MPS95LZS Low-Profile Z Linear Motor Stages
MPS-LZS stages define a new benchmark for high-quality vertical motion that breaks the traditional tradeoff between precision and price. For demanding applications that require a careful balance of performance and cost, you no longer have to compromise on core technology. MPS95LZS stages feature anti-creep, crossed-roller bearings; ironless linear motors with exceptionally high force density; and an adjustable pneumatic counterbalance to offset up to 4 kg payload – so you get smooth, precise motion. Plus, MPS-LZS stages are form-factor compatible with our industry-leading ANT-LZS vertical nanopositioning stages, giving OEMs an easy and efficient means to scale.
- Description
- Specifications
- Dimensions
- Ordering Info
- Downloads
Design Features
- Constructed with an ironless linear motor & crossed-roller bearings for smooth, precise motion
- Includes integrated, user-adjustable counterbalance to offset up to 4 kg payload for precise performance in the vertical direction
- Drop-in compatibility with Aerotech ANT95LZS nanopositioners offers seamless scalability for OEMs & machine builders
- Guaranteed performance specifications, including repeatability down to ± 0.2 µm
- Exceptional price-to-performance ratio contributes to low total cost of ownership
- Integrates easily into multi-axis assemblies & motion systems
Key Applications
MPS-LZS stages are ideal for cost-sensitive applications that require high precision, including:
- Photonics assembly & inspection
- Fiber alignment & optimization
- Wafer probing
- Optics manufacturing, testing & inspection
- Sensor testing & qualification
- Semiconductor processing & inspection
- Research & laboratory applications
Noncontact Direct-Drive Technology
Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. Compared to traditional screw-driven vertical and lift stages, MPS-LZS stages can move and accelerate faster and more precisely. This is because MPS-LZS stages use an ironless linear motor that eliminates cogging effects that would otherwise cause position errors and disturbances. Coupled with anti-creep, crossed-roller bearings, MPS-LZS delivers smooth, consistent vertical motion with outstanding dynamic characteristics to enhance your process capability at an attractive price point. The optimized drive and bearing combination, packaged in a compact form factor, offers distinct performance advantages in many applications such as high-precision positioning, fiber alignment, optics manufacturing and inspection, sensor testing and scanning processes that demand smooth and precise motion.
Flexible System Design
MPS-LZS stages feature convenient mounting patterns in the base and tabletop to allow for easy system integration. Multiple stages can be assembled together for flexible system designs and application-specific, multi-axis configuration. Because MPS-LZS stages are form-factor, drop-in compatible with our industry-leading family of ANT nanopositioners, you can effortlessly combine MPS-LM and ANT stages into multi-axis systems to achieve a balance of extreme performance and cost effectiveness.
Integrated Counterbalance
MPS-LZS stages are equipped with a minimally influencing pneumatic counterbalance to offset the gravitational forces from the carriage and payload. It includes a precision regulator for the exact dialing-in of the counterbalancing force. Unlike spring or magnetic counterbalance designs, the pneumatic counterbalance can be easily adjusted to exactly offset your payload’s weight—no ballast or counterweights needed. The counterbalance is installed standard on the left side of the stage; however, you can easily reconfigure it for right-side operation.
Advanced Control Architecture
MPS-LZS stages are best paired with Aerotech’s Automation1 Software-Based Machine Controller (iSMC). The Automation1-iSMC is a part of the Automation1 high-performance motion control platform, which also includes the Automation1 Motion Development Kit (MDK). Automation1 drives are networked to the controller over the HyperWire® fiber optic communication bus. This ultra-fast bus and premium servo motor drive hardware enable extreme levels of optimization across several axes of motion. Advanced trajectory generation capabilities such as multi-block lookahead minimize geometric errors in tight profiles by transparently regulating the motion profile. Advanced features such as Position Synchronized Output (PSO) improve process throughput and quality by triggering your process tool based on distance traveled—not time—to avoid errors stemming from acceleration and velocity changes.
