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Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Path 7

Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Design Features

  • Integral bellows protect the drive and bearing system from contamination
  • Designed for high-performance scanning and inspection
  • Air-on-air preload on all air-bearing surfaces
  • Linear encoder feedback provides nanometer-level resolution
  • High stiffness for heavy loads and excellent geometrical performance
  • Travel up to 500 mm

Air-Bearing Design for High Dynamic Performance

The ABL1500-B incorporates an air-on-air preload on both the vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.

Proprietary manufacturing techniques result in a stage with unsurpassed geometrical characteristics. The air bearing has an inherent averaging effect that maximizes performance. The thin film will fill small surface voids and allow for other irregularities. This characteristic yields superior pitch, roll, yaw, straightness and flatness specifications.

Linear Motor Drive

The driving force behind this stage is Aerotech’s BLMC series brushless linear servomotor. Aerotech’s long history and experience as a motor manufacturer is reflected in this design. The BLMC utilizes an ironless forcer, which means there is zero cogging and no attractive forces, resulting in unsurpassed smoothness of motion. Capable of generating high force and velocity, the BLMC represents the ultimate combination of power and performance.

Zero Maintenance

Our totally noncontact air bearing, noncontact linear motor drive, and noncontact feedback device ensure years of maintenance-free operation at the high performance levels that are expected of Aerotech equipment. Because there is no mechanical contact between moving elements, the ABL1500-B experiences no wear or reduction in performance over time. Service life is virtually unlimited and since there is no lubrication – only clean, dry gas – air bearings are ideal for cleanroom and medical applications.

Cable Management

We carefully optimize the cable bend radius to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech's modular design makes cable replacement quick and easy with minimal downtime. We include all customer-required cables, air hoses, etc. in our CMS bundle to facilitate integration into the final system. Both ends are fully connectorized for simple integration into the customer's machine.

Integral Bellows

The ABL1500-B uses an integral bellows system to provide a high level of environmental protection. This system protects the air bearings and drive system from process-generated contamination like abrasive debris. The design also has been optimized to minimize the influence of the bellows on the stage's geometric performance.

Dimensions

ABL1500-B



ABL1500-B-XY



Ordering Information

ABL1500-B Air-Bearing Direct-Drive Linear Travel

Travel (Required)

Option Description
-050 50 mm travel
-100 100 mm travel
-200200 mm travel
-300300 mm travel
-400400 mm travel
-500500 mm travel

Feedback (Required)

Option Description
-E1 Incremental linear encoder, 1 Vpp amplified sine output
-E2 Incremental linear encoder, 0.1 µm TTL line driver output
-E3 High-accuracy incremental linear encoder, 1 Vpp amplified sine output

Cable Management (Required)

Option Description
-CMS1Single axis cable management system
-CMS2 Cable management system for XY assembly
-CMS3 Cable management system for XIO, 2 extra cables, 1 extra air
-CMS4 Cable management system for Y axis, upper axis only
-CMS5 Cable management system for YZ assembly, upper axis only
-CMS6 Cable management system for YIO, 2 extra cables, 1 extra air, upper axis only

Metrology (Required)

Option Description
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Accessories (to be ordered as a separate line item)

Option Description
ALIGN-NPA Non-precision XY assembly
ALIGN-PA10XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for short travel stages.
ALIGN-PA5XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for short travel stages.
ABF Air-bearing filtration kit

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