Compact stage with travels to 100 mm
Precision-ground ball-screw drive
DC servo or stepper motor
High resolution (0.025 µm), repeatability (±0.1 µm) and accuracy (±0.75 µm)
A compact, high-performance linear positioning stage, Aerotech’s MPS75SLE features exceptionally smooth travel combined with outstanding accuracy, repeatability and positioning resolution capability to 25 nm. Ideal applications include optics positioning, z-axis positioning of sensors in surface metrology, and in general purpose high-precision alignment. Quick and straightforward multi-axis configurations are made easily with other MPS linear and rotary stages using the adapter brackets and mounting compatibility inherent in the entire MPS stage family.
Precision Design for Precision Results
The precision ground, preloaded ball-screw coupled with a low thermal expansion linear encoder provides outstanding accuracy, repeatability and a positioning resolution capability to 25 nm. Anti-creep, crossed-roller bearings provide exceptionally smooth travel and high-load capacity in a compact package. The low thermal expansion (3.3 ppm/˚C) precision glass scale encoder results in high-accuracy and repeatable positioning over long periods of time. The linear encoder is available with amplified sine (1 Vpp) or 50 nm TTL digital outputs for easy integration with all standard controllers.
Highly Configurable for Flexibility
MPS75SLE motor options include a DC servomotor with a high-resolution rotary encoder or a stepper motor. Just like the MPS75SL, the SLE is available with and without optional bellows waycovers. An optional mounting plate provides direct mounting to both English and metric optical breadboards, while the inherent mounting compatibility between all MPS stages results in simple development of multi-axis arrangements.