Lowest Total Cost of Ownership
When your priority is a faster return on investment, MPS-LZS stages are an excellent choice. They combine a budget-friendly acquisition cost with the high precision and reliability you expect from Aerotech. We use reliable, high-quality core components and design elements — all engineered to minimize maintenance and maximize uptime – to ensure long-term value. Plus, MPS-LZS stages are perfectly paired with our Automation1 controller and cost-effective servo drives such as the iXA4, offering a comprehensive one-stop shop with minimal risk.
MPS95LZS Specifications
| MPS95LZS-025 | MPS95LZS-050 | |
|---|---|---|
| Travel | 25 mm | 50 mm |
| Accuracy-Standard(1) | ± 4 µm | ± 6 µm |
| Accuracy-Calibrated(1) | ± 0.6 µm | |
| Repeatability (Bidirectional)(1) | ± 0.2 µm | |
| Resolution (Minimum Incremental Motion) | 2 nm (with -E1 encoder option) | |
| In-Position Stability(2) | < 2 nm (with -E1 encoder option) | |
| Straightness | ± 3 µm | |
| Flatness | ± 3 µm | |
| Pitch | 20 arc sec | 25 arc sec |
| Roll | 18 arc sec | 20 arc sec |
| Yaw | 18 arc sec | 20 arc sec |
| Maximum Speed(3) | 200 mm/s | |
| Maximum Acceleration (No Load)(3) | 1 g | |
| Load Capacity-Vertical(4) | 4 kg | |
| Moving Mass | 0.46 kg | 0.68 kg |
| Stage Mass | 1.02 kg | 1.47 kg |
- Certified with each stage using an Aerotech controller (excluding -PL0 metrology option).
- In-position stability is reported as 3-sigma value. Specification value depends on the selected encoder option.
- Requires the selection of an appropriate amplifier with sufficient voltage and current.
- Payload specifications assume payload is centered on-axis and air supply pressure to the pneumatic counterbalance is 80 psig.
- Specifications are reported for a single axis measured 25 mm above the tabletop. Performance of multi-axis systems depends on the payload and workpoint. Consult factory for multi-axis or non-standard applications.
- To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C per 24 hours. Consult factory for more information.
- Air supply for pneumatic counterbalance must be clean, dry to 0°F dewpoint, and filtered to 0.25 µm or better. Aerotech recommends using nitrogen at 99.9% purity. Supply pressure is determined by the amount of payload carried by the stage.
MPS95LZS Electrical Specifications
| MPS95LZS-025 | MPS95LZS-050 | |
|---|---|---|
| Drive System | Brushless Linear Servomotor | |
| Feedback | Noncontact Linear Encoder 1 Vpp with 20 µm signal period (-E1) Digital RS422 (-E2) | |
| Maximum Bus Voltage | 100 VDC | |
| Limit Switches | 5 V, Normally Closed | |
| Home Switch | Near Center | |
Travel (Required)
| Option | Description |
|---|---|
| -025 | 25 mm travel |
| -050 | 50 mm travel |
Feedback (Required)
| Option | Description |
|---|---|
| -E1 | Incremental linear encoder, 1 Vpp amplified sine output |
| -E2 | Incremental linear encoder, digital RS422 output, 5 nm electrical resolution |
Mounting Plate (Optional)
| Option | Description |
|---|---|
| -MP | Mounting Plate |
Metrology (Required)
| Option | Description |
|---|---|
| -PL0 | No metrology performance plots |
| -PL1 | Metrology, uncalibrated with performance plots |
| -PL2 | Metrology, calibrated (HALAR) with performance plots |
Integration (Required)
| Option | Description |
|---|---|
| -TAS | Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. |
| -TAC | Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. |
Related Products
Automation1 MDK Motion Development Kit
Automation1 iSMC Intelligent, Software-Based Motion Controller
Automation1 iXA4 1- 2- or 4-Axis PWM Servo Drive with Motion Controller
ANT95LZS Low-Profile Z Nanopositioning Stages
MPS130LZS Low-Profile Z Linear Motor Stages
MPS95LM Single-Axis Miniature Linear Motor Stage
MPS75SL and SLE Miniature Mechanical-Bearing Screw-Driven Linear Stage
