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Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Path 7

Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Design Features

  • Travels from 100 μm to 300 μm
  • High stiffness and dynamics resulting in outstanding step-and-settle and scanning performance
  • High precision, frictionless flexure guidance
  • Long device lifetime
  • Superior positioning resolution and linearity with direct-metrology capacitive sensor option
  • Mounting flexibility with a variety of threaded adapters or mounting holes for custom mounting arrangements
  • Clear aperture to 29 mm diameter

The QF46 is designed with next-generation optical instruments and laser machines in mind. For example, the QF46Z can perform better than competitive offerings with larger and heavier higher numerical aperture (NA) objectives due to its higher inherent stiffness. The QF46Z is perfect for any demanding optical application requiring high precision and throughput with long travels.

Precision Mechanical Structure

The QFOCUS QF46Z piezo stages are guided by precision flexures that are optimized using finite element analysis to ensure high-stiffness and long device life. The resulting design offers outstanding stiffness and resonant frequency enabling high process throughput and fast closed-loop response.

In addition, the QF46Z has been designed to provide excellent geometric performance (straightness and angular errors) for critical microscopy and optics positioning applications.

High-Resolution and Positioning Accuracy

The QF46Z piezo stages have the option of closed-loop feedback (-C) using a unique capacitive sensor design that results in sub-nanometer resolution and high linearity. The capacitive sensors measure the output of the positioning carriage directly enabling superior accuracy and repeatability.

Ultra-Precision Control

When coupled with Aerotech’s Q-series controllers and drives, the QF46Z demonstrates sub-nanometer positioning resolution, in-position stability (jitter), and high-positioning bandwidth. Software options such as Aerotech’s Dynamic Controls Toolbox and Motion Designer packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times. OEM drive options are also available.

Flexibility

The QFOCUS QF46Z is available with threaded adapters to fit most microscopes and objectives. The microscope turret mounting allows easy and fast positioning of the QF46Z at the desired orientation. In addition, tapped holes on the stage body provide alternative mounting for custom interfaces in machines or other optical instruments. The QF46Z is available with a clear aperture up to 29 mm. Custom stage designs, travels, and threaded adapters are available.

Dimensions

QFOCUS QF46Z



Ordering Information

Travel (Required)

Option Description
-100100 µm closed-loop travel, 120 µm open-loop travel
-250 250 µm closed-loop travel, 300 µm open-loop travel

Feedback (Optional)

Option Description
-C Capacitance sensor feedback

Microscope Adapter (Optional)

Option Description
-MA1 W0.8 x 1/36” microscope adapter
-MA2 M19 x 0.75 microscope adapter
-MA3M25 x 0.75 microscope adapter
-MA4M26 x 0.75 microscope adapter
-MA5 M27 x 0.75 microscope adapter
-MA6 M28 x 0.75 microscope adapter
-MA7M32 x 0.75 microscope adapter
-MA8 M26 x 1/36” microscope adapter

Objective Adapter (Optional)

Option Description
-OA1 W0.8 x 1/36” objective adapter
-OA2 M19 x 0.75 objective adapter
-OA3 M25 x 0.75 objective adapter
-OA4M26 x 0.75 objective adapter
-OA5 M27 x 0.75 objective adapter
-OA6 M28 x 0.75 objective adapter
-OA7 M32 x 0.75 objective adapter
-OA8 M26 x 1/36” objective adapter

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TASIntegration - Test as system

Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TACIntegration - Test as components

Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

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