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Ordering Info



Path 7




Ordering Info



Design Features

  • Enhanced second-generation design
  • Achieves minimum incremental motion to 1 nm - NEW
  • Delivers nanometer-level positioning performance over travel lengths up to 160 mm
  • Provides ultra-low profile with dual side-mounted counterbalances capable of offsetting up to 14 kg payload for ultra-precise performance in the vertical direction
  • Features high-precision crossed-roller bearings for excellent dynamic performance & ample load capacity
  • Maximizes process throughput & reliability with ironless direct-drive linear motor
  • Integrates easily into multi-axis motion systems
  • Available with high-resolution incremental or absolute encoders - NEW

Key Applications

ANT130LZS stages are ideal for high-precision and high-dynamic vertical positioning applications with minimal footprint requirements, including:

  • Photonics assembly & inspection
  • Fiber alignment & optimization
  • Optics manufacturing, testing & inspection
  • Sensor testing & qualification
  • Semiconductor processing & inspection
  • Research & laboratory applications

Industry-Leading Motion Performance

Outstanding accuracy, position repeatability and in-position stability require extremely fine system resolution. Now available with an improved high-performance encoder option, ANT130LZS can easily achieve minimum incremental steps of 1 nm. Our direct-drive technology exhibits no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion. Plus, the minimally-influencing counterbalance design opposes the gravitational forces induced by your payload, resulting in industry-leading performance and optimum thermal stability.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT130LZS stages use our advanced direct-drive technology to achieve the highest level of positioning performance. Coupled with anti-creep, crossed-roller bearings, ANT130LZS delivers ultra-smooth, consistent motion with outstanding dynamic characteristics to enhance your process capability. The optimized drive and bearing combination, packaged in a low-profile form factor, offers distinct performance advantages in many applications such as high-precision positioning, fiber alignment, optics manufacturing and inspection, sensor testing and scanning processes that demand smooth and precise motion.

Flexible System Design

The ANT130LZS family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be easily combined for flexible system designs and multi-axis configurations. ANT130LZS stages are easily combined with other products -- including ANT130L, ANT130XY, ANT130R, ANT20G, AGS gantries and more -- to provide complex, multiple degree-of-freedom motion and positioning solutions.



ANT130LZS Mounting Plate

Ordering Information

ANT130LZS Low-Profile Z Nanopositioning Stage

Travel (Required)

Option Description
-035 35 mm travel
-060 60 mm travel
-110 110 mm travel
-160 160 mm travel

Feedback (Required)

Option Description
-E1 Incremental linear encoder, 1 Vpp amplified sine output
-E2 Incremental linear encoder, digital RS422 output, 5 nm electrical resolution
-E3 Absolute + Incremental 1 Vpp linear dual-track encoder
-E4 Incremental linear encoder, 1 Vpp amplified sine output, high-performance

Connectors (Required)

Option Description
-CN1 Single 25-pin D connector, 25DU
-CN2 Two connector, 4-pin HPO and 25-pin D, 4DU-25DU
  1. The -CN1 option is limited to a maximum bus voltage of 80 V. The -CN2 option is required for higher bus voltages.

Mounting Plate (Optional)

Option Description
-MP Mounting plate

Performance Grade (Required)

Option Description
-PL1 Base performance
-PL2 High-accuracy performance, PLUS

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system

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