QNP2 Two-Axis, Parallel Kinematic, XY Piezo Nanopositioning Stages

Description

Design Features

• Travels to 240 µm x 240 µm
• Large square clear aperture up to 70 mm x 70 mm
• Superior multi-axis accuracy via parallel-kinematic design
• High stiffness and dynamics resulting in high process throughput
• High-precision, frictionless flexure guidance
• Patent pending design provides unmatched geometric performance
• Long device lifetime
• Superior positioning resolution and linearity with direct-metrology capacitive sensor option
• Open-loop and vacuum versions

QNP2 piezo stages come standard with a large, clear aperture with closed-loop travels up to 200 µm x 200 µm (open-loop travels to 240 µm x 240 µm). The design is ideal for optical microscopy, scanning probe microscopy, x-ray transmission microscopy and other inspection or manufacturing applications that require two-sided part access.

Precision Parallel-Kinematic Design

QNP2 piezo stages employ a parallel-kinematic flexure and metrology design that ensures the highest levels of multi-axis accuracy. Guided by precision flexures which are FEA-optimized to ensure high-stiffness and long device life, the QNP2 stages offer best-in-class stiffness and resonant frequency, enabling high process throughput and fast closed-loop response.

Using a patent-pending drive design, yaw errors are minimized while still maintaining an Abbe-compliant metrology system. This design results in unmatched positioning performance over the entire XY travel space.

Sub-Nanometer Performance

All QNP2 piezo stages are available with closed-loop feedback (-C) or open-loop (no feedback). The unique capacitive sensor parallel-metrology design measures the output of the positioning carriage, directly enabling sub-nanometer resolution, linearity errors below 0.01%, and single-digit nanometer repeatability.

Ultra-Precision Control

When coupled with Aerotech’s Q-series controllers and drives, the QNP2 stages demonstrate sub-nanometer positioning resolution, in-position stability (jitter), and high-positioning bandwidth. Software options such as Aerotech’s Dynamic Controls Toolbox and Motion Designer packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times. OEM drive options are also available. Aerotech’s controller architecture easily enables high-speed, tightly-controlled coordinated motion between piezo stages, servos, steppers, and galvos.

Design Options

An optional mounting plate provides direct mounting to English or metric breadboard optical tables. A solid tabletop option is also available. QNP2 piezo stages are available in custom materials and vacuum-prepared versions upon request.