MPS130LM Single-Axis Miniature Linear Motor Stage

Description

Design Features

• Constructed with an ironless linear motor & crossed-roller bearings for smooth, precise motion
• Drop-in compatibility with Aerotech ANT130L nanopositioners offers seamless scalability for OEMs & machine builders
• Guaranteed performance specifications, including repeatability down to  ± 0.2 µm
• Exceptional price-to-performance ratio contributes to low total cost of ownership
• Integrates easily into multi-axis assemblies & motion systems

Key Applications

MPS-LM stages are ideal for cost-sensitive applications that require high precision, including:

• Photonics assembly & inspection
• Fiber alignment & optimization
• Wafer probing
• Optics manufacturing, testing & inspection
• Sensor testing & qualification
• Semiconductor processing & inspection
• Research & laboratory applications

Noncontact Direct-Drive Technology

Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. MPS-LM stages use our advanced direct-drive technology to achieve superior positioning performance. An ironless linear motor eliminates motor cogging effects that would otherwise cause position errors and disturbances. Coupled with anti-creep, crossed-roller bearings, MPS-LM delivers smooth, consistent motion with outstanding dynamic characteristics to enhance your process capability at an attractive price point. The optimized drive and bearing combination, packaged in a compact form factor, offers distinct performance advantages in many applications such as high-precision positioning, fiber alignment, optics manufacturing and inspection, sensor testing and scanning processes that demand smooth and precise motion.

Flexible System Design

MPS-LM stages feature convenient mounting patterns in the base and tabletop to allow for easy system integration.  Multiple stages can be assembled together for flexible system designs and application-specific, multi-axis configuration.  Because MPS-LM stages are form-factor, drop-in compatible with our industry-leading family of ANT nanopositioners, you can effortlessly combine MPS-LM and ANT stages into multi-axis systems to achieve a balance of nanometer-level performance and cost effectiveness.

Advanced Control Architecture

MPS-LM stages are best paired with Aerotech’s Automation1 Software-Based Machine Controller (iSMC). The Automation1-iSMC is a part of the Automation1 high-performance motion control platform which also includes the Automation1 Motion Development Kit (MDK).  Automation1 drives are networked to the controller over the HyperWire® fiber optic communication bus. This ultra-fast bus and premium servo motor drive hardware enable extreme levels of optimization across several axes of motion.  Advanced trajectory generation capabilities such as multi-block lookahead minimize geometric errors in tight profiles by transparently regulating the motion profile. Advanced features such as  Position Synchronized Output (PSO) improve process throughput and quality by triggering your process tool based on distance traveled—not time—to avoid errors stemming from acceleration and velocity changes.

Lowest Total Cost of Ownership

MPS-LM stages are an excellent choice when a faster return on investment is a priority. They combine a budget-friendly acquisition cost with the high precision and reliability for which Aerotech products are well known. Long-term value is assured by using reliable, high-quality core components and design elements—engineered to minimize maintenance and maximize uptime. Plus, MPS-LM stages are perfectly paired with our Automation1 controller and cost-effective servo drives such as the iXA4, offering a comprehensive one-stop shop with minimal risk.