FiberMaxHP MultiAxis Photonics Alignment System
Description
Design Features
 2ndgeneration photonics alignment platform built on highperformance ANT nanopositioners
 Up to 6 axes of precision motion
 Proven reliability for 24/7 manufacturing
 Noncontact, directdrive for all axes enabling highthroughput alignment
 Minimum incremental motion to 2 nm on linear motion and 0.05 μrad on rotary motion
 Powerful controls with standard scanning algorithms and virtual pivotpoint kinematics
 Flexible design with many standard configurations and options
 Interface to industrystandard power meters
Aerotech’s FiberMax^{®}_{HP} represents a significant breakthrough in the highvolume manufacturing and testing of photonics components. The FiberMax_{HP} reflects more than 40 years of experience in designing advanced positioning systems for OEMs and endusers in the hightechnology industries. The FiberMax_{HP} is a secondgeneration three to sixaxes photonics alignment platform built on Aerotech's ANT nanopositioning product line. It is designed to meet the demanding needs of critical photonics alignment in a highly automated, 24/7 production environment with no compromise in speed, accuracy, and resolution.
A highly repeatable, precise, and industrialgrade positioning system is the foundation for highvolume manufacturing and testing of photonics components. FiberMax_{HP}’s highly reliable, unique drive and control technologies ensure many years of maintenancefree service in a high throughput, 24/7 manufacturing environment.
UltraPrecision DirectDrive
As alignment tolerances become smaller with new silicon photonics devices, the requirement for highspeed and highaccuracy alignment is essential. FiberMax_{HP} noncontact directdrive technology enables highprecision alignment without sacrificing production throughput. Capable of minimum incremental motion down to 2 nm coupled with speeds to 400 mm/s, the FiberMax_{HP} meets the challenges of aligning nextgeneration photonics packages.
The directdrive technology employed in FiberMax_{HP} offers a significant precision and throughput advantage over other alignment platforms.
Powerful Kinematics and Scanning Routines
Aerotech’s controllers work with a variety of smart cameras and machine vision systems to help facilitate first light. Our power servo scanning algorithms can be called to optimize power coupled through the devices. Standard scanning routines include fast align, hill climb, spiral, and raster searches in up to six axes of motion.
Our advanced kinematics enable a virtual pivot point where rotation can occur at any userdefined point in space rather than the physical rotation point of the FiberMax_{HP} axes. This assists the speed and accuracy of active alignment. We have an extensive range of software and hardware options to suit your specific needs.
Flexible System Configuration
The FiberMax_{HP} is available with three to sixaxes of directdrive alignment axes allowing the platform to be specified with the exact number of axes needed for the application. Since many applications require manual adjustment of fixtures and parts for a onetime initial alignment, the FiberMax_{HP} comes with one to threeaxes of manual angular alignment axes with ±2° of motion. These manual adjustment axes mount directly to the directdrive platform and offer a more economical approach to alignment when adjustment is not frequently required.
Aerotech has many years of experience providing solutions to the photonics industry. We realize that your application may be unique and require customization. The FiberMax_{HP} is a modular design and can be easily customized with special arrangement of axes, fixturing, and mounting patterns to meet the needs of your specific application.
Specifications
FiberMax_{HP} Specifications
FiberMax_{HP}  ZXY  ZXYT  ZXYR  ZXYP  

Travels  X: 50 mm Y: 3 mm Z: 50 mm 
X: 50 mm Y: 3 mm Z: 50 mm T: 20 deg 
X: 50 mm Y: 3 mm Z: 50 mm R: 20 deg 
X: 50 mm Y: 3 mm Z: 50 mm P: 20 deg 

Accuracy^{(2,3)}  Base Performance (PL1)  X: ±3.0 μm Y: ±2.0 μm Z: ±3.5 μm 
X: ±4.2 μm Y: ±2.0 μm Z: ±4.7 μm T: ±25 μrad 
X: ±4.2 μm Y: ±2.0 μm Z: ±4.7 μm R: ±90 μrad 
X: ±4.2 μm Y: ±2.0 μm Z: ±4.7 μm P: ±90 μrad 
PLUS Performance (PL3)  X: ±300 nm Y: ±200 nm Z: ±300 nm 
X: ±300 nm Y: ±200 nm Z: ±300 nm T: ± 8 μrad 
X: ±300 nm Y: ±200 nm Z: ±300 nm R: ±30 μrad 
X: ±300 nm Y: ±200 nm Z: ±300 nm P: ±30 μrad 

Resolution (Min. Incremental Motion)  2 nm  X/Y/Z: 2 nm T: 0.05 μrad 
X/Y/Z: 2 nm R: 0.25 μrad 
X/Y/Z: 2 nm P: 0.25 μrad 

Bidirectional Repeatability^{(3)}  ±150 nm  X/Z: ±175 nm Y: ±150 nm T: ±3.5 μrad 
X/Z: ±175 nm Y: ±150 nm R: ±18 μrad 
X/Z: ±175 nm Y: ±150 nm P: ±18 μrad 

Maximum Speed^{(4)}  X: 400 mm/s Y: 75 mm/s Z: 200 mm/s 
X: 400 mm/s Y: 75 mm/s Z: 200 mm/s T: 120 deg/s 
X: 400 mm/s Y: 75 mm/s Z: 200 mm/s R: 150 deg/s 
X: 400 mm/s Y: 75 mm/s Z: 200 mm/s P: 150 deg/s 

