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Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Path 7

Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Design Features

  • Attains single-digit, micron-level accuracy throughout the field of view
  • Improves thermal stability significantly with optical feedback technology
  • Delivers industry-best resolution of >24 bits when used with an Aerotech controller
  • Includes wide range of apertures and focal lengths
  • Offers many choices of mirror surface treatments for a variety of laser wavelengths
  • Calibrate micron-level accuracy, count on ultimate stability

With the extremely low thermal gain drift performance of the position transducers, complex, high-density laser machining applications that take long periods of time to complete will maintain consistent micron-level feature placement accuracy over the lifetime of the process. Likewise, high-throughput applications will maintain consistent part-to-part quality without having to re-calibrate between parts. For the highest level of thermal stability, the AGV-HP(O) scanners can be equipped with water cooling to stabilize the operating temperature of the device under varying loads, changes in ambient temperature or beam clipping on the input aperture.

Real-Time Process Visibility

The location of the AGV-HP(O) mirrors can be captured and analyzed in real time. With direct access to the scanner positions, you won’t need to program delay parameters to compensate for lag and tracking errors in the servo system. The process can be optimized prior to marking the part, saving you time and reducing material waste. You can also control the state of the laser based on in-position and velocity criteria, further reducing programming complexity.

Advanced Programming Features

The AGV-HP(O) uses all the advanced motion and position synchronized output (PSO) capabilities that Aerotech has developed for traditional servo-based laser processing applications. Contouring functions, such as acceleration limiting, can be used to automatically reduce speeds in tight corners or small radii to minimize overshoot. The laser can be triggered based on the position feedback of the mirrors with PSO to ensure consistent spot overlap as the scanner changes speed. Aerotech’s Infinite Field of View (IFOV) function seamlessly combines servo and scanner motion to extend the marking capability of the scanner across the entire travel of the servo stages, eliminating stitching errors that can occur in a more traditional move-expose-repeat process.

Design Choices

The AGV-HP(O) family is available with 10, 14, 20 and 30 mm input apertures and can be equipped with an F-Theta or telecentric lens directly from Aerotech. Users can also acquire the focusing optic directly from a trusted supplier, with Aerotech supplying a spacer ring to ensure that back reflections through the optic do not damage the scanner mirrors. Mirror coatings for a wide range of UV, visible, IR and CO2 wavelengths are supported. Coatings optimized for ultra-fast lasers are also available.

Dimensions

AGV10HP-BE1



AGV10HP-BE2



AGV10HPO-BE1



AGV10HPO-BE2



AGV14HP-BE1



AGV14HP-BE2



AGV14HPO-BE1



AGV14HPO-BE2



AGV20HP-BE1



AGV20HP-BE2



AGV20HPO-BE1



AGV20HPO-BE2



AGV30HP-BE1



AGV30HPO-BE1



Ordering Information

AGV-HP(O) Series High-Accuracy Laser Scan Head

Option Description
AGV10HP(O) 2-axis galvanometer scanner with 10 mm diameter beam aperture and integral high-precision feedback
AGV14HP(O) 2-axis galvanometer scanner with 14 mm diameter beam aperture and integral high-precision feedback
AGV20HP(O) 2-axis galvanometer scanner with 20 mm diameter beam aperture and integral high-precision feedback
AGV30HP(O) 2-axis galvanometer scanner with 30 mm diameter beam aperture and integral high-precision feedback

Housing Type (Required)

Option Description
- Closed scanner housing (AGVxxHP)
O Open scanner housing (AGVxxHPO)
Note:
  1. -BE2 is not available with AGV30HP or AGV30HPO.

Beam Entry (Required)

Option Description
-BE1 Right-side laser beam entry (standard)
-BE2 Left-side laser beam entry

Wavelength of Mirror Coating (Required)

Option Description
-W001 10.6 µm
-W002 Durable-Silver (450 nm - 10.6 µm)
-W003 1552 nm
-W004 1064 nm
-W005 1030 nm
-W006 532 nm
-W007 515 nm
-W008 355 nm
-W009 343 nm
-W012 9.3 µm
Note:
  1. Custom coatings available. Contact factory for details.

F-Theta Lenses Available (Optional)(1, 2)

Option Description
-Lxx See Table 1: F-Theta Lenses Available

Mounting Plate (Optional)

Option Description
-MP Mounting plate
Note:
  1. -MP option is only available with closed scanner housing (AGVxxHP) models.

