Multiple Z Split Platform


Design Features

  • Custom engineered split-axis Cartesian subsystem
  • Thoughtfully specified to minimize positioning errors contributed by the multiple tools and working locations
  • Mechanical bearing axes for high load capacity and dynamic processing
  • Granite base with passive isolation system and steel weldment designed to reduce external disturbances
  • Four overhead processing tool carriages for more flexibility and throughput
  • Large working plane in X and Y for large substrates or multiple work locations
  • Simplified programming interface utilizing an advanced motion controller from Aerotech