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Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Path 7

Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Design Features

  • Designed for high-performance scanning and inspection
  • Active air preload on all air-bearing surfaces
  • Linear encoder feedback provides sub-nanometer resolution
  • High stiffness for heavy loads and excellent geometrical performance
  • Four models with travels from 50 to 200 mm
  • Integral counterbalance

Leading-edge manufacturing, particularly in the semiconductor and data storage industries, demands positioning tolerances beyond the capability of conventional ball-screw and mechanical-bearing positioning systems. The ABL1500Z, with its fully active preload, exceptionally high stiffness and excellent geometric characteristics, was designed specifically to meet those demands.

Air-Bearing Design for High Dynamic Performance

The ABL1500Z incorporates an air-on-air preload on both the vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.

Aerotech's proprietary manufacturing techniques result in a stage with unsurpassed geometric characteristics, which maximize performance by yielding superior pitch, roll, yaw, straightness and flatness specifications.

Zero-Cogging Linear Motor Drive

The driving force behind this stage is Aerotech's BLMC series brushless linear servomotor. The BLMC utilizes an ironless forcer, which means there is zero cogging and no attractive forces, resulting in unsurpassed smoothness of motion.

No Maintenance

Our totally noncontact air bearing, noncontact linear motor drive and noncontact feedback device ensure years of maintenance-free operation at the high performance levels expected of Aerotech equipment. Because there is no mechanical contact between moving elements, the ABL1500Z experiences no wear or reduction in performance over time. Service life is virtually unlimited and because there is no lubrication – only clean, dry gas – air bearings are ideal for cleanroom and medical applications.

Cable Management

We carefully optimize the cable bend radius to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech's modular design makes cable replacement quick and easy with minimal downtime.

We include all customer-required cables, air hoses, etc. in our CMS bundle to facilitate integration into the final system. Both ends are fully connectorized for simple integration into the customer's machine.

Dimensions

ABL1500Z



Ordering Information

ABL1500Z Air-Bearing Direct-Drive Linear Stage

Travel (Required)

Option Description
-050 50 mm travel
-100 100 mm travel
-150 150 mm travel
-200 200 mm travel

Feedback (Required)

Option Description
-E1Incremental linear encoder, 1 Vpp amplified sine output
-E2 Incremental linear encoder, 0.1 µm TTL line driver output
-E3High-accuracy incremental linear encoder, 1 Vpp amplified sine output

Cable Management (Required)

Option Description
-CMS1Single axis cable management system
-CMS2 Cable management system for ZT assembly

Metrology (Required)

Option Description
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Accessories (to be ordered as a separate line item)

Option Description
ALIGN-NPA Non-precision XY assembly
ALIGN-PA10XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for short travel stages.
ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for short travel stages.
ABF Air-bearing filtration kit

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