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Ordering Info



Path 7




Ordering Info



Design Features

  • Compact 75 mm width with travel to 100 mm
  • Precision ground ball-screw drive
  • DC servo or stepper motor
  • Anti-creep crossed-roller bearings
  • High resolution (0.1 µm), repeatability (±0.75 µm) and accuracy (±1.0 µm)
  • High-vacuum compatible
  • Optional bellows waycovers
  • Compact multi-axis configurations

High Accuracy

The precision ground ball-screw provides exceptional accuracy, repeatability and ultra-fine positioning resolution capability to 0.1 micron. The DC servomotor is equipped with a rotary encoder. The anti-creep crossed-roller linear bearings provide smooth travel and excellent payload characteristics.

Optional Vacuum Preparation

The MPS75SL is available with optional vacuum preparation to 10-6 Torr. It is the perfect compact stage choice for today's demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication and military/aerospace.

Highly Configurable

An optional breadboard mounting plate provides direct mounting to both English and metric breadboards. Bellows waycovers are available for use in dusty environments. Any of the models can be mounted in an XY configuration and, with the right-angle L-bracket, in XYZ configurations. It can also be mounted with the smaller MPS50SL stage.

The MPS75SL is a member of the MPS (Miniature Positioning Stage) family of linear, rotary and vertical lift and Z stages. Two or more stages can easily be mounted together in numerous combinations using standardized mounting patterns and adapter plates.



MPS75SL(E) Bellows Option

Mounting Plates

MPS75SL(E) HDZ Bracket

Ordering Information

MPS75SL and SLE Miniature Mechanical-Bearing Screw-Driven Linear Stage

Direct Linear Feedback (MPS75SLE Only)

Option Description
-E1 Incremental linear encoder; 1 Vpp
-E2 Incremental linear encoder; 0.05 µm digital TTL output

Travel (Optional)

Option Description
-025 25 mm travel stage
-050 50 mm travel stage
-075 75 mm travel stage
-100 100 mm travel stage

Vacuum Preparation (Optional)

Option Description
-HV High vacuum preparation to 10-6 Torr
  1. Vacuum preparation is not a standard ordering option for -SLE models with direct linear feedback. Contact Aerotech for more information.

Motor (Required)

Option Description
-M1 DC servomotor
-M2 Stepper Motor

Bellows (Optional)

Option Description
-BL Bellows waycover
  1. Bellows waycover not available with -HV vacuum preparation.

Mounting Plate (Optional)

Option Description
-MP Optical table mounting plate

Metrology (Required)

Option Description
-PL0 No metrology performance plots
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Accessories (to be ordered as separate line item)

Option Description
HDZ-MPS75SL Right angle bracket, MPS75SL
HDZ-MPS75SL-HV Right angle bracket, MPS75SL, high vacuum preparation to 10-6 Torr

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