PlanarDL XY Stage

Overview

Aerotech’s PlanarDL-series stages offer excellent geometric and dynamic performance in a compact, low-profile package. Straightness is ±0.4 µm, flatness is ±1 µm and accuracy is ±0.4 µm. A variety of travel and performance options make this stage ideal for applications ranging from surface profilometry to LED wafer scribing.