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Multiple Z Split Platform
Description
Design Features
- Custom engineered split-axis Cartesian subsystem
- Thoughtfully specified to minimize positioning errors contributed by the multiple tools and working locations
- Mechanical bearing axes for high load capacity and dynamic processing
- Granite base with passive isolation system and steel weldment designed to reduce external disturbances
- Four overhead processing tool carriages for more flexibility and throughput
- Large working plane in X and Y for large substrates or multiple work locations
- Simplified programming interface utilizing an advanced motion controller from Aerotech