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Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Path 7

Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Key Features

  • Available in 10 mm, 14 mm, 20 mm & 30 mm input apertures
  • Standard high-performance reflective coatings range from UV (<300 nm) to CO2  (>10,600 nm)
  • Digital position resolution of >24 bits
  • Thermally stable open-housing design with optional closed circuit water motor cooling & gas mirror cooling
  • Dual digital encoder feedback eliminates velocity error & enables single-digit, micron-level accuracy throughout scanner Field of View (FOV)

Key Applications

The AGV-HPO is ideal for all types of 2D laser scanning applications where precision and throughput are critical to quality, including:

  • Glass cutting
  • Via drilling
  • Surface texturing
  • Micromachining

Design Choices

The AGV-HPO is available with 10, 14, 20 and 30 mm input apertures with right- or left-side beam entry. It can be equipped with an F-Theta or telecentric lens directly from Aerotech. Alternatively, users can acquire the focusing optic directly from an outside supplier and pair it with an Aerotech-supplied spacer ring (to ensure back reflections through the optic do not damage scanner mirrors). Mirror coatings for a wide range of UV, visible, IR and CO2 wavelengths are supported. Coatings optimized for ultra-fast lasers are also available. 

Powerful Controls Enable Real-Time Process Visibility

Powered by our Automation1 PC-based motion controller and driven by linear amplifiers, the AGV-HPO can execute motion at trajectory rates up to 200 kHz. The location of the AGV-HPO’s mirrors can be captured and analyzed in real time. With direct access to the scanner positions, you won’t need to program delay parameters to compensate for lag and tracking errors in the servo system. The process can be optimized prior to marking the part, saving time and reducing material waste. You can also control the laser’s state based on in-position and velocity criteria, further reducing programming complexity.

Advanced Programming Features

The AGV-HPO uses all the advanced motion and position synchronized output (PSO) capabilities developed for our traditional servo-based laser processing applications. Contouring functions like acceleration limiting automatically reduce speeds in tight corners or small radii to minimize overshoot. With PSO, the laser can be triggered based on the mirror’s position feedback, ensuring consistent spot overlap as the scanner changes speed. Infinite Field of View (IFOV) seamlessly combines servo and scanner motion to extend the scanner’s marking capability across the entire travel of the servo stages, eliminating stitching errors that can occur in a more traditional move-expose-repeat process.

Dimensions

AGV10HPO-BE1



AGV10HPO-BE2



AGV14HPO-BE1



AGV14HPO-BE2



AGV20HPO-BE1



AGV20HPO-BE2



AGV30HPO-BE1



Ordering Information

AGV-HPO Series High-Accuracy Laser Scan Head

Option Description
AGV10HPO 2-axis galvanometer scanner with 10 mm diameter beam aperture and integral high-precision feedback
AGV14HPO 2-axis galvanometer scanner with 14 mm diameter beam aperture and integral high-precision feedback
AGV20HPO 2-axis galvanometer scanner with 20 mm diameter beam aperture and integral high-precision feedback
AGV30HPO 2-axis galvanometer scanner with 30 mm diameter beam aperture and integral high-precision feedback

Beam Entry (Required)

Option Description
-BE1 Right-side laser beam entry (standard)
-BE2 Left-side laser beam entry

Wavelength of Mirror Coating (Required)

Option Description
-W001 10.6 µm
-W002 Durable-Silver (450 nm - 10.6 µm)
-W003 1552 nm
-W004 1064 nm
-W005 1030 nm
-W006 532 nm
-W007 515 nm
-W008 355 nm
-W009 343 nm
-W012 9.3 µm
Note:
  1. Custom coatings available. Contact factory for details.

F-Theta Lenses Available (Optional)(1, 2)

Option Description
-Lxx See Table 1: F-Theta Lenses Available

Mounting Plate (Optional)

Option Description
-MP Mounting plate
Note:
  1. -MP option is only available with closed scanner housing (AGVxxHP) models.

