nm (-E4) | |
| Straightness-BASE(1) | ±1.0 µm | |
| Straightness-PLUS(1) | ±1.0 µm | |
| Straightness-ULTRA(1) | ± 250 nm | |
| Flatness(1) | ±1.0 µm | |
| Pitch | 10 arc sec | |
| Roll | 10 arc sec | |
| Yaw | 5 arc sec | |
| Orthogonality-BASE(2) | 10 arc sec | |
| Orthogonality-PLUS(2) | 3 arc sec | |
| Orthogonality-ULTRA(2) | 1 arc sec | |
| Maximum Speed | 500 mm/s (Upper Axis: -E1, -E3, -E4) 145 mm/s (Upper Axis: -E2) | |
| Maximum Acceleration (No Load) | 4.5 g | 2.75 g |
| Speed Stability | See graph for typical performance | |
| Settling Time | See graph for typical performance | |
| In-Position Stability(3) | <1 nm (-E1) <5 nm (-E3) <0.5 nm (-E4) | |
| Load Capacity(4) | 4 kg | 6 kg |
| Moving Mass-Upper Axis | 0.45 kg | 0.83 kg |
| Moving Mass-Lower Axis | 1.30 kg | 2.33 kg |
| Stage Mass | 1.92 kg | 3.47 kg |
| Material | Anodized Aluminum | |
| MTBF | 30,000 hours | |
- Certified with each stage.
- Requires the use of an Aerotech controller.
- In-position stability is reported as 3-sigma value. Requires a 1 Vpp encoder.
- Payload specifications assume payload is centered on-axis.
- Specifications for BASE and PLUS are reported per-axis, measured 25 mm above the tabletop. Specifications for ULTRA are reported as XY, measured 25 mm above the tabletop. Performance depends on the payload and workpoint. Consult factory for more information.
- To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C per 24 hours. Consult factory for more information.
ANT95XY Electrical Specifications
| Drive System | Brushless Linear Servomotor |
|---|---|
| Feedback | Noncontact Linear Encoders 1 Vpp with 20 µm signal period (-E1) Digital RS422 (-E2) BiSS-C absolute + incremental 1 Vpp linear dual-track encoder (-E3) 1 Vpp with 4 µm signal period (-E4) |
| Maximum Bus Voltage | ± 40 VDC |
| Limit Switches | 5 V, Normally Closed |
| Home Switch | Near Center |
Travel (Required)
| Option | Description |
|---|---|
| -025 | 25 mm x 25 mm travel |
| -050 | 50 mm x 50 mm travel |
Feedback (Required)
| Option | Description |
|---|---|
| -E1 | Incremental linear encoders, 1 Vpp amplified sine output |
| -E2 | Incremental linear encoders, digital RS422 output, 5 nm electrical resolution |
| -E3 | Absolute + Incremental 1 Vpp linear dual-track encoder |
| -E4 | Incremental linear encoders, 1 Vpp amplified sine output, high-performance |
Mounting Plate (Optional)
| Option | Description |
|---|---|
| -MP | Mounting plate |
Performance Grade (Required)
| Option | Description |
|---|---|
| -PL1 | Base performance |
| -PL3 | High-accuracy performance, PLUS |
| -PL4 | Ultra high-accuracy performance, ULTRA |
Integration (Required)
| Option | Description |
|---|---|
| -TAS | Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. |
| -TAC | Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. |
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