HexGen® HEX150-125HL Miniature Hexapod Six-DOF Positioning System
Our HexGen® HEX150-125HL provides consistent and reliable six degree-of-freedom (DOF) motion in a compact yet stiff platform. You’ll benefit from ultra-fine positioning resolution, ample payload capacity, high process throughput and more. HEX150-125HL offers a simple integration experience and intuitive operation with our powerful motion controllers, making it the perfect choice for applications that require complex multi-DOF motion when available space is limited.
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- Specifications
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Design Features
- Cost-effective, second-generation design with exceptional performance
- Industry-leading minimum incremental motion to 15 nm
- Up to 12 kg payload-carrying capacity
- High speeds up to 30 mm/s & 30 °/s increase process throughput
- Efficient two-cable design simplifies system wiring & integration
- Ultra-robust design provides superb reliability
- Easily perform coordinated motion with other axes (servo, stepper, galvo & more) with Aerotech controls
Key Applications
- Optics inspection, alignment & bonding
- Photonic device manipulation, alignment & packaging
- Optical wafer probing
- Synchrotron & beamline sample manipulation
Relentlessly improved. More accessible than ever.
HexGen® HEX150-125HL offers numerous improvements and enhancements over other miniature hexapods. Superb peak-to-peak repeatability over a large travel range and industry-leading minimum incremental motion — combined with high speed, compact size and impressive payload-carrying capacity — make this miniature hexapod more capable and reliable than ever. Reduce implementation risk with guaranteed performance specifications and seamless integration with other motion devices, including stages, laser scan heads, gantries and more. Optimized for scalability and cost-effectiveness, HEX150-125HL is easy to acquire and integrate into R&D labs and production lines.
Easy to Integrate
HEX150-125HL offers effortless integration in even the most constricted operational environments. This second-generation hexapod is more compact and features a simplified, two-cable design, making it easier than ever to install. Easily modify the platform and base with user-specific features or mounting patterns. An optional mounting plate is available for quick installation on breadboards and optical tables. HEX150-125HL features 35 mm diameter clear apertures in the platform and the base, allowing multi-directional workpiece access and providing room for routing of any additional cables and hoses you may require.
Powerful Controls and Software
HEX150-125HL pairs perfectly with our award-winning motion controllers. Built on years of experience in complex kinematic applications, our controls allow simple programming and use of the hexapod in multiple user-defined coordinate systems — all with an intuitive interface and available real-time motion visualization and simulation tools. In addition to controlling the hexapod, our advanced controllers can effortlessly drive and coordinate a variety of motion axes from a unified platform, including servo stages, stepper motors, piezo nanopositioners, laser scan heads and more. Plus, our free HexGen™ sizing software makes it easy to simulate the hexapod’s available travel and workspace.
HEX150-125HL Specifications
| HEX150-125HL - X Axis | HEX150-125HL - Y Axis | HEX150-125HL - Z Axis | HEX150-125HL - A (θx) Axis | HEX150-125HL - B (θy) Axis | HEX150-125HL - C (θz) Axis | |
|---|---|---|---|---|---|---|
| Axis | X | Y | Z | A (θx) | B (θy) | C (θz) |
| Travel | 42 mm | 44 mm | 17 mm | 16 deg | 42 deg | |
| Resolution (Minimum Incremental Motion) | 15nm | 0.04 arc sec | ||||
| Bidirectional Repeatability, pk-pk (2)(3) | ±1.5 µm | ±0.3 µm | ±3 arc sec | |||
| Unidirectional Repeatability, pk-pk | ±0.75 µm | ±0.15 µm | ±1.5 arc sec | |||
| Maximum Speed (4) | 30 mm/s | 8 mm/s | 10 deg/s | 30 deg/s | ||
| Load Capacity, All Positions Vertical (5) | 12 kg | |||||
| Load Capacity, All Positions Horizontal (5) | 5 kg | |||||
| Holding Capacity, De-Energized (6) | 3 kg | |||||
| Stage Mass | 3 kg | |||||
| Material | Anodized Aluminum Platform and Base; Steel Used in Joints and Struts | |||||
- Travels are mutually exclusive. Consult our HexGen Hexapod Sizer for detailed workspace sizing.
- Measured with single-axis moves at a height of 50 mm above the moving platform. Results may vary with loading condition and workpoint location.
- X, Y, Z performance certified as standard.
- Requires the selection of an appropriate amplifier with sufficient voltage and current
- Centered loading – consult load curves. Contact factory for payloads exceeding the published values.
- Horizontal base plate, centered loading – consult load curves.
HEX150-125HL Electrical Specifications
| HEX150-125HL - X Axis | HEX150-125HL - Y Axis | HEX150-125HL - Z Axis | HEX150-125HL - A (θx) Axis | HEX150-125HL - B (θy) Axis | HEX150-125HL - C (θz) Axis | |
|---|---|---|---|---|---|---|
| Drive System | Precision Ball Screw, Brushless Servomotor | |||||
| Feedback | Noncontact Incremental Encoder | |||||
| Maximum Bus Voltage | 48 VDC recommended for typical operation; 80 VDC max. | |||||
| Limit Switches | 5 V, Normally-Closed (Located on Each Strut) | |||||
Mounting Plate (Optional)
| Option | Description |
|---|---|
| -MP | Adapter plate for HEX150-125HL base mounting |
Vacuum Preparation (Optional)
| Option | Description |
|---|---|
| -HV | High vacuum preparation to 10-6 Torr |
Cable Length (Optional)
| Option | Description |
|---|---|
| -xx | Cable length1 in decimeters (4.0 dm is default) |
- Specify cable length only for vacuum-prepared hexapods (-HV option). Non-vacuum-compatible hexapods are equipped with 4 dm cables. See catalog drawing for details.
Performance Grade (Required)
| Option | Description |
|---|---|
| -PL1 | Base performance; includes only bidirectional repeatability plots for X, Y, Z, A, B, C axes |
| -PL4 | Ultra high-accuracy performance; includes mapping and calibration with accuracy & bidirectional repeatability plots for X, Y, Z, A, B, C axes |
Integration (Required)
| Option | Description |
|---|---|
| -TAS | Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. |
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