AGV-HP(O) High Accuracy, Thermally Stable Galvo Scanner


Design Features

  • Attains single-digit, micron-level accuracy throughout the field of view
  • Improves thermal stability significantly with optical feedback technology
  • Delivers industry-best resolution of >24 bits when used with Aerotech’s GCL controller
  • Includes wide range of apertures and focal lengths
  • Offers many choices of mirror surface treatments for a variety of laser wavelengths

Calibrate Micron-Level Accuracy, Count on Ultimate Stability

With AGV-HP(O), which offers the highest level of accuracy of any laser scanner, you’ll produce consistent parts with smaller, more precise features. The AGV HP(O)’s highly repeatable and thermally stable feedback sensors can be calibrated down to single-digit, micron-level accuracy over the field of view (see figure below). With the extremely low thermal gain drift performance of the position transducers, complex, high-density laser machining applications that take long periods of time to complete will maintain consistent micron-level feature placement accuracy over the lifetime of the process. Likewise, high-throughput applications will maintain consistent part-to- part quality without having to re-calibrate between parts. For the highest level of thermal stability, the AGV-HP(O) scanners can be equipped with water cooling to stabilize the operating temperature of the device under varying loads, changes in ambient temperature or beam clipping on the input aperture.


Real-Time Process Visibility

The location of the AGV-HP(O) mirrors can be captured and analyzed in real time. With direct access to the scanner positions, you won’t need to program delay parameters to compensate for lag and tracking errors in the servo system. The process can be optimized prior to marking the part, saving you time and reducing material waste. You can also control the state of the laser based on in-position and velocity criteria, further reducing programming complexity.

Advanced Programming Features

The AGV-HP(O) uses all the advanced motion and position synchronized output (PSO) capabilities that Aerotech has developed for traditional servo-based laser processing applications. Contouring functions, such as acceleration limiting, can be used to automatically reduce speeds in tight corners or small radii to minimize overshoot. The laser can be triggered based on the position feedback of the mirrors with PSO to ensure consistent spot overlap as the scanner changes speed. Aerotech’s Infinite Field of View (IFOV) function seamlessly combines servo and scanner motion to extend the marking capability of the scanner across the entire travel of the servo stages, eliminating stitching errors that can occur in a more traditional move-expose-repeat process.

Design Choices

The AGV-HP(O) family is available with 10, 14, 20 and 30 mm input apertures and can be equipped with an F-Theta or telecentric lens directly from Aerotech. Users can also acquire the focusing optic directly from a trusted supplier, with Aerotech supplying a spacer ring to ensure that back reflections through the optic do not damage the scanner mirrors. Mirror coatings for a wide range of UV, visible, IR and CO2 wavelengths are supported. Coatings optimized for ultra-fast lasers are also available.


Mechanical Specifications

Optical Performance
Beam Aperture 10 mm 14 mm 20 mm 30 mm
Maximum Scan Angle ±20°
Beam Displacement 12.6 mm 16.5 mm 23.2 mm 35.7 mm
Feedback Resolution 0.012 µrad (25 bit)
Dither (Min. Incremental Motion)(2) 0.4 µradRMS
Accuracy 50 µrad pk-pk
Repeatability(3) 0.4 µradRMS
Gain Error 0.05 mrad
Non-Linearity 0.005%
Dynamic Performance
Tracking Error 0 µsec
Peak Acceleration(4,5) 288,000 m/s2 224,000 m/s2 80,000 m/s2 56,000 m/s2
Continuous Acceleration(4, 6) 75,200 m/s2 56,000 m/s2 20,800 m/s2 19,200 m/s2
Positioning Speed(4) 75 m/s 75 m/s 50 m/s 20 m/s
Marking Speed(4, 7, 8) 5 m/s 5 m/s 5 m/s 5 m/s
Jump & Settle Time, 1 mm Move(4, 9) 270 µsec 270 µsec 450 µsec 700 µsec
Long-Term Drift(3) Offset 10 µrad/12 hrs
15 µrad/24 hrs
Gain 10 ppm/24 hrs
Thermal Drift Offset 10 µrad/°C
Gain 1 ppm/°C
Mechanical Specifications
Mass -HP 4.1 kg 4.4 kg 5.1 kg 5.8 kg
-HPO 2.5 kg 2.6 kg 2.9 kg 3.1 kg
Material Aluminum (Black Anodize and Blue Paint)
MTBF (Mean Time Between Failure) 20,000 Hours

1. All angles are optical unless otherwise specified.
2. Without -AC air cooling option.
3. After initial 3 hour warm-up, ambient temperature variation < ±0.5 deg.
4. Typical performance with f = 160mm F-Theta objective.
5. Based on maximum rated current of the motor.
6. Based on rated rms current of the motor with -WC water cooling option; maximum continuous acceleration is 70% of this value without water cooling.
7. Achievable with <1% velocity error over continuous velocity portion of move.
8. Marking speed is dependent on allowable tracking error.
9. Settled to within 1% of move distance.
10. All specifications are per axis unless otherwise noted.

