HexGen HEX300-230HL Hexapod Six-DOF Positioning System

Description

Design Features

  • Six degree-of-freedom positioning with linear travels to 60 mm and angular travels to 30°
  • Precision design with guaranteed positioning accuracy specifications
  • Minimum incremental motion to 20 nm in XYZ and 0.2 μrad in θxθyθz
  • Flexible configurations and customization
  • Vacuum preparation available upon request
  • Powerful controls and software with visualization of work and tool coordinate systems

Aerotech’s HexGen® hexapods represent the next-generation in six degree-of-freedom (DOF) positioning performance. The HEX300-230HL is the premier medium-load, ultra-precision hexapod for many applications ranging from sensor testing to synchrotron sample manipulation.

Performance Unique to the Market

Many trade-offs exist in the design and specification of a motion system. With its high speeds and sub-micrometer precision, the HEX300-230HL eliminates compromises on application specifications. Aerotech’s HexGen hexapods are the only hexapods on the market today that provide guaranteed positioning accuracy specifications below 5 μm.

Superior Structural Design

The HEX300-230HL is actuated with six high-accuracy struts built with precision preloaded bearings, ball screws, and drive components. Unlike competitive hexapods driven by DC brushed servomotors, the HEX300-230HL is driven by Aerotech’s AC brushless, slotless servomotors that maximize device lifetime and performance. Directly coupling the AC brushless servomotors to the ball screw enables increased drive stiffness, higher positioning accuracy, and better minimum incremental motion (20 nm in XYZ and 0.2 μrad for θxθyθz) when compared to competitive designs using belts, gearheads, or compliant couplings. Specially engineered strut pivot-joints provide low friction and high stiffness enhancing the overall hexapod performance.

Design Flexibility

The HEX300-230HL’s design optimizes flexibility and customization options for the user. The platform and base can be easily modified with user-specific features or mounting patterns. The HEX300-230HL features a 100 mm diameter clear aperture in the platform while a 60 mm diameter clear aperture in the base allows workpiece access from the bottom. The base mounting holes adapt directly to English or metric optical tables.

Vacuum Options Available

Aerotech hexapods can be vacuum prepared for demanding applications such as synchrotron sample or optics manipulation, semiconductor manufacturing and inspection, or satellite sensor testing.

Powerful Controls and Software

Driving the HEX300-230HL is Aerotech’s award-winning A3200 motion control software. Built on years of experience with difficult kinematics applications, the A3200 controller allows easy programming and control of the hexapod in any user-defined coordinate system.

Aerotech’s HexSim™ software gives users the ability to easily visualize and simulate the available workspace. Tight integration between HexSim™ and the A3200 motion controller provides real-time motion visualization in any user-defined coordinate system. An intuitive graphical interface permits selection of the active coordinate system for easy virtual pivot-point programming and motion.

Specifications

HEX300-230HL Specifications

Mechanical Specifications

HEX300-230HL

Axis X Y Z A (θx) B (θy) C (θz)
Travel(1) 55 mm 60 mm 25 mm 15 deg 15 deg 30 deg
Axis Positioning Accuracy(2,3) Over Full Travel Standard ±4 μm ±4 μm ±3 μm ±50 μrad
(±10.3 arc-sec)
±50 μrad
(±10.3 arc-sec)
±25 μrad
(±5.2 arc-sec)
ULTRA ±1 μm ±1 μm ±0.75 μm ±10 μrad
(±2.1 arc-sec)
±10 μrad
(±2.1 arc-sec)
±5 μrad
(±1.0 arc-sec)
Over any 10 mm (X, Y, Z) or 3 deg (A, B, C) Standard ±1.25 μm ±1.25 μm ±1.25 μm ±12.5 μrad
(±2.6 arc-sec)
±12.5 μrad
(±2.6 arc-sec)
±7.5 μrad
(±1.5 arc-sec)
ULTRA ±0.75 μm ±0.75 μm ±0.5 μm ±5 μrad
(±1.0 arc-sec)
±5 μrad
(±1.0 arc-sec)
±2.5 μrad
(±0.5 arc-sec)
Resolution (Minimum Incremental Motion) 20 nm 20 nm 20 nm 0.2 μrad
(0.04 arc sec)
0.2 μrad
(0.04 arc sec)
0.2 μrad
(0.04 arc sec)
Bidirectional Repeatability, pk-pk(3) ±0.75 μm ±0.75 μm ±0.35 μm ±2 μrad
(±0.4 arc sec)
±2 μrad
(±0.4 arc sec)
±2 μrad
(±0.4 arc sec)
Unidirectional Repeatability, pk-pk ±0.35 μm ±0.35 μm ±0.15 μm ±1 μrad
(±0.2 arc sec)
±1 μrad
(±0.2 arc sec)
±1 μrad
(±0.2 arc sec)
Maximum Speed(4) 50 mm/s 50 mm/s 25 mm/s 15 deg/s 15 deg/s 30 deg/s
Load Capacity, All Positions(5) Vertical 45 kg (Push); 40 kg (Pull)
Horizontal 21 kg
Holding Capacity, De-Energized(6) 14 kg
Stage Mass 12.0 kg
Material Anodized Aluminum Platform and Base; Steel Used in Joints and Inside Struts

Note:

  1. Travels are mutually-exclusive. Consult our HexGen Hexapod Sizer for detailed workspace sizing.
  2. Measured with single-axis moves at a height of 50 mm above the moving platform. Results can be payload and workpoint dependent.
  3. X, Y, Z performance certified as standard. X, Y, Z, A, B, C performance certified with ULTRA.
  4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
  5. Centered loading – consult load curves.
  6. Horizontal base plate, centered loading – consult load curves.

Electrical Specifications

Drive System Precision Ball Screw, Brushless Servomotor
Feedback Noncontact Encoder – Incremental and Absolute Options
Maximum Bus Voltage 80 VDC
Limit Switches 5 V, Normally-Closed (Located on Each Strut)

Recommended Controller

Multi-Axis Standard HEX RC
Optional Npaq/Ndrive CP/ Ndrive HLe
  • Plots

Dimensions

  • HexGen HEX300-230HL

Ordering Information

HexGen HEX300-230HL

Feedback (Required)

OptionDescription
-E1 Incremental encoders
-E2 Absolute encoders

Performance Grade (Optional)

OptionDescription
-PL3 Base performance
-PL4 Ultra high-accuracy performance, ULTRA

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system