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PlanarDL XY Stage

Aerotech’s PlanarDL is an integrated, low-profile, XY motor stage with superior planar performance. With straightness performance to +/- 0.4 microns and flatness to +/- 1 micron, images taken of profiled surfaces show amazing detail of critical texture and features. Capable of 1 m/s speeds and greater than 1.5 g accelerations.