Vacuum
Key Industry Expertise
- Material Selection
- Surface Preparation
- Elimination of Virtual Leaks
- Lubricant Selection
- Cleaning
- Bakeout
- Handling
- Thermal Management
- Magnetic Field Control

The Aerotech Vacuum Advantage
Navigation
Page 1 — The Aerotech Vacuum Advantage
Page 2 — System-Level Competencies
Page 3 — Magnetic Field Management
Page 4 — Vacuum Stage Examples
- EUV Lithography
- Scanning Electron Microscopy (SEM)
- Ion-Beam Profiling
- Deposition
- Satellite Component Testing
- Transmission Electron Microscopy (TEM)
- Ion Implantation
- Optics Polishing
- Scientific Research
- X-Ray Tomography

Custom Systems:
ALS20000/ADRS‑150/ADRS‑150
Aerotech: The Partner of Choice for Vacuum Motion Platforms
Vacuum Engineering Expertise
Our extensive testing capabilities provide full qualification of motion systems prior to shipment. Aerotech is a highly-integrated motion system supplier — we are able to fully optimize the complete motion system. For high-dynamic systems, Aerotech has several active cooling options that are based on thermal modeling and practical experience.
For applications that are sensitive to magnetic fields, Aerotech has extensive experience with methods for magnetic

- Precision Machine Design
- Vibration and Controls
- Magnetic Circuit Design
- Power Electronics Design
- Servo Systems
- Software Development
Facilities for Vacuum Manufacturing

Aerotech's expansive ISO Class 6 cleanroom
Vacuum Staging Design Elements
A wide variety of standard Aerotech stage products are available in vacuum-prepared versions. In addition to standard platforms, Aerotech routinely manufactures custom systems designed to meet application specific needs. All of Aerotech’s vacuum-compatible motion platforms minimize pumpdown time, chamber contamination, and thermal issues. In addition, these systems can incorporate key application considerations like reduction of magnetic fields.

High vacuum, AGR-50 rotary stage with unlimited travel
Aerotech is well versed in:
- Material Selection
- Surface Preparation
- Elimination of Virtual Leaks
- Lubricant Selection
- Cleaning
- Bakeout
- Handling
- Thermal Management
- Magnetic Field Control
- Packaging
Vacuum Options Available from Aerotech
Level | Torr | mBar | kPa |
---|---|---|---|
Low Vacuum (VAC3) | 1.0 x 10-3 | 1.3 x 10-3 | 1.3 x 10-4 |
High Vacuum (VAC6) | 1.0 x 10-6 | 1.3 x 10-6 | 1.3 x 10-7 |
Ultra-High Vacuum (UHV) | ≤1.0 x 10-7 | ≤1.3 x 10-7 | ≤1.3 x 10-8 |
Material Selection
Because acceptable materials vary according to vacuum level, application, operating temperature, etc., Aerotech offers a broad array of options that control Total Mass Loss (TML) and Collectible Volatile Condensable Materials (CVCM).
• Cable Management System (CMS): CMS construction and materials typically utilize Teflon® insulated wires (MIL-C-27500) or Kapton along with specialized electrical connectors that utilize a variety of materials including PEEK™. A multitude of connectorization options are available.
• Surface Finish: Surface finish options include bare aluminum, electroless nickel, stainless steel, or vacuum-compatible paint (Aeroglaze Z306).

• Hardware: Systems use through-holes or vented stainless-steel fasteners for all blind holes.
Aerotech always works closely with our customers to ensure the system meets or exceeds outgassing requirements.
Design Elements

Custom high-vacuum, 1 m travel, linear actuator
Thermal Management
Thermal management is key in vacuum systems because they cannot rely on convection for the removal of heat from the motors and bearings. Without thermal management methods, stage performance suffers and life can be reduced from that of an equivalent system operated in atmosphere. This is why Aerotech has put forth a considerable effort in the development of thermal isolation methods and passive and active cooling techniques. These techniques help to maximize conduction and radiative modes of cooling and help reduce or eliminate the effects of heat sources inside the chamber.
Servomotors
The design of linear and rotary servomotors is critical to vacuum system operation because they are the primary heat source. This is why Aerotech designs and builds motors to specifically address the issues associated with motors in vacuum. From special materials of construction to magnetic circuit design, Aerotech servomotors are optimized for minimal outgassing, high force/torque per unit volume, and long life.

UHV Nema 23 (BMS60) rotary motor
