Six-Axis Piezo Positioner
Six-Axis Piezo Positioner
- Full six degrees of positioning freedom in a minimized footprint design
- Clear aperture allows more access for process tools
- Direct capacitive feedback mechanisms enable nanometer-level positioning
- Designed for low noise and excellent in-position stability
- High stiffness for dynamic moves and millisecond-level step and settle profiles
- Applications include advanced assembly and bonding, sample positioning and many more