Multi-Axis Piezo/Servo/Manual Positioning System
Multi-Axis Piezo/Servo/Manual Positioning System
- 10-axis processing station
- Three axes of piezo nanopositioning, five axes of servo positioning and two axes of manual positioning
- All positioning controlled from a single Aerotech control architecture
- Integrated cable management designed to minimize error motions
- Precision alignments performed by Aerotech to ensure appropriate system operation
- Applications include nano- and micro-assembly, advanced laser processing, sample characterization and more