Electrical Specifications

Drive System Brushless Direct-Drive Galvano Motor
Feedback Noncontact Rotary Encoder
Maximum Bus Voltage ±40 VDC
Limit Switches Optical limit switches and software limits
Home Switch At Center


Ordering Information

AGV-HP(O) Series Galvanometer Scanner

AGV10HP(O) 2-axis galvanometer scanner with 10 mm diameter beam aperture and integral high-precision feedback
AGV14HP(O) 2-axis galvanometer scanner with 14 mm diameter beam aperture and integral high-precision feedback
AGV20HP(O) 2-axis galvanometer scanner with 20 mm diameter beam aperture and integral high-precision feedback
AGV30HP(O) 2-axis galvanometer scanner with 30 mm diameter beam aperture and integral high-precision feedback

Housing Type (Required)

- Closed scanner housing (AGVxxHP)
O Open scanner housing (AGVxxHPO)
Note: -BE2 is not available with AGV30HP or AGV30HPO.

Beam Entry (Required)

-BE1 Right-side laser beam entry (standard)
-BE2 Left-side laser beam entry

Wavelength of Mirror Coating (Required)

-W001 10.6 µm
-W002 Durable-Silver (450 nm - 10.6 µm)
-W003 1552 nm
-W004 1064 nm
-W005 1030 nm
-W006 532 nm
-W007 515 nm
-W008 355 nm
-W009 343 nm
-W012 9.3 µm

Note: Custom coatings available. Contact factory for details.

F-Theta Lenses Available (Optional)(1, 2)

-Lxx See Table 1: F-Theta Lenses Available

Mounting Plate (Optional)

-MP Mounting plate

Note: -MP option is only available with closed scanner housing (AGVxxHP) models.

Air Cooling (Optional)

-AC Air cooling

 Water Cooling (Optional)

-WC Water cooling

 Performance Grade (Required)

-PL0 Standard performance grade
-PL9 Ultra performance grade

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Lens Mounting Adapters (to be ordered as separate line item)

LM10HP-XXX Lens mount adapter for AGV10HP(O); standard versions support the lens configurations offered by Aerotech; custom versions available on request
LM14HP-XXX Lens mount adapter for AGV14HP(O); standard versions support the lens configurations offered by Aerotech; custom versions available on request
LM20HP-XXX Lens mount adapter for AGV20HP(O); standard versions support the lens configurations offered by Aerotech; custom versions available on request
LM30HP-XXX Lens mount adapter for AGV30HP(O); standard versions support the lens configurations offered by Aerotech; custom versions available on request

Table 1: F-Theta Lenses Available (Optional)(1, 2)

-L1 1552-100-T
55 mm sq. FOV
- 10600-100-T
35 mm sq. FOV
100 mm sq. FOV
-L2 1552-163-T
90 mm sq. FOV
- 10600-160
75 mm sq. FOV
65 mm sq. FOV(4)
-L3 1064-100
65 mm sq. FOV(4)
45 mm sq. FOV
160 mm sq. FOV
150 mm sq. FOV(4)
-L4 1064-255
150 mm sq. FOV(4)
90 mm sq. FOV
40 mm sq. FOV
230 mm sq. FOV(4)
-L5 1064-160
105 mm sq. FOV(4)
35 mm sq. FOV(4)
70 mm sq. FOV(4)
-L6 1064-163-T
90 mm sq. FOV
60 mm sq. FOV(4)
70 mm sq. FOV
-L7 1030-100-T
40 mm sq. FOV
80 mm sq. FOV(4)
150 mm sq. FOV(4)
-L8 1030-163-T
90 mm sq. FOV
85 mm sq. FOV
145 mm sq. FOV(4)
-L9 532-100
55 mm sq. FOV(4)
110 mm sq. FOV(4)
- -
-L10 532-100-T
60 mm sq. FOV(4)
30 mm sq. FOV
- -
-L11 532-160
105 mm sq. FOV(4)
90 mm sq. FOV
- -
-L12 532-163-T
75 mm sq. FOV
60 mm sq. FOV(4)
- -
-L13 515-100-T
40 mm sq. FOV
105 mm sq. FOV(4)
- -
-L14 515-163-T
40 mm sq. FOV
75 mm sq. FOV
- -
-L15 355-53-T
15 mm sq. FOV
100 mm sq. FOV(4)
- -
-L16 355-100-T
50 mm sq. FOV
40 mm sq. FOV
- -
-L17 355-160
90 mm sq. FOV
40 mm sq. FOV
- -
-L18 355-163-T
80 mm sq. FOV
5 mm sq. FOV
- -
-L19 355-255
140 mm sq. FOV
80 mm sq. FOV
- -
-L20 - 355-255
140 mm sq. FOV
- -
-L21 - 343-53-T
5 mm sq. FOV
- -
-L22 - 343-163-T
70 mm sq. FOV
- -
-L23 - 343-255
115 mm sq. FOV
- -
1. Lenses specified as XXX-YYY(-T), where “XXX” represents the wavelength in nanometers, “YYY” represents the focal length in millimeters, and the presence of “-T” indicates a telecentric design.
2. Input beam diameter is assumed to be equal to scan head entrance aperture at 1/e^2 Gaussian profile.
3. Reported field-of-view (FOV) sizes are approximate and may be subject to minor variation as a function of the application’s laser and optical paramterers.
Contact factory for details.
4. Certain F-theta lenses are not recommended for use with short-pulse lasers (picosecond and femtosecond pulse durations). Contact factory for alternate lens options that are
compatible with short-pulse lasers.
5. Custom lenses available. Contact factory for details.