Extensive Motor Options
Aerotech’s complete line of vacuum stages incorporate drive technologies that span piezos, rotary stepper, rotary servo, linear, and curvilinear motors. Our direct-drive solutions extend machine dynamic performance while at the same time minimizing contamination due to their noncontact design. Special motor designs and shielding are available to attenuate stray magnetic fields in sensitive applications.
Tuning and Troubleshooting
Aerotech controllers provide extensive diagnostics to allow tuning and troubleshooting the motion system without opening the vacuum chamber. Data acquisition includes position, velocity, current, and frequency response plots, as well as the ability to do FFT.
Feedforward Interface with Isolation Systems
Options are available to allow direct communication of motion commands between the Aerotech controller and an active isolation system. Isolation feedforward dramatically reduces stage-induced vacuum chamber motion, thereby increasing system throughput.
Direct Laser Interferometer Input
Aerotech motion controllers can directly accept laser encoder feedback for direct work-point positioning. As a custom manufacturer, Aerotech can interface with VME-style laser interferometer feedback systems.
Aerotech Control Solutions
Aerotech has two motion control platforms to choose from that provide optimum performance for your vacuum system. The Automation 3200 multi-axis machine controller is software-based (no PC slots required) and marries a robust,
Aerotech Advanced Controls
Dramatically improve your vacuum system's motion performance with Aerotech’s Dynamic Controls Toolbox (DCT). The DCT provides control algorithms that increase system performance such as settle time, accuracy, in-position stability, and/or velocity stability. These include Harmonic Cancellation, Threshold, Dynamic Gain Scheduling, Command Shaping, and Cross-Axis Feedforward. Aerotech controllers also provide a direct feedforward interface to chamber active isolation systems.