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Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Path 7

Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Design Features

  • Travel ranges from 100 μm to 600 μm available
  • Long device lifetime
  • High-precision, frictionless flexure guidance system
  • Superior positioning resolution and linearity to 0.007% with direct-metrology capacitive sensor options
  • Mounting compatibility with other QNP-series piezo nanopositioners
  • Open-loop and vacuum versions

High Quality in a Compact Package

The QNP piezo stages are guided by precision flexures that are optimized using finite element analysis to ensure high-stiffness and long device life. The resulting design offers outstanding stiffness and resonant frequency enabling high process throughput and fast closed-loop response. Furthermore, the integrated XY package minimizes stage stack height and moving mass, resulting in superior static and dynamic multi-axis performance.

High-Resolution and Positioning Accuracy

All of the QNP piezo stages have the option of closed-loop feedback using a unique capacitive sensor design that allows for sub-nanometer resolution and high linearity. The capacitive sensors measure the output of the positioning carriage directly, enabling superior accuracy and repeatability.

Ultra-Precision Control

When coupled with Aerotech’s Q-series controllers and drives, the QNP piezo nanopositioning stages demonstrate sub-nanometer positioning resolution and in-position stability (jitter), and high-positioning bandwidth. Software options such as Aerotech’s Dynamic Controls Toolbox and Motion Designer packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times.

Automatic parameter and calibration identification is accomplished using Aerotech’s FlashConfig feature. The stage is automatically identified and all operational parameters including axis calibration data are uploaded into the controller ensuring safe, accurate and true “plug-and-play” operation.

Learn more about our controls and software.

Design Flexibility

Aerotech’s QNP piezo stages are available with capacitance sensor feedback or without feedback (open-loop). Open-loop provides a cost-effective option for applications where compact size, high-dynamics, and sub-nanometer positioning resolution are required, but absolute positioning accuracy and repeatability are not required. Open-loop designs can also be used where the piezo position is controlled via an external feedback source (interferometer, vision system, photodetector, etc.).

An optional mounting plate provides direct mounting to English or metric breadboard optical tables. The QNP-series also includes the -L and -Z stages in which common travels mount together with adapter plates.

All QNP piezo stages are available in vacuum-prepared versions upon request.

Dimensions

QNP-XY



Ordering Information

QNP-XY Series Single-Axis, High-Dynamic Piezo Nanopositioning Stages

Option Description
QNP40XY-100QNP40XY-100 two-axis XY piezo nanopositioning stage, 100 x 100 µm CL travel
QNP50XY-250QNP50XY-250 two-axis XY piezo nanopositioning stage, 250 x 250 µm CL travel
QNP60XY-500QNP60XY-500 two-axis XY piezo nanopositioning stage, 500 x 500 µm CL travel

Feedback (Optional)

Option Description
-CCapacitance sensor feedback

Mounting Plate (Optional)

Option Description
-MPMounting plate for English and metric optical breadboard tables

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TASIntegration - Test as system

Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components

Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Adapter Plates (to be ordered as a separate line item)

Option Description
AP-QNP250XY-100ZAdapter plate, lower: QNP250XY, upper: QNP100Z
AP-QNP500XY-100Z-250ZAdapter plate, lower: QNP500XY, upper: QNP100Z/250Z

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