Description

Design Features

• Closed-loop travels from 10 μm to 40 μm
• Direct-drive actuation enables fast response times and higher-throughput processes
• High-precision, frictionless flexure guidance
• Long device lifetime
• Superior positioning resolution and linearity with direct-metrology capacitive sensor option
• Open-loop and vacuum versions

The QNPHD employs a direct-drive actuation design and an optimized structure enabling millisecond-level response and move-and-settle times.

Guided by precision flexures that are optimized using finite element analysis to ensure high-stiffness and long device life, the QNPHD provides high-dynamics while maintaining excellent geometric performance (straightness and angular errors) for critical nanopositioning applications.

High-Resolution and Positioning Accuracy

The QNPHD has the option of closed-loop feedback (-C) using a unique capacitive sensor design that allows for sub-nanometer resolution and single-digit nanometer linearity errors. The capacitive sensors measure the output of the positioning carriage directly enabling superior accuracy and repeatability.

Ultra-Precision Control

When coupled with Aerotech’s Q-series controllers and drives, the QNPHD demonstrates sub-nanometer positioning resolution and high-positioning bandwidth. Software options such as Aerotech’s Dynamic Controls Toolbox and Motion Designer packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times.

Automatic parameter and calibration identification is accomplished using Aerotech’s FlashConfig feature. The stage is automatically identified and all operational parameters including axis calibration data are uploaded into the controller ensuring safe, accurate, and true “plug-and-play” operation.

Learn more about our controls and software.

Mounting Flexibility

The QNPHD is available with rear and side cable exit options along with mounting features for both horizontal and vertical orientations. This flexibility allows the user to orient and package the stage for the most optimal arrangement without designing various adapter plates and brackets that increase size and design complexity.

An optional mounting plate provides direct mounting to English or metric optical breadboard tables. Custom designs and vacuum-prepared versions are available upon request.