Description

Design Features

• 400 μm closed-loop travel; 450 μm open-loop travel
• Outstanding step-and-settle and scanning performance
• Designed for use with larger, high-NA objectives
• Superior positioning resolution and linearity
• Mounting flexibility
• 29 mm diameter clear aperture

The QF-50 is designed to accommodate newer optical instruments and next-generation laser micromachining applications. Due to a high-stiffness mechanical design, the QF-50 can outperform competitive piezo scanner offerings with larger, higher numerical aperture (NA) objectives. The QF-50 is ideal for demanding optical positioning applications requiring high precision and throughput coupled with long travels.

Precision Design

The QFOCUS QF-50 piezo stage is guided by precision flexures that are optimized using finite element analysis. The resulting design offers outstanding stiffness and resonant frequency enabling high process throughput and fast closed-loop response.

In addition to designing for high-dynamics, meticulous care was taken in the QF-50 flexure bearing design allowing for unrivaled geometric performance with straightness errors to 40 nm throughout the entire travel range.

Direct Metrology Feedback

The QF-50 piezo stages have the option of closed-loop feedback (-C) using a unique capacitive sensor design that allows for sub-nanometer resolution and high linearity. Unlike foil strain gages or piezoresistive sensors, capacitive sensors provide a direct measurement of the positioning carriage enabling superior accuracy and repeatability.

Flexible and Precise Control

When coupled with Aerotech’s Q-series controllers and drives, the QF-50 demonstrates sub-nanometer positioning resolution and in-position stability (jitter) while maintaining high-positioning bandwidth. A host of software options (Dynamic Controls Toolbox and Motion Designer) provide many advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times. OEM drive options are also available.

Mounting Flexibility

The QFOCUS QF-50 is available with threaded adapters to fit most microscopes and objectives. The microscope turret mounting allows fast and simple positioning of the QF-50 at any desired orientation. In addition, tapped holes on the stage body provide alternative mounting for custom interfaces in machines or other optical instruments. The QF-50 is available with a clear aperture of 29 mm as standard. Custom stage designs, travels, and threaded adapters are available.