Description

Design Features

• Custom engineered split-axis Cartesian subsystem
• Thoughtfully specified to minimize positioning errors contributed by the multiple tools and working locations
• Mechanical bearing axes for high load capacity and dynamic processing
• Granite base with passive isolation system and steel weldment designed to reduce external disturbances
• Four overhead processing tool carriages for more flexibility and throughput
• Large working plane in X and Y for large substrates or multiple work locations
• Simplified programming interface utilizing an advanced motion controller from Aerotech