Load Capacity^{(5)}  2 kg  1.5 kg  1.5 kg  1.5 kg  
Stage Mass  6.0 kg  7.5 kg  6.5 kg  6.5 kg  
Material  Anodized Aluminum  
MTBF (Mean Time Between Failure)  30,000 Hours 
Notes:
 Values listed are per axis measured 20 mm off of top mounting platform.
 Requires Aerotech controller.
 Certified with each system.
 Requires the selection of an appropriate amplifier with sufficient voltage and current.
 Onaxis loading.
FiberMax_{HP}  ZXYTR  ZXYTP  ZXYTPR  

Travels  X: 50 mm Y: 3 mm Z: 50 mm T: 20 deg R: 20 deg 
X: 50 mm Y: 3 mm Z: 50 mm T: 20 deg P: 20 deg 
X: 50 mm Y: 3 mm Z: 50 mm T: 20 deg P: 20 deg R: 20 deg 

Accuracy^{(2,3)}  Standard  X: ±5.5 μm Y: ±2.0 μm Z: ±6.0 μm T: ±25 μrad R: ±90 μrad 
X: ±5.5 μm Y: ±2.0 μm Z: ±6.0 μm T: ±25 μrad P: ±90 μrad 
X: ±6.5 μm Y: ±2.0 μm Z: ±7.0 μm T: ±25 μrad P/R: ±90 μrad 

PLUS  X: ±350 nm Y: ±200 nm Z: ±350 nm T: ±8 μrad R: ±30 μrad 
X: ±350 nm Y: ±200 nm Z: ±350 nm T: ±8 μrad P: ±30 μrad 
X: ±400 nm Y: ±200 nm Z: ±400 nm T: ±8 μrad P/R: ±30 μrad 

Resolution (Min. Incremental Motion)  X/Z: 3 nm Y: 2 nm T: 0.05 μrad R: 0.25 μrad 
X/Z: 3 nm Y: 2 nm T: 0.05 μrad P: 0.25 μrad 
X/Z: 4 nm Y: 2 nm T: 0.05 μrad P/R: 0.25 μrad 

Bidirectional Repeatability^{(3)}  X/Z: ±200 nm Y: ±150 nm T: ±3.5 μrad R: ±18 μrad 
X/Z: ±200 nm Y: ±150 nm T: ±3.5 μrad P: ±18 μrad 
X/Z: ±250 nm Y: ±150 nm T: ±3.5 μrad P/R: ±18 μrad 

Maximum Speed^{(4)}  X: 400 mm/s Y: 75 mm/s Z: 200 mm/s T: 120 deg/s R: 150 deg/s 
X: 400 mm/s Y: 75 mm/s Z: 200 mm/s T: 120 deg/s P: 150 deg/s 
X: 400 mm/s Y: 75 mm/s Z: 200 mm/s T: 120 deg/s P/R: 150 deg/s 

Load Capacity^{(5)}  1 kg  1 kg  1 kg  
Stage Mass  8.0 kg  8.0 kg  9.0 kg  
Material  Anodized Aluminum  
MTBF (Mean Time Between Failure)  30,000 Hours 
Notes:
 Values listed are per axis measured 20 mm off of top mounting platform.
 Requires Aerotech controller.
 Certified with each system.
 Requires the selection of an appropriate amplifier with sufficient voltage and current.
 Onaxis loading.
Electrical Specifications
Drive System  Brushless Servomotor 
Feedback  Noncontact Linear Encoder 
Maximum Bus Voltage  340 VDC 
Limit Switches  5 V, Normally Closed 
Home Switch  Near Center of Travel 
Recommended Controller
A3200  Npaq MXR Npaq MRMXH Ndrive MLMXH 
Note: Linear amplifiers are required to achieve the listed specifications. Other options are available.
Dimensions
Ordering Information
FiberMax_{HP }MultiAxis Photonics Alignment System
Axis Configuration (Required)
Option  Description 

ZXY  3axis platform (Z, X, Y) 
ZXYT  4axis platform (Z, X, Y, Theta) 
ZXYP  4axis platform (Z, X, Y, Pitch) 
ZXYR  4axis platform (Z, X, Y, Roll) 
ZXYTP  5axis platform (Z, X, Y, Theta, Pitch) 
ZXYTR  5axis platform (Z, X, Y, Theta, Roll) 
ZXYTPR  6axis platform (Z, X, Y, Theta, Pitch, Roll) 
Manual Adjustment (Optional)
Option  Description 

ADJ1  3axis manual angular adjustment (±2 deg), Yaw/Pitch/Roll 
ADJ2  2axis manual angular adjustment (±2 deg), Pitch/Roll 
ADJ3  2axis manual angular adjustment (±2 deg), Yaw/Pitch 
ADJ4  2axis manual angular adjustment (±2 deg), Yaw/Roll 
ADJ5  1axis manual angular adjustment (±2 deg), Pitch 
ADJ6  1axis manual angular adjustment (±2 deg), Roll 
Mounting Plate (Optional)
Option  Description 

MP1  Mounting plate for optical table mounting 
Performance Level (Required)
Option  Description 

PL1  Base performance 
PL3  Highaccuracy performance, PLUS 
Integration (Required)
Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
Option  Description 

TAS  Integration  Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. 
TAC  Integration  Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. 
Accessories (Ordered as Separate Line Item)
Option  Description 

APANT95RANT20G50  Adapter plate, ANT95R to ANT20G50 
APANT95RANT20G90  Adapter plate, ANT95R to ANT20G90 
Manual Angular Adjustment Stages  
MADJAT1  1axis, Pitch or Roll (±2 deg) 
MADJAT2  2axis, Pitch/Roll (±2 deg) 
MADJAT3  2axis, Yaw/Pitch or Yaw/Roll (±2 deg) 
MADJAT4  3axis, Yaw/Pitch/Roll (±2 deg) 