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Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Path 7

Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Design Features

  • 400 μm closed-loop travel; 450 μm open-loop travel
  • Outstanding step-and-settle and scanning performance
  • Designed for use with larger, high-NA objectives
  • Superior positioning resolution and linearity
  • Mounting flexibility
  • 29 mm diameter clear aperture

The QF-50 is designed to accommodate newer optical instruments and next-generation laser micromachining applications. Due to a high-stiffness mechanical design, the QF-50 can outperform competitive piezo scanner offerings with larger, higher numerical aperture (NA) objectives. The QF-50 is ideal for demanding optical positioning applications requiring high precision and throughput coupled with long travels.

Precision Design

The QFOCUS QF-50 piezo stage is guided by precision flexures that are optimized using finite element analysis. The resulting design offers outstanding stiffness and resonant frequency enabling high process throughput and fast closed-loop response.

In addition to designing for high-dynamics, meticulous care was taken in the QF-50 flexure bearing design allowing for unrivaled geometric performance with straightness errors to 40 nm throughout the entire travel range.

Direct Metrology Feedback

The QF-50 piezo stages have the option of closed-loop feedback (-C) using a unique capacitive sensor design that allows for sub-nanometer resolution and high linearity. Unlike foil strain gages or piezoresistive sensors, capacitive sensors provide a direct measurement of the positioning carriage enabling superior accuracy and repeatability.

Flexible and Precise Control

When coupled with Aerotech’s Q-series controllers and drives, the QF-50 demonstrates sub-nanometer positioning resolution and in-position stability (jitter) while maintaining high-positioning bandwidth. A host of software options (Dynamic Controls Toolbox and Motion Designer) provide many advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times. OEM drive options are also available.

Mounting Flexibility

The QFOCUS QF-50 is available with threaded adapters to fit most microscopes and objectives. The microscope turret mounting allows fast and simple positioning of the QF-50 at any desired orientation. In addition, tapped holes on the stage body provide alternative mounting for custom interfaces in machines or other optical instruments. The QF-50 is available with a clear aperture of 29 mm as standard. Custom stage designs, travels, and threaded adapters are available.

Dimensions

QFOCUS QF50Z



Ordering Information

Travel (Required)

Option Description
-400400 µm closed-loop travel, 460 µm open-loop travel

Feedback (Optional)

Option Description
-CCapacitance sensor feedback

Microscope Adapter (Optional)

Option Description
-MA1 W0.8 x 1/36" microscope adapter
-MA2 M19 x 0.75 microscope adapter
-MA3M25 x 0.75 microscope adapter
-MA4M26 x 0.75 microscope adapter
-MA5 M27 x 0.75 microscope adapter
-MA6 M28 x 0.75 microscope adapter
-MA7M32 x 0.75 microscope adapter
-MA8 M26 x 1/36" microscope adapter

Objective Adapter (Optional)

Option Description
-OA1W0.8 x 1/36" objective adapter
-OA2M19 x 0.75 objective adapter
-OA3M25 x 0.75 objective adapter
-OA4M26 x 0.75 objective adapter
-OA5M27 x 0.75 objective adapter
-OA6M28 x 0.75 objective adapter
-OA7M32 x 0.75 objective adapter
-OA8 M26 x 1/36" objective adapter

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system

Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components

Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

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