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Ordering Info



Path 7




Ordering Info



Design Features

  • Travels to 240 μm x 240 μm x 25 μm
  • Large square clear aperture up to 66 mm x 66 mm
  • Superior multi-axis accuracy via parallel kinematic design
  • High stiffness and dynamics resulting in high process throughput
  • High-precision, frictionless flexure guidance
  • Patent-pending design provides unmatched geometric performance
  • Long device lifetime
  • Superior positioning resolution and linearity with direct-metrology capacitive sensor option
  • Open-loop and vacuum versions

Aerotech’s QNP3 Series of XYZ parallel kinematic piezo positioning stages combines sub-nanometer resolution, high dynamics and excellent geometric performance in a compact, low-profile package. The QNP3 series piezo stages come standard with a large, clear aperture with closed-loop travels up to 200 µm x 200 µm x 20 µm (open-loop travels to 240 µm x 240 µm x 25 µm). The design is ideal for optical and scanning probe microscopy or other inspection or manufacturing applications that require two-sided part access with three DoF manipulation.

Precision Parallel-Kinematic Design

The QNP3 piezo stages employ a parallel-kinematic flexure and metrology design that ensures the highest levels of multi-axis accuracy. Guided by precision flexures which are FEA-optimized to ensure high stiffness and long device life, the QNP3 stages offer best-in-class stiffness and resonant frequency enabling high process throughput and fast closed-loop response.

Using a patent-pending drive design, X and Y yaw errors are minimized while still maintaining an Abbe-compliant metrology system. This design results in unmatched positioning performance over the entire XY travel space. Z-axis actuators and capacitive sensors are designed to provide Abbe-compliant feedback in the vertical direction with minimal geometric errors.

Sub-Nanometer Performance

All QNP3 piezo stages are available with closed-loop feedback (-C) or open-loop (no feedback). The unique capacitive sensor parallel-metrology design measures the output of the positioning carriage, directly enabling sub-nanometer resolution, linearity errors below 0.01%, and single-digit nanometer repeatability.

Ultra-Precision Control

When coupled with Aerotech’s Q-series controllers and drives, the QNP3 stages demonstrate sub-nanometer positioning resolution, in-position stability (jitter), and high positioning bandwidth. Software options such as Aerotech’s Dynamic Controls Toolbox and Motion Designer packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times. OEM drive options are also available. Aerotech’s controller architecture easily enables high-speed, tightly-controlled coordinated motion between piezo stages, servos, steppers, and galvos.

Design Options

An optional mounting plate provides direct mounting English or metric breadboard optical tables. A solid tabletop option is also available. QNP3 piezo stages are available in custom materials and vacuum-prepared versions upon request.





Ordering Information

QNP3 Series Two-Axis XYZ Piezo Nanopositioning Stage

Option Description
QNP3-100XYAZ-030-10QNP3 three-axis XYZ piezo nanopositioning stage, 30 µm x 30 µm x 10 µm closed-loop travel
QNP3-100XYAZ-100-10QNP3 three-axis XYZ piezo nanopositioning stage, 100 µm x 100 µm x 10 µm closed-loop travel
QNP3-150XYAZ-200-20 QNP3 three-axis XYZ piezo nanopositioning stage, 100 µm x 100 µm x 10 µm closed-loop travel QNP3-150XYAZ-200-20 QNP3 three-axis XYZ piezo nanopositioning stage, 200 µm x 200 µm x 20 µm closed-loop travel

Feedback (Optional)

Option Description
-CCapacitance sensor feedback

Mounting Plate (Optional)

Option Description
-MP Mounting plate for English and metric optical breadboard tables

Tabletop (Optional)

Option Description
-TT1Solid metric tabletop, covers aperture

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system

Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components

Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

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