PlanarDLA Open Frame, XY, Direct-Drive, Mechanical-Bearing Stage

Overview

Aerotech’s PlanarDLA-series stages offer a clear aperture, high dynamics, and exceptional geometric performance in a compact, low-profile package. These stages are essential for applications ranging from two-sided LED wafer processing where high-dynamics and micrometer-level straightness are required, to quasi-static optical metrology where high-accuracy and precise geometric performance are necessary. Regardless of the application, the PlanarDLA is designed to meet a variety of application needs with an array of configurable options.