Split-Axis Overhead Processing Subsystem


Design Features

  • Suspended planar processing system allows for overhead and underneath positioning of customer equipment
  • High accuracy air-bearing axes below the processing plane
  • Dynamic linear motor gantry above the plane
  • Unique granite base design that allows for all motion axes to be precisely aligned to the working area
  • Air isolation system reduces externally caused vibration noises
  • Uses a powerful Aerotech motion controller to coordinate the many axes and process tools
  • Applications include part manipulation, alignment, advanced manufacturing, and inspection