Air Cooling (Optional)

Option Description
-AC Air cooling

Water Cooling (Optional)

Option Description
-WC Water cooling

Performance Grade (Required)

Option Description
-PL0 Standard performance grade
-PL9 Ultra performance grade

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system
 
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
 
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Lens Mounting Adapters (to be ordered as separate line item)

Option Description
LM10HP-XXX Lens mount adapter for AGV10HP(O); standard versions support the lens configurations offered by Aerotech; custom versions available on request
LM14HP-XXX Lens mount adapter for AGV14HP(O); standard versions support the lens configurations offered by Aerotech; custom versions available on request
LM20HP-XXX Lens mount adapter for AGV20HP(O); standard versions support the lens configurations offered by Aerotech; custom versions available on request
LM30HP-XXX Lens mount adapter for AGV30HP(O); standard versions support the lens configurations offered by Aerotech; custom versions available on request

Table 1: F-Theta Lenses Available (Optional)(1, 2)

AGV10HP(O) AGV14HP(O) AGV20HP(O) AGV30HP(O)
-L1 1552-100-T
55 mm sq. FOV
- 10600-100-T
35 mm sq. FOV

35 mm sq. FOV 10600-255
100 mm sq. FOV
-L2 1552-163-T
90 mm sq. FOV
- 10600-160
75 mm sq. FOV
1064-200
65 mm sq. FOV_4
-L3 1064-100
65 mm sq. FOV(4)
1552-100-T
45 mm sq. FOV
10600-255
160 mm sq. FOV
1064-255
150 mm sq. FOV(4)
-L4 1064-255
150 mm sq. FOV(4)
1552-163-T
90 mm sq. FOV
1064-100-T
40 mm sq. FOV
1064-500
230 mm sq. FOV(4)
-L5 1064-160
105 mm sq. FOV(4)
1064-100
35 mm sq. FOV(4)
1064-163
70 mm sq. FOV(4)
-
-L6 1064-163-T
90 mm sq. FOV
1064-100-T
60 mm sq. FOV(4)
1064-163-T
70 mm sq. FOV
-
-L7 1030-100-T
40 mm sq. FOV
1064-160
80 mm sq. FOV(4)
1064-255
150 mm sq. FOV(4)
-
-L8 1030-163-T
90 mm sq. FOV
1064-163-T
85 mm sq. FOV
532-255
145 mm sq. FOV(4)
-
-L9 532-100
55 mm sq. FOV(4)
1064-170
110 mm sq. FOV(4)
- -
-L10 532-100-T
60 mm sq. FOV(4)
1030-100-T
30 mm sq. FOV
- -
-L11 532-160
105 mm sq. FOV(4)
1030-163-T
90 mm sq. FOV
- -
-L12 532-163-T
75 mm sq. FOV
532-100-T
60 mm sq. FOV(4)
- -
-L13 515-100-T
40 mm sq. FOV
532-160
105 mm sq. FOV(4)
- -
-L14 515-163-T
40 mm sq. FOV
532-163-T
75 mm sq. FOV
- -
-L15 355-53-T
15 mm sq. FOV
532-170
100 mm sq. FOV(4)
- -
-L16 355-100-T
50 mm sq. FOV
515-100-T
40 mm sq. FOV
- -
-L17 355-160
90 mm sq. FOV
515-163-T
40 mm sq. FOV
- -
-L18 355-163-T
80 mm sq. FOV
355-53-T
5 mm sq. FOV
- -
-L19 355-255
140 mm sq. FOV
355-163-T
80 mm sq. FOV
- -
-L20 - 355-255
140 mm sq. FOV
- -
-L21 - 343-53-T
5 mm sq. FOV
- -
-L22 - 343-163-T
70 mm sq. FOV
- -
-L23 - 343-255
115 mm sq. FOV
- -
Notes:
  1. Lenses specified as XXX-YYY(-T), where “XXX” represents the wavelength in nanometers, “YYY” represents the focal length in millimeters, and the presence of “-T” indicates a telecentric design.
  2. Input beam diameter is assumed to be equal to scan head entrance aperture at 1/e^2 Gaussian profile.
  3. Reported field-of-view (FOV) sizes are approximate and may be subject to minor variation as a function of the application’s laser and optical paramterers. Contact factory for details.
  4. Certain F-theta lenses are not recommended for use with short-pulse lasers (picosecond and femtosecond pulse durations). Contact factory for alternate lens options that are compatible with short-pulse lasers.
  5. Custom lenses available. Contact factory for details.

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