Air Cooling (Optional)

Option Description
-AC Air cooling

Water Cooling (Optional)

Option Description
-WC Water cooling

Performance Grade (Required)

Option Description
-PL0 Standard performance grade
-PL9 Ultra performance grade

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system
 
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
 
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Lens Mounting Adapters (to be ordered as separate line item)

Option Description
LM10HP-XXX Lens mount adapter for AGV10HP(O); standard versions support the lens configurations offered by Aerotech; custom versions available on request
LM14HP-XXX Lens mount adapter for AGV14HP(O); standard versions support the lens configurations offered by Aerotech; custom versions available on request
LM20HP-XXX Lens mount adapter for AGV20HP(O); standard versions support the lens configurations offered by Aerotech; custom versions available on request
LM30HP-XXX Lens mount adapter for AGV30HP(O); standard versions support the lens configurations offered by Aerotech; custom versions available on request

Table 1: F-Theta Lenses Available (Optional)(1, 2)

AGV10HPO AGV14HPO AGV20HPO AGV30HPO
-L1 1552-100-T
55 mm sq. FOV
- 10600-100-T
35 mm sq. FOV

35 mm sq. FOV 10600-255
100 mm sq. FOV
-L2 1552-163-T
90 mm sq. FOV
- 10600-160
75 mm sq. FOV
1064-200
65 mm sq. FOV_4
-L3 1064-100
65 mm sq. FOV(4)
1552-100-T
45 mm sq. FOV
10600-255
160 mm sq. FOV
1064-255
150 mm sq. FOV(4)
-L4 1064-255
150 mm sq. FOV(4)
1552-163-T
90 mm sq. FOV
1064-100-T
40 mm sq. FOV
1064-500
230 mm sq. FOV(4)
-L5 1064-160
105 mm sq. FOV(4)
1064-100
35 mm sq. FOV(4)
1064-163
70 mm sq. FOV(4)
-
-L6 1064-163-T
90 mm sq. FOV
1064-100-T
60 mm sq. FOV(4)
1064-163-T
70 mm sq. FOV
-
-L7 1030-100-T
40 mm sq. FOV
1064-160
80 mm sq. FOV(4)
1064-255
150 mm sq. FOV(4)
-
-L8 1030-163-T
90 mm sq. FOV
1064-163-T
85 mm sq. FOV
532-255
145 mm sq. FOV(4)
-
-L9 532-100
55 mm sq. FOV(4)
1064-170
110 mm sq. FOV(4)
- -
-L10 532-100-T
60 mm sq. FOV(4)
1030-100-T
30 mm sq. FOV
- -
-L11 532-160
105 mm sq. FOV(4)
1030-163-T
90 mm sq. FOV
- -
-L12 532-163-T
75 mm sq. FOV
532-100-T
60 mm sq. FOV(4)
- -
-L13 515-100-T
30 mm sq. FOV
532-160
105 mm sq. FOV(4)
- -
-L14 515-163-T
40 mm sq. FOV
532-163-T
75 mm sq. FOV
- -
-L15 355-53-T
15 mm sq. FOV
532-170
100 mm sq. FOV(4)
- -
-L16 355-100-T
50 mm sq. FOV
515-100-T
30 mm sq. FOV
- -
-L17 355-160
90 mm sq. FOV
515-163-T
40 mm sq. FOV
- -
-L18 355-163-T
80 mm sq. FOV
355-53-T
5 mm sq. FOV
- -
-L19 355-255
140 mm sq. FOV
355-163-T
80 mm sq. FOV
- -
-L20 - 355-255
140 mm sq. FOV
- -
-L21 - 343-53-T
5 mm sq. FOV
- -
-L22 - 343-163-T
70 mm sq. FOV
- -
-L23 - 343-255
115 mm sq. FOV
- -
Notes:
  1. Lenses specified as XXX-YYY(-T), where “XXX” represents the wavelength in nanometers, “YYY” represents the focal length in millimeters, and the presence of “-T” indicates a telecentric design.
  2. Input beam diameter is assumed to be equal to scan head entrance aperture at 1/e^2 Gaussian profile.
  3. Reported field-of-view (FOV) sizes are approximate and may be subject to minor variation as a function of the application’s laser and optical paramterers. Contact factory for details.
  4. Certain F-theta lenses are not recommended for use with short-pulse lasers (picosecond and femtosecond pulse durations). Contact factory for alternate lens options that are compatible with short-pulse lasers.
  5. Custom lenses available. Contact factory for details.